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PUBLICATIONS
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BOOKS EDITED
- Active Matrix Liquid
Crystal Displays: Technology and Applications, T. Voutsas, and T.-J. King, Editors,
Proceedings of SPIE -- the International Society for Optical
Engineering,
Vol. 3014 (SPIE: Bellingham, WA, USA), ISBN 0-8194-2425-0, 1997.
- CMOS Front-End
Materials and Process Technology, T.-J. King, B. Yu, R. J. P.
Lander, and S. Saito, Editors, Materials Research Society Symposium
Proceedings Vol. 765 (Materials Research Society: Warrendale, PA, USA),
2003.
- Materials and Processes
for Nonvolatile Memories, A. Claverie, D. Tsoukalas, T-J. King, and J.
Slaughter, Editors, Materials Research Society Symposium
Proceedings Vol. 830 (Materials Research Society: Warrendale, PA, USA),
2005.
BOOK
CHAPTERS
- T.-J. King Liu
and L. Chang, “Transistor Scaling to the Limit,” Moore’s
Law: Beyond Planar Silicon CMOS and into the Nano Era,
Springer-Verlag,
2008.
MAGAZINE ARTICLES
- T.-J. King,
“Poly-Si TFT technologies for future flat-panel displays,” Information Display, Vol. 17, No.
4, pp. 24-26, 2001.
- A. E. Franke, T.-J.
King, and R. T. Howe, “Integrated MEMS technologies,” MRS Bulletin, Vol. 26, No. 4, pp.
291-295, 2001.
- L. Chang, Y.-K. Choi, J. Kedzierski, N. Lindert, P.
Xuan, J. Bokor, C. Hu, and T.-J.
King, “Moore’s Law lives on: ultra-thin body SOI and FinFET CMOS
transistors look to continue Moore’s Law for many years to come,” IEEE Circuits & Devices, Vol.
19, No. 1, pp. 35-42, 2003.
- T. Skotnicki, J. A. Hutchby, T.-J. King, H.-S. P.
Wong, and F. Boeuf, “The end of CMOS scaling,” IEEE
Circuits & Devices, Vol.
21, pp. 16-26, 2005.
- T.-J. King,
“Challenges and opportunities for nanoscale CMOS technology,” The Electrochemical Society
INTERFACE, Vol. 14, No. 1, pp. 38-42, 2005.
REFEREED JOURNAL PUBLICATIONS
Regular Papers:
- T.-J. King,
M. G. Hack, and I-W. Wu, “Effective density-of-states distributions for
accurate modeling of polycrystalline-silicon thin-film transistors,” Journal of Applied Physics, Vol.
75, No. 2, pp. 908-913, 1994.
- T.-J. King,
J. P. McVittie, K. C. Saraswat, and J. R. Pfiester, “Electrical
properties of heavily doped polycrystalline silicon-germanium films,” IEEE Transactions on Electron Devices,
Vol. 41, No. 2, pp. 228-232, 1994.
- T.-J. King
and K. C. Saraswat, “Deposition and properties of low-pressure
chemical-vapor deposited polycrystalline silicon-germanium films,” Journal of the Electrochemical Society,
Vol. 141, No. 8, pp. 2235-2241, 1994.
- T.-J. King
and K. C. Saraswat, “Polycrystalline silicon-germanium thin-film
transistors,” IEEE Transactions on
Electron Devices, Vol. 41, No. 9, pp. 1581-1591, 1994.
- J. D. Bernstein, S. Qin, C. Chan, and T.-J. King, “High dose-rate
hydrogen passivation of polycrystalline silicon CMOS TFT’s by plasma
ion implantation,” IEEE Transactions
on Electron Devices, Vol. 43, No. 11, pp. 1876-1882, 1996.
- E. C. Onyiriuka, C. B. Moore, F. P. Fehlner, N. J.
Binkowski, D. Salamida, T.-J.
King, and J. G. Couillard, “Effect of RCA cleaning on the
surface chemistry of glass and polysilicon films as studied by ToF-SIMS
and XPS,” Surface and Interface
Analysis, Vol. 26, pp. 270-277, 1998.
- B. Yu, D.-H. Ju, W.-C. Lee, N. Kepler, T.-J. King, and C. Hu,
“Gate engineering for deep-submicron CMOS transistors,” IEEE Transactions on Electron Devices,
Vol. 45, No. 6, pp. 1253-1262, 1998.
- S. Qin, Y. Zhou, T. Nakatsugawa, I. F. Husein, C. Chan,
and T.-J. King,
“Plasma ion implantation hydrogenation of poly-Si CMOS thin-film
transistors at low energy and high dose rate using an
inductively-coupled plasma source,” IEEE
Transactions on Electron Devices, Vol. 45, No. 6, pp. 1324-1328,
1998.
- S. Yamamichi, A. Yamamichi, D. Park, T.-J. King, and C. Hu,
“Impact of time dependent dielectric breakdown and stress induced
leakage current on the reliability of high dielectric constant
(Ba,Sr)TiO3 thin film capacitors for Gbit-scale DRAMs,” IEEE Transactions on Electron Devices,
Vol. 46, No. 2, pp. 342-347, 1999.
- K. L Scott, T.-J.
King, K.-N. Leung, and M. A. Lieberman, "Pattern generators and
microcolumns for ion beam lithography," Journal of Vacuum Science and Technology B,
Vol. 18, No. 6, pp. 3172-3176, 2000.
- D. Hisamoto, W.-C. Lee, J. Kedzierski, H. Takeuchi, K.
Asano, C. Kuo, E. Anderson, T.-J.
King, J. Bokor, and C. Hu, “FinFET -- a self-aligned double-gate
MOSFET scalable to 20 nm,” IEEE
Transactions on Electron Devices, Vol. 47, No. 12, pp.
2320-2325, 2000.
- I. Polishchuk, Q. Lu, Y.-C. Yeo, T.-J. King, and C. Hu,
“Intrinsic reliability projections for a thin JVD silicon nitride gate
dielectric in P-MOSFET,” IEEE
Transactions on Device and Materials Reliability, Vol. 1, No. 1,
pp. 4-8, 2001.
- Y.-C. King, T.-J.
King, and C. Hu, "Charge-trap memory device fabricated by
oxidation of Si1-xGex," IEEE Transactions on Electron Devices,
Vol. 48, No. 4, pp. 696-700, 2001.
- X. Huang, W.-C. Lee, C. Kuo, D. Hisamoto, L. Chang, J.
Kedzierski, E. Anderson, H. Takeuchi, Y.-K. Choi, K. Asano, V.
Subramanian, T.-J. King,
J. Bokor, and C. Hu, “Sub-50 nm p-channel FinFET,” IEEE Transactions on Electron Devices,
Vol. 48, No. 5, pp. 880-886, 2001.
- K. Asano, Y.-K. Choi, T.-J. King, and C. Hu,
“Patterning sub-30-nm MOSFET gate with i-line lithography,” IEEE Transactions on Electron Devices,
Vol. 48, No. 5, pp. 1004-1006, 2001.
- Y.-C. King, C. Kuo, T.-J. King, and C. Hu,
“Optimization of sub-5-nm multiple-thickness gate oxide formed by
oxygen implantation,” IEEE
Transactions on Electron Devices, Vol. 48, No. 6, pp. 1279-1281,
2001.
- I. Polishchuk, Y.-C. Yeo, Q. Lu, T.-J. King, and C. Hu,
“Hot-carrier reliability comparison for pMOSFETs with ultrathin
silicon-nitride and silicon-oxide gate dielectrics,” IEEE Transactions on Device and Materials
Reliability, Vol. 1, No. 3, pp. 158-162, 2001.
- K. L Scott, T.-J.
King, K.-N. Leung, and R. F. Pease, "Characterization of
multicusp-plasma ion source brightness using micron-scale apertures," Journal of Vacuum Science and Technology B,
Vol. 19, No. 6, pp. 2602-2606, 2001.
- J. Reijonen, Q. Ji, T.-J. King, K.N. Leung, A.
Persaud, and S. Wilde, “Compact focusing system for ion and elecron
beams,” Journal of Vacuum Science
& Technology B, Vol. 20, No. 1, pp. 180-184, 2002.
- 2002 EDS Paul Rappaport
Award: Y.-C. Yeo, V. Subramanian, J. Kedzierski, P. Xuan, T.-J. King, J. Bokor, and
C. Hu, “Design and fabrication of 50-nm thin-body p-MOSFETS with a SiGe
heterostructure channel,” IEEE
Transactions on Electron Devices, Vol. 49, No. 2, pp. 279-286,
2002.
- Y.-K. Choi, T.-J.
King, and C. Hu, “A spacer patterning technology for nanoscale
CMOS,” IEEE Transactions on Electron
Devices, Vol. 49, No. 3, pp. 436-441, 2002.
- P. Ranade, H. Takeuchi, W.-C. Lee, V. Subramanian, and T.-J. King, “Application of
silicon-germanium in the fabrication of ultra-shallow extension
junctions for sub-100 nm PMOSFETs,”
IEEE Transactions on Electron Devices, Vol. 49, No. 8, pp.
1436-1443, 2002.
- Q. Ji, X. Jiang, T.-J. King, K.-N. Leung, K.
Standiford, and S. B. Wilde, “Improvement in brightness of
multicusp-plasma ion source,” Journal
of Vacuum Science & Technology B, Vol. 20, No. 6, pp.
2717-2720, November 2002.
- H. Takeuchi, P. Ranade, and T.-J. King, “Suppression of
boron TED by low temperature SPC anneal prior to dopant activation,” IEEE Transactions on Electron Devices,
Vol. 49, No. 12, pp. 2343 -2344, 2002.
- K. J. Yang, T.-J.
King, C. Hu, S. Levy, and H. N. Al-Shareef, “Electron mobility
in MOSFETs with ultrathin RTCVD silicon nitride/oxynitride stacked gate
dielectrics,” Solid-State Electronics,
Vol. 47, pp. 149-153, 2003.
- Y.-C. Jeon, A. Franke, T.-J. King, and R. T. Howe,
"Properties of phosphorus-doped poly-SiGe films for MEMS applications,
" Journal of The Electrochemical
Society, Vol. 150, No. 1, pp. H1-H6, 2003.
- L. Chang, K. J. Yang, Y.-C. Yeo, I. Polishchuk, T.-J. King, and C. Hu,
“Direct-tunneling gate leakage current in double-gate and ultra-thin
body MOSFETs,” IEEE Transactions on
Electron Devices, Vol. 49, No. 12, pp. 2288-2295, 2002.
- A. E. Franke, J. M. Heck, T.-J. King, and R. T. Howe,
“Polycrystalline silicon-germanium films for integrated microsystems,” Journal of Microelectromechanical Systems,
Vol. 12, pp. 160-171, 2002.
- Y. Cao, R. A. Groves, N. D. Zamdmer, J.-O. Plouchart, R.
A. Wachnik, X. Huang, T.-J.
King, and C. Hu, “Frequency-independent equivalent-circuit model
for on-chip spiral inductors,” IEEE
Journal of Solid-State Circuits, Vol. 38, No. 3, pp. 419-426,
2003.
- X. Huang, P. Restle, T. Bucelot, Y. Cao, T.-J. King, and C. Hu,
“Loop-Based Interconnect Modeling and Optimization Approach for
Multigigahertz Clock Network Design,”
IEEE Journal of Solid-State Circuits, Vol. 38, No. 3, pp.
457-463, 2003.
- D. Ha, P. Ranade, Y.-K. Choi, J.-S. Lee, T.-J. King, and C. Hu,
“Molybdenum gate work function engineering for ultra-thin-body
silicon-on-insulator (UTB SOI) MOSFETs,” Japanese Journal of Applied Physics Part 1,
Vol. 42, No. 4B, pp. 1979-1982, 2003.
- M. She and T.-J.
King, “Impact of crystal size and tunnel dielectric on
semiconductor nanocrystal memory performance,” IEEE Transactions on Electron Devices,
Vol. 50, No. 9, pp. 1934-1940, 2003.
- Invited: L.
Chang, Y.-K. Choi, D. Ha, P. Ranade, S.
Xiong, J. Bokor, C. Hu, and T.-J.
King, “Extremely scaled silicon nano-CMOS devices,” Proceedings of the IEEE, Vol. 91,
No. 11, pp. 1860-1873, 2003.
- C. Kuo, T.-J.
King, and C. Hu, “A capacitorless double gate DRAM technology
for sub-100-nm embedded and stand-alone memory applications,” IEEE Transactions on Electron Devices,
Vol. 50, No. 12, pp. 2408-2416, 2003.
- H. Takeuchi and T.-J.
King, “SCA (Surface Charge Analysis) of ultrathin HfO2,
SiO2, and Si3N4,” Journal of the Electrochemical Society,
Vol. 151, No. 2, pp. H44-H48, 2004.
- H. Takeuchi, P. Ranade, and T.-J. King, “Low
temperature dopant activation technology using elevated Ge-S/D
structure,” Applied Surface Science,
Vol. 224, Issues 1-4, pp. 73-76, 2004.
- M.-A. E. Eyoum and T.-J. King, “Low resistance
silicon-germanium technology for modular integration of MEMS with
electronics,” Journal of the
Electrochemical Society, Vol. 151, No. 3, pp. J21-J25, 2004.
- H. Takeuchi and T.-J.
King, “Spectroscopic ellipsometry study on the oxidation of pure
hafnium on silicon,” Journal of
Vacuum Science and Technology A, July/August 2004.
- S. Sedky, R. T. Howe, and T.-J. King, “Pulsed-laser
annealing, a low-thermal-budget technique for eliminating stress
gradient in poly-SiGe MEMS structures,” Journal of Microelectromechanical Systems,
Vol. 13, No. 4, 2004.
- S. Sedky, J. Schroeder, T. Sands, T.-J. King, and R. T. Howe, “Effect of
excimer laser annealing on the structural properties of silicon
germanium films,” Journal
of Materials Research, Vol. 19, No. 12, pp. 3503-3511, 2004.
- D. Ha, H. Takeuchi, Y.-K. Choi, and T.-J. King, “Molybdenum
gate technology for ultra-thin-body MOSFETs and FinFETs,” IEEE Transactions on Electron Devices,
Vol. 51, No. 12, pp. 1989-1996, 2004.
- Y. Cao, X. Huang, D. Sylvester, T.-J. King, and C. Hu,
"Impact of on-chip interconnect frequency-dependent R(f)L(f) on digital
and RF design," IEEE Transactions on
Very Large Scale Integration (VLSI) Systems, Vol. 13, No. 1, pp.
158-162, 2005.
- S. Xiong, T.-J. King, and J. Bokor, “Study of the
extrinsic parasitics in nano-scale transistors,” Semiconductor Science and Technology,
Vol. 20, pp. 652-657, 2005.
- S. Xiong, T.-J.
King, and J. Bokor, “A comparison study of symmetric
ultrathin-body double-gate devices with metal source/drain and doped
source/drain,” IEEE Transactions on
Electron Devices, Vol. 52, No. 8, pp. 1859-1867, 2005.
- H. Takeuchi, M. She, K. Watanabe, and T.-J. King, “Damage-less
sputter deposition by plasma charge trap for metal gate technologies,” IEEE Transactions on
Semiconductor Manufacturing, Vol. 18, No. 3, pp. 350-354, 2005.
- H. Takeuchi, A. Wung, X. Sun, R. T. Howe, and T.-J. King,
“Thermal
budget limits of quarter-micron foundry CMOS for post-processing MEMS
devices,” IEEE Transactions on
Electron Devices, Vol. 52, No. 9, pp. 2081-2086, 2005.
- L. Xu, C. Grigoropoulos, and T.-J. King,
"High-performance thin-silicon-film transistors fabricated by double
laser crystallization," Journal of
Applied Physics, Vol. 99, pp. 0345408-1 to 0345408-6, 2006.
- C. W. Low, T.-J.
King Liu, and R. T. Howe, “Characterization of polycrystalline
silicon-germanium film deposition for modularly integrated MEMS
applications,” IEEE Journal of
Microelectromechanical
Systems, Vol. 16, No. 1, pp. 68-77, 2007.
- R. A. Vega and T.-J.
King Liu, “Low pressure chemical vapor deposition of
in-situ-doped n- and p-type Si1-xGex films at 425oC,
Journal of the
Electrochemical Society, Vol. 154, No. 9, pp. H789-H793, 2007.
- Y. Yasuda, T.-J.
K. Liu, and C. Hu, “Flicker-noise impact on scaling of
mixed-signal CMOS with HfSiON,” IEEE
Transactions on Electron Devices, Vol. 55, No. 1, pp. 417-422,
2008.
- Invited: G. K.
Fedder, R. T. Howe, T.-J. K.
Liu, and E. P. Quevy, “Technologies for co-fabricating MEMS and
electronics,” Proceedings of the IEEE,
Vol. 96, No. 2, pp. 306-322, 2008.
- G. Liu, P. Haldi, T.-J. King Liu, and A. M.
Niknejad, “Fully integrated CMOS power amplifier with efficiency
enhancement at power back-off,” IEEE
Journal of Solid-State Circuits, Vol. 43, No. 3, pp. 600-609,
2008.
- R. A. Vega and T.-J.
King Liu, “A modeling study of symmetric double-gate
metallic-source/drain MOSFETs with doped extension regions,” to appear
in IEEE Transactions on Electron
Devices.
Letters and Briefs:
- T.-J. King,
J. R. Pfiester, and K. C. Saraswat, “A variable-work-function
polycrystalline-Si1-xGex gate material for
submicrometer CMOS technologies,” IEEE
Electron Device Letters, Vol. 12, No. 10, pp. 533-535, 1991.
- T.-J. King,
K. C. Saraswat, and J. R. Pfiester, “PMOS transistors in LPCVD
polycrystalline silicon-germanium films,” IEEE Electron Device Letters, Vol.
12, No. 11, pp. 584-586, 1991.
- T.-J. King,
and K. C. Saraswat, “Low-temperature (<550oC) fabrication
of poly-Si thin-film transistors,”
IEEE Electron Device Letters, Vol. 13, No. 6, pp. 309-311, 1992.
- M. Cao, T.-J.
King, and K. C. Saraswat, “Determination of the densities of gap
states in hydrogenated polycrystalline Si and Si0.8Ge0.2
films,” Applied Physics Letters,
Vol. 61, No. 6, pp. 672-674, 1992.
- S. Jurichich, T.-J.
King, K. C. Saraswat, and J. Mehlhaff, “Low thermal budget
polycrystalline silicon-germanium thin-film transistors fabricated by
rapid thermal annealing,” Japanese
Journal of Applied Physics, Vol. 33, No. 8, pp. L1139-L1141,
1994.
- D. S. Bang, M. Cao, A. Wang, K. C. Saraswat, and T.-J. King, “Resistivity of
boron and phosphorus doped polycrystalline Si1-xGex
films,” Applied Physics Letters,
Vol. 66, No. 2, pp. 195-197, 1995.
- J. D. Bernstein, S. Qin, C. Chan, and T.-J. King, “Hydrogenation
of polycrystalline silicon thin film transistors by plasma ion
implantation,” IEEE Electron Device
Letters, Vol. 16, No. 10, pp. 421-423, 1995.
- B. Yu, D.-H. Ju, N. Kepler, T.-J. King, and C. Hu,
“Impact of Gate Microstructure on Complementary
Metal-Oxide-Semiconductor Transistor Performance,” Japanese Journal of Applied Physics Part
2, Letters, Vol. 36, No. 9AB, pp. L1150-L1152, 1997.
- W.-C. Lee, Y.-C. King, T.-J. King, and C. Hu,
“Observation of reduced poly-gate depletion effect for poly-Si0.8Ge0.2-gate
NMOS devices,” Electrochemical and
Solid State Letters, Vol. 1, No. 1, pp. 58-59, 1998.
- W.-C. Lee, Y.-C. King, T.-J. Kingg, and C. Hu,
“Investigation of poly-Si1-xGex for dual gate
CMOS technology,” IEEE Electron
Device Letters, Vol. 19, No. 7, pp. 247-249, 1998.
- Q. Lu, D. Park, A. Kalnitsky, C. Chang, C.-C. Cheng, S.
P. Tay, T.-J. King,
and C. Hu, “Leakage current comparison between ultra-thin Ta2O5
films and conventional gate dielectrics,” IEEE Electron Device Letters, Vol.
19, No. 9, pp. 341-342, 1998.
- D. Park, Y.-C. King, Q. Lu, T.-J. King, C. Hu, A.
Kalnitsky, S.-P. Tay, and C.-C. Cheng, “Transistor characteristics with
Ta2O5 gate dielectric,” IEEE Electron Device Letters, Vol.
19, No. 11, pp. 441-443, 1998.
- W.-C. Lee, T.-J.
King, and C. Hu, “Observation of reduced boron penetration and
poly-gate depletion for poly-Si0.8Ge0.2-gated
PMOS devices,” IEEE Electron Device
Letters, Vol. 20, No. 1, pp. 9-11, 1999.
- W.-C. Lee, B. Watson, T.-J. King, and C. Hu,
“Enhancement of PMOS device performance with poly-SiGe Gate,” IEEE Electron Device Letters, Vol.
20, No. 5, pp. 232-234, 1999.
- W.-C. Lee, T.-J.
King, and C. Hu, “Evidence of direct hole tunneling through
ultrathin gate oxide using P+ poly-SiGe gate,” IEEE Electron Device Letters, Vol.
20, No. 6, pp. 268-270, 1999.
- Y.-J. Tung, J. Boyce, J. Ho, X. Huang, and T.-J. King, “A comparison
of hydrogen and deuterium plasma treatment effects on polysilicon TFT
performance and DC reliability,” IEEE
Electron Device Letters, Vol. 20, No. 8, pp. 387-389, 1999.
- Y.-C. King, T.-J.
King, and C. Hu, “A long-refresh dynamic/quasi-nonvolatile
memory device with 2-nm tunneling oxide,” IEEE Electron Device Letters, Vol.
20, No. 8, pp. 409-411, 1999.
- Y. C. Yeo, V. Subramanian, J. Kedzierski, P. Xuan, T.-J. King, J. Bokor, and
C. Hu, “Nanoscale ultra-thin-body silicon-on-insulator P-MOSFET with a
SiGe/Si heterostructure channel,” IEEE
Electron Device Letters, Vol. 21, No. 4, pp. 161-163, 2000.
- Y.-K. Choi, K. Asano, N. Lindert, V. Subramanian, T.-J. King, J. Bokor, and
C. Hu, “Ultrathin-body SOI MOSFET for deep-sub-tenth micron era,” IEEE Electron Device Letters, Vol.
21, No. 5, pp. 254-255, 2000.
- Y. C. Yeo, Q. Lu, W. C. Lee, T.-J. King, C. Hu, X. Wang,
X. Guo, and T.P. Ma, “Direct tunneling gate leakage current in
transistors with ultrathin silicon nitride gate dielectric,” IEEE Electron Device Letters, Vol.
21, No. 11, pp. 540-542, 2000.
- Y. C. Yeo, Q. Lu, P. Ranade, H. Takeuchi, K. J. Yang, I.
Polishchuk, T.-J. King,
C. Hu, S. C. Song, H. F. Luan, and D.-L. Kwong, “Dual metal gate CMOS
technology with ultrathin silicon nitride gate dielectric,” IEEE Electron Device Letters, Vol.
22, No. 5, pp. 227-229, 2001.
- Q. Lu, Y. C. Yeo, K. J. Yang, R. Lin, I. Polishchuk, T.-J. King, C. Hu, S. C.
Song, H. F. Luan, D.-L. Kwong, X. Guo, Z. Luo, X. Wang, and T.-P. Ma,
“Two silicon nitride technologies for post-SiO2 MOSFET gate
dielectric,” IEEE Electron Device
Letters, Vol. 22, No. 7, pp. 324-326, 2001.
- I. Polishchuk, P. Ranade, T.-J. King, and C. Hu,
“Dual work function metal gate CMOS technology using metal
interdiffusion,” IEEE Electron
Device Letters, Vol. 22, No. 9, pp. 444-446, 2001.
- Y.-K. Choi, D. Ha, T.-J. King, and C. Hu,
“Nanoscale ultrathin body PMOSFETs with raised selective germanium
source/drain,” IEEE Electron Device
Letters, Vol. 22, No. 9, pp. 447-448, 2001.
- N. Lindert, L. Chang, Y.-K. Choi, E. H. Anderson, W.-C.
Lee, T.-J. King, J.
Bokor, and C. Hu, “Sub-60-nm quasi-planar FinFETs fabricated using a
simplified process,” IEEE Electron
Device Letters, Vol. 22, No. 10, pp. 487-489, 2001.
- P. Ranade, H. Takeuchi, T.-J. King, and C. Hu,
“Work function engineering of molybdenum gate electrodes by nitrogen
implantation,” Electrochemical and
Solid-State Letters, Vol. 4, No. 11, pp. G85-G87, 2001.
- Y.-K. Choi, T.-J.
King, and C. Hu, “Nanoscale CMOS spacer FinFET for the terabit
era,” IEEE Electron Device Letters,
Vol. 23, No. 1, pp. 25-27, 2002.
- P. Ranade, H. Takeuchi, V. Subramanian, and T.-J. King, “Observation of
Boron and Arsenic mediated interdiffusion across Germanium/Silicon
interfaces,” Electrochemical and
Solid-State Letters, Vol. 5, No. 2, pp. G5-G7, 2002.
- R. Lin, Q. Lu, P. Ranade, T.-J. King, and C. Hu, “An
adjustable work function technology using Mo gate for CMOS devices,” IEEE Electron Device Letters, Vol.
23, No. 1, pp. 49-51, 2002.
- M. She, T.-J.
King, C. Hu, W. Zhu, Z. Luo, J.-P. Han, and T.-P. Ma, “JVD
silicon nitride as tunnel dielectric in p-channel flash memory,” IEEE Electron Device Letters, Vol.
23, No. 2, pp. 91-93, 2002.
- I. Polishchuk P. Ranade, T.-J. King, and C. Hu,
“Dual work function metal gate CMOS transistors by Ni-Ti
interdiffusion,” IEEE Electron
Device Letters, Vol. 23, No. 4, pp. 200-202, 2002.
- P. Ranade, H. Takeuchi, V. Subramanian, and T.-J. King, “A novel
elevated source/drain PMOSFET formed by Ge-B/Si intermixing,” IEEE Electron Device Letters, Vol.
23, No. 4, pp. 218-220, 2002.
- H. Takeuchi, P. Ranade, V. Subramanian, and T.-J. King, “Observation of
dopant-mediated intermixing at Ge/Si interface,” Applied Physics Letters, Vol. 80,
No. 20, pp. 3706-3708, May 2002.
- Y.-C. Yeo, P. Ranade, T.-J. King, and C. Hu,
“Effects of high-k gate dielectric materials on metal and silicon gate
workfunctions,” IEEE Electron Device
Letters, Vol. 23, No. 6, pp. 342-344, 2002.
- C. Kuo, T.-J.
King, and C. Hu, “A capacitorless double-gate DRAM cell,” IEEE Electron Device Letters, Vol.
23, No. 6, pp. 345-347, 2002.
- J.-S. Lee, Y.-K. Choi, D. Ha, T.-J. King, and J. Bokor,
“Low-frequency noise characteristics in p-channel FinFETs,” IEEE Electron Device Letters, Vol.
23, No. 12, pp. 722-724, 2002.
- H. Takeuchi and T.-J.
King, “Suppression of boron TED by low temperature SPC anneal
prior to dopant activation,” IEEE
Transactions on Electron Devices, Vol.
29, No. 12, pp. 2343-2344, 2002.
- J.-S. Lee, D. Ha, Y.-K. Choi, T.-J. King, and J. Bokor,
“Low-frequency noise characteristics of ultrathin body p-MOSFETs with
Molybdenum gate, IEEE Electron
Device Letters, Vol. 24, No. 1, pp. 31-33, 2003.
- J.-S. Lee, Y.-K. Choi, D. Ha, S. Balasubramanian, T.-J. King, and J. Bokor,
“Hydrogen annealing effect on DC and low-frequency noise
characteristics in CMOS FinFETs, IEEE
Electron Device Letters, Vol. 24, No. 3, pp. 186-188, 2003.
- M. She, H. Takeuchi, and T.-J. King,
“Silicon-nitride as a tunnel dielectric for improved SONOS-type flash
memory,” IEEE Electron Device Letters,
Vol. 24, No. 5, pp. 309-311, 2003.
- H. Takeuchi and T.-J.
King, “Scaling limits of hafnium-silicate films for CMOS
gate-dielectric application,” Applied
Physics Letters, Vol. 83, No. 4, pp. 788-790, July 2003.
- C. Kuo, T.-J.
King, and C. Hu, “Direct tunneling RAM (DT-RAM) for high-density
memory applications,” IEEE Electron
Device Letters, Vol. 24, No. 7, pp. 475-477, 2003.
- C. Kuo, T.-J.
King, and C. Hu, Bias polarity dependent effects of P+ floating
gate EEPROMs,” IEEE Transactions on
Electron Devices, Vol. 51, No. 2, pp. 282-285, 2004.
- H. Takeuchi, E. Quevy, S. A. Bhave, T.-J. King, and R. T. Howe,
“Ge-blade damascene process for post-CMOS integration of
nano-mechanical resonators,” IEEE
Electron Device Letters, Vol. 25, No. 8, pp. 529-531, 2004.
- W. Xiong, G. Gebara, J. Zaman, M. Gostkowski, B. Nguyen,
G. Smith, D. Lewis, C. R. Cleavelin, R. Wise, S. Yu, M. Pas, T.-J. King, and J. P.
Colinge, “Improvement of FinFET electrical characteristics by hydrogen
annealing,” IEEE Electron Device
Letters, Vol. 25, No. 8, pp. 541-543, 2004.
- H. Y. Wong, H. Takeuchi, T.-J. King, M. Ameen, and
A.
Agarwal, “Elimination of poly-Si gate depletion for sub-65nm CMOS
technologies by excimer laser annealing,” to appear in IEEE Electron Device Letters, Vol.
26, No. 4, pp. 234-236, 2005.
- A. Hokazono, S. Balasubramanian, K. Ishimaru, H.
Ishiuchi, T.-J. King Liu,
and C. Hu, “MOSFET design for forward body biasing scheme,” IEEE Electron Device Letters, Vol.
27, No. 5, pp. 387-389, 2006.
- A. Hokazono, S. Balasubramanian, K. Ishimaru, H.
Ishiuchi, C. Hu, and T.-J.
King Liu, “MOSFET hot-carrier reliability improvement by forward
body bias,” IEEE Electron Device
Letters, Vol. 27, No. 7, pp. 605-608, 2006.
- W. Xiong, C. R. Cleavelin, P. Kohli, C. Huffman, T.
Schulz, K. Schruefer, G. Gebara, K. Mathews, P. Patruno, I.
Cayrefourcq, M. Kennard, C. Mazure, K. Shin, and T.-J. King Liu, “Impact of
strained-silicon-on-insulator (sSOI) substrate on FinFET mobility,” IEEE Electron Device Letters, Vol.
27, No. 7, pp. 612-614, 2006.
- K. Shin, W. Xiong, C. Y. Cho, C. R. Cleavelin, T. Schulz,
K. Schruefer, P. Patruno, L. Smith, and T.-J. King Liu, “Study of
bending-induced strain effects on MuGFET performance,” IEEE Electron Device Letters, Vol.
27, No. 8, pp. 671-673, 2006.
- Q. Lu and T.-J.
King Liu, “Trap energy levels associated with indium and boron
impurities in SiO2,” Solid-State
and
Electrochemical Letters, Vol. 9, No. 9, pp. G296-G298, 2006.
- D. Good, P. Wickboldt, and T.-J. King Liu, “Defect
passivation in poly-Si TFTs by ion implantation and pulsed laser
annealing,” IEEE Electron Device
Letters, Vol. 27, No. 10, pp. 840-842, 2006.
- A. Padilla, T.-J.
King Liu, J. W. Hyun, I. Yoo, and Y. Park, “Dual-bit
gate-sidewall-storage FinFET non-volatile memory cell and new method of
charge detection,” IEEE Electron
Device Letters, Vol. 28, No. 6, pp. 502-505, 2007.
- D. Lee, T. Seidel, J. Dalton, and T.-J. King Liu, “ALD refill
of nanometer-scale gaps with high-k dielectric for advanced CMOS
technologies,” Electrochemical and
Solid-State Letters, Vol. 10, No. 9, pp. H257-H259, 2007.
- X. Sun, Q. Lu, H. Takeuchi, S. Balasubramanian, and T.-J.
King Liu, “Selective enhancement of SiO2 etch rate by
Ar ion
implantation for improved etch depth control,” Electrochemical and Solid-State Letters,
Vol. 10, No. 9, pp. D89-D91, 2007.
- W. Y. Choi, B.-G. Park, J. D. Lee, and T.-J. King Liu, “Tunneling
field-effect transistors (TFETs) with subthreshold swing (SS) less than
60 mV/dec,” IEEE Electron Device
Letters, Vol. 28, No. 8, pp. 743-745, 2007.
- J. Lai and T.-J.
King Liu, “Defect passivation by selenium ion implantation for
poly-Si thin film transistors,” IEEE
Electron Device Letters, Vol. 28, No. 8, pp. 725-727, 2007.
- F. W. DelRio, J. Lai, N. Ferralis, T.-J. King Liu, and R.
Maboudian, “Al-2%Si induced crystallization of amorphous silicon,”
accepted for publication in Electrochemical
and Solid-State Letters.
- X. Sun, Q. Lu, V. Moroz, H. Takeuchi, G. Gebara, J.
Wetzel, S. Ikeda, C. Shin, and T.-J. K. Liu, “Tri-gate
bulk MOSFET design for CMOS scaling to the end of the roadmap,” IEEE Electron Device Letters, Vol.
29, no. 5, 2008.
- R. Nathanael, W. Xiong, and T.-J. King Liu, “Impact of
gate-induced strain on MuGFET reliability,” IEEE Electron Device Letters, vol.
29, August 2008.
CONFERENCE PRESENTATIONS
Invited and Keynote:
- I-W. Wu, T.-J.
King, M. Hack, C. C. Tsai, A. G. Lewis, and A. Chiang, “Leakage
currents in polycrystalline silicon thin film transistors for liquid
crystal displays,” Proceedings of
International Semiconductor Device Research Symposium, pp.
21-24, 1993.
- T.-J. King,
“Trends in polycrystalline-silicon thin-film transistor technologies
for AMLCDs,” Proceedings of 2nd
International Workshop on Active Matrix Liquid Crystal Displays,
pp. 80-86, 1995.
- C. Chan, S. Qin, and T.-J. King, “Plasma ion
implantation for flat panel displays,” presented at the MRS 1996 Fall Meeting (Boston,
Massachusetts, USA), December 1996.
- T.-J. King,
“Status and prospect of silicon-germanium TFT technology for AMLCD
application,” Conference Record of
the 1997 International Display Research Conference, pp. M29-M35,
1997.
- T.-J. King,
“Polycrystalline silicon thin films for active-matrix flat-panel
displays,” presented at the 44th
National Symposium of the American Vacuum Society (San
Francisco, California, USA), October 1997.
- T.-J. King
and Y.-J. Tung, “Low-temperature poly-Si TFT technology for
lightweight, high-performance displays,” Proceedings of the 1997 International
Semiconductor Device Research Symposium (Charlottesville,
Virginia, USA), pp. 451-454, 1997.
- S. Yamamichi, A. Yamamichi, D. Park, H. Yabuta, T.
Iizuka, K. Arita, S. Sone, Y. Kato, S. Nishimoto, T.-J. King, C. Hu, and M.
Yoshida, “Reliability study on high dielectric constant (Ba,Sr)TiO3
thin film,” presented at the 193rd
ECS Meeting (San Diego, California, USA), May 1998.
- T.-J. King,
“Advanced gate technology for sub-0.25 micron CMOSFETs,” presented at
the SPIE 1998 Symposium on
Microelectronic Manufacturing (Santa Clara, California, USA),
September 1998.
- T.-J. King,
“LSI on glass substrates,” presented at LCD/PDP International ‘98 (Tokyo,
Japan), October 1998.
- P. G. Carey, P. M. Smith, S. D. Theiss, P. Wickboldt, T.
W. Sigmon, Y.-J. Tung and T.-J.
King, “Poly-Si thin film transistors fabricated on plastic
substrates,” 11th Annual Meeting of
the IEEE Lasers and Electro-Optics Society, Conference Proceedings,
pp. 126-127, 1998.
- T.-J. King, “Device
design considerations for sub-50 nm CMOS,” Extended Abstracts of the 1999
International Conference on Solid State Devices and Materials
(Tokyo, Japan), pp. 28-29, 1999.
- T.-J. King,
"Thin-film transistor technologies for flexible, lightweight flat-panel
displays," presented at the Association
of Super-Advanced Electronics Technologies (ASET) International Forum
on Low Power Displays (Tokyo, Japan), July 21, 2000.
- T.-J. King,
"Poly-Si TFT technologies for future flat-panel displays," Conference Record of the 20th
International Display Research Conference (Palm Beach, Florida,
USA), pp. 406-410, 2000.
- T.-J. King,
"Ultra-scaled MOSFETs for future nanoelectronics," presented at The First Korea-U.S.-Japan Workshop on
Nanostructure Science and Technology (Seoul, Korea), April 2001.
- T.-J. King,
"Materials Requirements for Future Thin-Body SOI CMOSFETs," presented
at the MRS 2001 Fall Meeting,
Symposium A: Materials Issues in Novel Si-Based Technology
(Boston, Massachussetts, USA), November 2001.
- P. Ranade, Q. Lu, I. Polishchuk, H. Takeuchi, C. Hu, and T.-J. King, "Dual work
function metal gate technology for future CMOS devices," presented at
the 3rd International AVS Conference
on Microelectronics and Interfaces (ICMI’02) (Santa Clara,
California, USA), February 2002.
- R. T. Howe and T.-J.
King, "Low temperature LPCVD MEMS technologies," BioMEMS and Bionanotechnology Symposium,
Materials Research Society Proceedings Vol.729 (Materials Research
Society, Warendale, PA, USA), pp. 205-213, 2002.
- T.-J. King
and R. T. Howe, "Interconnect issues for MEMS technology," presented at
the Advanced Metallization Conference
(San Diego, California, USA), October 2002.
- T.-J. King,
"Gate material issues for high-k gate stacks," presented at the 33rd IEEE Interface Specialists Conference
(San Diego, California, USA), December 2002.
- T.-J. King,
R. T. Howe and S. Sedky "Recent progress in modularly integrated MEMS
technologies," International
Electron Devices Meeting Technical Digest, pp. 199-202, 2002.
- T.-J. King,
"Advanced materials and processes for nanometer-scale FinFETs," Proceedings of the International Electron
Devices and Materials Symposia (Taipei, Taiwan, R. O. C.), pp.
11-15, 2002.
- P. Ranade, Y.-K. Choi, D. Ha, H. Takeuchi, and T.-J. King, "Metal gate
technology for fully depleted SOI CMOS," presented at the 4th International AVS Conference on
Microelectronics and Interfaces (ICMI’03) (Santa Clara,
California, USA), March 2003.
- S. Balasubramanian, L. Chang, Y.-K. Choi, D. Ha, J. Lee,
P. Ranade, S. Xiong, J. Bokor, C. Hu, and T.-J. King, “Extremely
scaled ultra-thin-body and FinFET CMOS devices,” presented at the 11th International Symposium on SOI Device
Technologies (Symposium J3, 203rd Meeting of the Electrochemical Society,
Paris, France), April 2003.
- Keynote (Plenary) Paper:
T.-J. King,
"Sustaining the Si revolution: challenges and opportunities," presented
at the 2003 IEEE
University/Government/Industry Microelectronics Symposium
(Boise, Idaho, USA), June 2003.
- B. Nikolic, L. Chang, and T.-J. King, "Performance of
deeply-scaled, power-constrained circuits," Extended Abstracts of the 2003
International Conference on Solid-State Devices and Materials
(Tokyo, Japan), pp. 154-155.
- T.-J. King,
"FinFET promise and challenges," Extended
Abstracts of the 2003 International Conference on Solid-State Devices
and Materials (Tokyo, Japan), pp. 280-281.
- H. Takeuchi and T.-J.
King, "Process optimization and integration of HfO2
and Hf-Silicates," presented at the MRS
2004 Spring Meeting, Symposium D (San Francisco, California,
USA), April 2004.
- H.-Y. Wong, H. Takeuchi, T.-J. King, M. Ameen, and
A. Agarwal, "Reduced poly-Si gate depletion effect by pulsed excimer
laser annealing," presented at the 205th
ECS Meeting, Advanced Short-Time Thermal Processing for Si-Based CMOS
Devices II Symposium (San Antonio, TX, USA), May 2004.
- Keynote (Plenary) Paper:
T.-J. King,
"Taking silicon to the limit: challenges and opportunities,” presented
at the 2004 International
Conference on Solid-State and Integrated-Circuit Technology
(Beijing, China), October 2004.
- J. Lai and T.-J.
King,
"Recent developments in low-temperature poly-Si (LTPS) technology,”
presented at the International
Display Manufacturing Conference (Taipei, Taiwan R.O.C.),
February 2005.
- T.-J. King,
"FinFETs for nanoscale CMOS digital integrated circuits,” presented at
the International
Conference on Computer Aided Design (San Jose, California, USA),
November 7, 2005.
- K. Shin, S. Balasubramanian, X. Sun, and T.-J. King, "Strain
engineering and body biasing for optimization of sub-45nm CMOS
performance,” presented at the MRS
2006 Spring Meeting (San Francisco, California, USA), April 2006.
- H. Takeuchi, K. Shiraishi, and T.-J. King Liu, "Role of
oxygen states in high-k gate stack engineering,” presented at the 8th International
Conference on Solid-State and Integrated-Circuit Technology
(Shanghai, China), October 2006.
- K. Shiraishi, H. Takeuchi, Y. Akasaka, T. Nakayama, S.
Miyazaki, T. Nakaoka, A. Ohta, H. Watanabe, N. Umezawa, K. Ohmori, P.
Ahmet, T. Chikyow, Y. Nara, T.-J.
King Liu, H. Iwai, and K. Yamada, "Physics of interfaces between
gate electrodes and high-k dielectrics,” presented at the 8th International Conference on
Solid-State and Integrated-Circuit Technology (Shanghai, China),
October 2006.
- W. Xiong, C. R. Cleavelin, C.-H. Hsu, M. Ma, K.
Schruefer, K. von Armin, T. Schulz, I. Cayrefourcq, C. Mazure, P.
Patruno, M. Kennard, K. Shin, X. Sun, T.-J. King Liu, K.
Cherkaoui, and J. P. Colinge, “Intrinsic advantages of SOI
multiple-gate MOSFET (MuGFET) for low power applications,” 211th ECS Meeting (Chicago,
Illinois, USA), May 2007.
- H.-H. Tseng, P. Kalra, J. Oh, P. Majhi, T.-J. King Liu, and R.
Jammy, “The challenges and progress of USJ formation & process
integration for 32nm technology and beyond,” 8th International Workshop on Junction
Technology (Shanghai, China), May 2008.
- P. Kalra, P. Majhi, H.-H. Tseng, L. Larson, R. Jammy, and
T.-J. King Liu,
“USJ process challenges for sub-45nm CMOS,” 17th International Conference on Ion
Implantation Technology (Monterey, California, USA), June 2008.
Regular:
- S. Wood, P. Apte, T.-J. King, M. Moslehi, and
K.
Saraswat, “Pyrometer modeling for rapid thermal processing,” Proceedings of the SPIE
--The International Society of Optical
Engineering, Vol. 1393, pp. 337-348, 1990.
- T.-J. King,
J. R. Pfiester, J. D. Shott, J. P. McVittie,
and K. C. Saraswat, “A polycrystalline-Si1-xGex-gate
CMOS technology,” International
Electron
Devices Meeting Technical Digest, pp. 253-256,
1990.
- T.-J. King
and K. C. Saraswat, “A low-temperature
(<550oC) silicon-germanium MOS thin-film transistor
technology for
large-area electronics,” International
Electron Devices Meeting
Technical Digest, pp. 567-570, 1991.
- M. Hack, I-W. Wu, A. G. Lewis, and T.-J. King, “Numerical
simulations of poly-crystalline silicon thin film transistors including
leakage effects,” IEE Colloquium on
Poly-Si Devices and Applications,
IEE Digest No. 1993/067, pp. 23/1-23/4, 1993.
- M. Hack, I-W. Wu, A. Lewis, and T.-J. King, “Numerical
simulations of ON and OFF state characteristics of poly-silicon thin
film transistors,” IEEE Transactions
on Electron Devices, Vol. 40, No.
11, p. 2128, 1993 (presented at the 51st Annual Device Research
Conference).
- S. Jurichich, T.-J.
King, K. Saraswat, and J. Mehlhaff, “A
low-thermal-budget polycrystalline silicon-germanium thin-film
transistor technology for large-area electronics,” Proceedings of
International Semiconductor Device Research Symposium, pp.
55-58, 1993.
- M. Hack, I-W. Wu, T.-J. King, and A. G.
Lewis, “Analysis
of leakage currents in poly-silicon thin film transistors,” International Electron
Devices Meeting Technical Digest, pp. 385-388,
1993.
- T.-J. King
and M. Hack, “Two-dimensional drain
engineering for leakage reduction in thin-film transistors,” 52nd
Annual Device Research Conference Digest, p. IIIA-5, 1994.
- J. D. Bernstein, S. Qin, C. Chan, and T.-J. King, “A study
of process conditions for plasma ion implantation hydrogenation
experiments,” presented at the IEEE
International Conference on Plasma
Science (Madison, Wisconsin, USA), June 1995.
- E. Cheng, J. C. Sturm, I-W. Wu, and T.-J. King, “Modeling
of leakage current distributions in series connected polysilicon thin
film transistors,” Proceedings of
2nd International Workshop on Active
Matrix Liquid Crystal Displays, pp. 102-105, 1995.
- S. Qin, J. D. Bernstein, Y. Zhou, W. Liu, C. Chan, and T.-J. King, “Short-time
hydrogen passivation of poly-Si CMOS thin film
transistors by high dose rate plasma ion implantation,” Ion-Solid
Interactions for Materials Modifications and Processing, MRS
Symposium
Proceedings Vol. 396, pp. 515-520, 1995.
- A. J. Tang, J. A. Tsai, R. Reif, and T.-J. King, “A novel
poly-Si-capped poly-Si1-xGex thin-film
transistor,” International
Electron Devices Meeting Technical Digest, pp. 513-516, 1995.
- H. Y. Tong, T.-J.
King, and F. G. Shi, “Crystallization of
amorphous SiGe thin films,” Thin Solid Films, Vol. 290-291, pp.
464-468, 1996 (presented at the International Conference on
Metallurgical Coatings and Thin Films (San Diego, California, USA),
April 1996).
- L. M. Lust, T.-J.
King, I-W. Wu, and W. B. Jackson,
“Telegraph noise as a probe of defects in thin film transistors,”
presented at the MRS 1996 Spring
Meeting (San Francisco, California,
USA), April 1996.
- V. Suntharalingam, S. J. Fonash, and T.-J. King, “A
comprehensive study of the electrical stress stability of n-channel
poly-Si TFTs,” Proceedings of the
SID 16th International Display
Research Conference, pp. 283-285, 1996.
- V. Suntharalingam, S. J. Fonash, and T.-J. King, “A
comprehensive study of the electrical stress stability of n-channel
poly-Si TFTs,” Proceedings of the
Third Symposium on Thin Film
Transistor Technologies, pp. 260-268, 1997 (presented at the ECS
1996
Fall Meeting, San Antonio, Texas, USA).
- K. C. Saraswat, S. Jurichich, T.-J. King, V. Subramanian,
and A. Wang, “A low temperature polycrystalline SiGe CMOS TFT
technology for large area AMLCD drivers,” Proceedings of the Third
Symposium on Thin Film Transistor Technologies, pp. 186-196,
1997
(presented at the ECS 1996 Fall Meeting, San Antonio, Texas, USA).
- Y. Zhou, S. Qin, C. Chan, and T.-J. King, “Investigation
of plasma immersion ion implantation hydrogenation for poly-Si TFTs
using an ICP plasma source,” presented at the MRS 1996 Fall Meeting
(Boston, Massachusetts, USA), December 1996.
- H. Y. Tong, Q. Jiang, D. Hsu, T.-J. King, and F. G. Shi,
“Microstructural evolution of amorphous Si1-xGex
thin films,” Polycrystalline Thin
Films -- Structure, Texture, Properties and
Applications III, pp. 397-402, 1997 (presented at the MRS 1997
Spring
Meeting, San Francisco, California, USA, April 1997).
- B. Yu, D.-H. Ju, N. Kepler, T.-J. King, and C. Hu,
“Gate
engineering for performance and reliability in deep-submicron CMOS
technology,” Symposium on VLSI
Technology Digest of Technical Papers,
pp. 105-106, 1997.
- B. Yu, T.-J.
King, C. Hu, D.-H. Ju, and N. Kepler, “CMOS
transistor reliability and performance impacted by gate
microstructure,” IEEE International
Integrated Reliability Workshop
Final Report, pp. 35-41, 1997.
- Best Student Paper: W.-C.
Lee, A. Wang, T.-J. King,
and C.
Hu, “Impact of poly-Si0.8Ge0.2-gate technology on
device performance
and reliability,” Proceedings of the
1997 International Semiconductor
Device Research Symposium, pp. 513-516, 1997.
- B. Yu, Y.-J. Tung, S. Tang, E. Hui, T.-J. King, and C. Hu,
“Ultra-thin-body silicon-on-insulator MOSFET’s for terabit-scale
integration,” Proceedings of the
1997 International Semiconductor
Device Research Symposium, pp. 623-626, 1997.
- Y.-J. Tung, P. G. Carey, P. M. Smith, S. D. Theiss, X.
Meng, R. Weiss, G. A. Davis, V. Aebi, and T.-J. King, “An
ultra-low-temperature-fabricated poly-Si TFT with stacked composite
ECR-PECVD gate oxide,” SID
International Symposium Digest of Technical
Papers, Vol. 29, pp. 887-890, 1998.
- D. Park, M. Kennard, Y. Melaku, N. Benjamin, T.-J. King,
and C. Hu, “Stress-induced leakage current due to charging damage: gate
oxide thickness and gate poly-Si etching condition dependence,” Proceedings of the 1998
3rd International Symposium on Plasma
Process-Induced Damage, pp. 56-59, 1998.
- W.-C. Lee, T.-J.
King, and C. Hu, “Optimized
poly-Si1-xGex-gate technology for dual gate CMOS
application,” 1998
Symposium on VLSI Technology Digest of Technical Papers, pp.
190-191,
1998.
- Y.-J. Tung, P. G. Carey, P. M. Smith, S. D. Theiss, X.
Meng, R. Weiss, G. A. Davis, V. Aebi, and T.-J. King, “A
high-performance poly-Si TFT technology compatible with flexible
plastic substrates,” presented at the 56th
Annual Device Research
Conference (Charlottesville, Virginia, USA), June 1998.
- Y.-J. Tung, J. Boyce, J. Ho, X. Huang, and T.-J. King, “A
comparative study of hydrogen and deuterium plasma treatment effects on
the performance and reliability of polysilicon TFTs,” presented at the 56th Annual Device
Research Conference (Charlottesville, Virginia,
USA), June 1998.
- Y. Lee, R. A. Gough, T.-J. King, Q. Ji, K. N.
Leung, R.
A. McGill, V. V. Ngo, M. D. Williams, and N. Zahir, “Maskless ion beam
lithography system,” presented at Micro-
and Nano-Engineering ‘98 (Leuven, Belgium), September 1998.
- Y.-C. King, T.-J.
King, and C. Hu, “MOS memory using
germanium nanocrystals formed by thermal oxidation of Si1-xGex,”
International Electron
Devices Meeting Technical Digest, pp. 115-118,
1998.
- S. D. Theiss, P. G. Carey, P. M. Smith, P. Wickboldt, T.
W. Sigmon, Y.-J. Tung, and T.-J.
King, “Polysilicon thin film
transistors fabricated at 100oC on a flexible plastic
substrate,” International Electron
Devices Meeting Technical Digest, pp. 257-260,
1998.
- D. Park, Q. Lu, T.-J.
King, C. Hu, A. Kalnitsky, S.-P.
Tay, and C.-C. Cheng, “SiON/Ta2O5/TiN gate stack
transistor with 1.8 nm
equivalent SiO2 thickness,” International Electron Devices Meeting
Technical Digest, pp. 381-384, 1998.
- M. Krishnan, Y.-C. Yeo, Q. Lu, T.-J. King, J. Bokor, and
C. Hu, “Remote charge scattering in MOSFETs with ultra-thin gate
dielectrics,” International Electron
Devices Meeting Technical Digest,
pp. 571-574, 1998.
- Y.-C. King, C. Kuo, T.-J. King, and C. Hu,
“Sub-5 nm
multiple-thickness gate oxide technology using oxygen implantation,”
International Electron Devices Meeting Technical Digest, pp.
585-588,
1998.
- D. Hisamoto, W.-C. Lee, J. Kedzierski, E. Anderson, H.
Takeuchi, K. Asano, T.-J.
King, J. Bokor, and C. Hu, “A folded-channel
MOSFET for deep-sub-tenth micron era,” International Electron Devices
Meeting Technical Digest, pp. 1032-1034, 1998.
- A. E. Franke, D. T. Chang, P. T. Jones, T.-J. King, R. T.
Howe, and G. C. Johnson, “Post-CMOS integration of germanium
microstructures,” Twelfth IEEE
International Conference on Micro
Electro Mechanical Systems, pp. 630-637, 1999.
- H. Takeuchi and T.-J.
King, “Poly-Si1-xGex process
integration for low sheet resistance gate CMOS technology,” Advances in
Rapid Thermal Processing. Proceedings of the Symposium (Seattle,
Washington, USA), Electrochemical Society Proceeding Vol. 99-10, pp.
277-284, 1999.
- Y. Lee, R. A. Gough, T.-J. King, Q. Ji, and
K.-N. Leung,
“Maskless ion beam lithography system,” Microelectronic Engineering,
Vol. 46, pp. 469-472, May 1999.
- Y.-J. Tung, J. Ho, J. Boyce, X. Huang, and T.-J. King,
“Improved DC reliability of polysilicon thin-film transistors with
deuterium plasma treatment,” SID
International Symposium Digest of
Technical Papers, pp. 398-401, 1999.
- Q. Ji, T.-J.
King, Y. Y. Lee, and K.-N. Leung, “Compact
column design for a focused ion beam lithography system,” Proceedings
of the SPIE, Vol. 3777, pp. 175-182, 1999.
- J. M. Heck, Chris G. Keller, A. E. Franke, Lilac Muller,
R. T. Howe, and T.-J. King,
“High aspect ratio poly-silicon-germanium
microstructures,” in Proceedings of
the 1999 International Conference
on Solid-State Sensors and Actuators -- Transducers ‘99 (Sendai,
Japan), pp. 328-331, 1999.
- A. E. Franke, D. Bilic, D. T. Chang, P. T. Jones, T.-J. King, R. T. Howe, and
G. C. Johnson, “Optimization of
poly-silicon-germanium as a microstructural material,” in Proceedings
of the 1999 International Conference on Solid-State Sensors and
Actuators -- Transducers ‘99 (Sendai, Japan), pp. 530-533, 1999.
- V. Subramanian, J. Kedzierski, N. Lindert, H. Tam, Y. Su,
J. McHale, K. Cao, T.-J. King,
J. Bokor, and C. Hu, “A
bulk-Si-compatible ultrathin-body SOI technology for sub-100 nm
MOSFETs,” 57th Annual Device
Research Conference Digest, pp. 28-29,
1999.
- W.-C. Lee, T.-J.
King, and C. Hu, “Performance enhancement
in deep-submicron poly-SiGe-gated CMOS devices,” 1999 International
Symposium on VLSI Technology, Systems, and Applications, Proceedings of
Technical Papers, pp. 14-18, 1999.
- Y. C. Yeo, V. Subramanian, J. Kedzierski, P. Xuan, T.-J. King, J. Bokor, and
C. Hu, “Nanoscale SiGe-channel ultra-thin-body
silicon-on-insulator P-MOSFETs,” 1999
International Semiconductor
Device Research Symposium Proceedings, pp. 295-298, 1999.
- Q. Lu, Y. C. Yeo, K. Yang, R. Lin, T.-J. King, C. Hu, S.
C. Song, H. F. Luan, D.-L. Kwong, X. Guo, X. Wang, and T.-P. Ma,
“Comparison of 14A TOX,EQ JVD and RTCVD silicon nitride gate
dielectrics for sub-100 nm MOSFETs,” 1999
International Semiconductor
Device Research Symposium Proceedings, pp. 489-492, 1999.
- X. Huang, W.-C. Lee, C. Kuo, D. Hisamoto, L. Chang, J.
Kedzierski, E. Anderson, H. Takeuchi, Y.-K. Choi, K. Asano, V.
Subramanian, T.-J. King,
J. Bokor, and C. Hu, “Sub 50-nm FinFET: PMOS,”
International Electron Devices Meeting Technical Digest, pp. 67-70,
1999.
- M. S. Krishnan, L. Chang, T.-J. King, J. Bokor, and
C. Hu,
“MOSFETs with 9 to 13 A Thick Gate Oxides,” International Electron
Devices Meeting Technical Digest, pp. 241-244, 1999.
- H. Takeuchi, W.-C. Lee, P. Ranade, and T.-J. King,
“Improved PMOSFET short-channel performance using ultra-shallow
Si0.8Ge0.2 source/drain extensions,” International Electron Devices
Meeting Technical Digest, pp. 501-504, 1999.
- Y.-K. Choi, K. Asano, N. Lindert, V. Subramanian, T.-J. King, J. Bokor, and
C. Hu, “Ultrathin-body SOI MOSFET for deep-sub-tenth
micron era,” International Electron
Devices Meeting Technical Digest,
pp. 919-921, 1999.
- P. Ranade, Y.-C. Yeo, Q. Lu, H. Takeuchi, T.-J. King, and
C. Hu, “Molybdenum as a gate electrode for deep sub-micron CMOS
technology,” presented at the MRS
2000 Spring Meeting (San Francisco,
California, USA), April 2000.
- Q. Ji, T.-J.
King, Y. Y. Lee, and K.-N. Leung, “Maskless
direct-write lithography using focused O2+ beam,”
presented at the 44th
International Conference on Electron, Ion and Photon Beam Technology
and Nanofabrication (Palm Springs, California, USA), June 2000.
- K. L. Scott, T.-J.
King, and K.-N. Leung,
“Microfabrication of pattern generators and microcolumns for ion beam
lithography,” presented at the 44th
International Conference on
Electron, Ion and Photon Beam Technology and Nanofabrication
(Palm
Springs, California, USA), June 2000.
- A. E. Franke, Y. Jiao, M. T. Wu, T.-J. King, and R. T.
Howe, “Post-CMOS modular integration of poly-SiGe microstructures using
poly-Ge sacrificial layers,” Solid-State
Sensor and Actuator Workshop
Technical Digest, pp. 18-21, June 2000.
- Y.-K. Choi, Y.-C. Jeon, P. Ranade, H. Takeuchi, T.-J. King, J. Bokor, and
C. Hu, “30nm ultra-thin-body SOI MOSFET with
selectively deposited Ge raised S/D,” 58th
Annual Device Research
Conference Digest, pp. 23-24, 2000.
- Y. C. Yeo, Q. Lu, W.-C. Lee, T.-J. King, and C. Hu,
“Scaling limit of silicon nitride gate dielectric for future CMOS
technologies,” 58th Annual Device
Research Conference Digest, pp.
65-66, 2000.
- P. Xuan, J. Kedzierski, V. Subramanian, J. Bokor, T.-J. King and C. Hu, “60nm
planarized ultra-thin body solid phase epitaxy
MOSFETs,” 58th Annual Device
Research Conference Digest, pp. 67-68,
2000.
- J. Kedzierski, P. Xuan, V. Subramanian, J. Bokor, T.-J. King, C. Hu, and E.
A. Anderson, “20 nm gate-length ultra-thin body
p-MOSFET with silicide source/drain,” Superlattices
and
Microstructures, Vol.28, No.5-6, p.445-52, 2000 (presented at
the 5th
Silicon Nanoelectronics Workshop, Honolulu, HI, USA, 11-12 June 2000.)
- Q. Lu, Y. C. Yeo, P. Ranade, H. Takeuchi, T.-J. King, and
C. Hu, “Dual-metal gate technology for deep-submicron CMOS
transistors,” 2000 Symposium on VLSI
Technology, Digest of Technical
Papers, pp. 72-73, 2000.
- J. Kedzierski, P. Xuan, E. H. Anderson, J. Bokor, T.-J. King, and C. Hu,
"Complementary silicide source/drain thin-body MOSFETs
for the 20nm gate length regime,”
International Electron Devices
Meeting Technical Digest, pp. 57-60, 2000.
- Q. Lu, R. Lin, P. Ranade, Y. C. Yeo, X. Meng, H.
Takeuchi, T.-J. King,
C. Hu, H. Luan, S. Lee, W. Bai, C.-H. Lee, D.-L.
Kwong, X. Guo, X. Wang, and T.-P. Ma, “Molybdenum metal gate MOS
technology for post-SiO2 gate dielectrics,” International Electron
Devices Meeting Technical Digest, pp. 641-644, 2000.
- L. Chang, S. Tang, T.-J. King, J. Bokor, and
C. Hu, "Gate
length scaling and threshold voltage control of double-gate MOSFETs,” International Electron
Devices Meeting Technical Digest, pp. 719-722,
2000.
- X. Huang, Y. Cao, D. Sylvester, S. Lin, T.-J. King, and C.
Hu, "RLC signal integrity analysis of high-speed global interconnect,” International Electron
Devices Meeting Technical Digest, pp. 731-734,
2000.
- Y.-C. Yeo, Q. Lu, T.-J. King, C. Hu, T.
Kawashima, M.
Oishi, S. Mashiro, and J. Sakai, "Enhanced performance in sub-100nm
CMOSFETs using strained epitaxial silicon-germanium,” International
Electron Devices Meeting Technical Digest, pp. 753-756, 2000.
- Y.-J. Tung, P. G. Carey, P. M. Smith, S. D. Theiss, P.
Wickboldt, X. Meng, R. E. Weiss, G. A. Davis, V. W. Aebi, and T.-J. King,
"Polycrystalline silicon thin-film transistor technology for
flexible large-area electronics," Proceedings
of SPIE, Vol. 4295: Flat
Panel Display Technology and Display Metrology II, Paper 4295A-15, 2001.
- I. Polishchuk, Y.-C. Yeo, Q. Lu, T.-J. King, and C. Hu,
"Hot-carrier reliability of P-MOSFET with ultra-thin silicon nitride
gate dielectric,” presented at the
International Reliability Physics
Symposium (Orlando, Florida, USA), April 2001.
- S. H. Tang, L. Chang, N. Lindert, Y.-K. Choi, W.-C. Lee,
X. Huang, V. Subramanian, J. Bokor, T.-J. King, and C. Hu,
“FinFET -- a
quasi-planar double-gate MOSFET,” 2001
IEEE International Solid-State
Circuits Conference, Digest of Technical Papers, pp. 118-119,
2001.
- J. Reijonen, Q. Ji, T.-J. King, K.-N. Leung, A.
Persaud,
and S. Wilde, “Compact focusing system for ion and electron beams,”
presented at the 45th International
Conference on Electron, Ion and
Photon Beam Technology and Nanofabrication (Washington, D.C.,
USA), May
2001.
- K. L. Scott, T.-J.
King, K.-N. Leung and R. F. Pease,
“Characterization of multicusp-plasma ion source brightness using
micron-scale apertures,” presented at the 45th International Conference
on Electron, Ion and Photon Beam Technology and Nanofabrication
(Washington, D.C., USA), May 2001.
- Y.-K. Choi, D. Ha, T.-J. King, and C. Hu,
“Ultra-thin body
PMOSFETs with selectively deposited Ge source/drain,” 2001 Symposium on
VLSI Technology, Digest of Technical Papers, pp. 19-20, 2001.
- Q. Lu, R. Lin, P. Ranade, T.-J. King, and C. Hu,
“Metal
gate work function adjustment for future CMOS technology,” 2001
Symposium on VLSI Technology, Digest of Technical Papers, pp.
45-46,
2001.
- Y.-C. Yeo, P. Ranade, Q. Lu, R. Lin, T.-J. King, and C.
Hu, “Effects of high-k dielectrics on the workfunctions of metal and
silicon gates,” 2001 Symposium on
VLSI Technology, Digest of Technical
Papers, pp. 49-50, 2001.
- I. Polishchuk, T.-J.
King, and C. Hu, “Physical origin of
SILC and noisy breakdown in very thin silicon nitride gate dielectric,”
presented at the 59th Annual Device
Research Conference (Notre Dame,
Indiana, USA), June 2001.
- Best Student Paper:
N. Lindert, Y.-K. Choi, L. Chang, E.
Anderson, W.-C. Lee, T.-J.
King, J. Bokor, and C. Hu, “Quasi-planar NMOS
FinFETs with sub-100nm gate lengths,” 59th
Annual Device Research
Conference Digest, pp. 26-27, 2001.
- Y.-K. Choi, D. Ha, T.-J. King, and C. Hu,
“Threshold
voltage shift by quantum confinement in ultra-thin body device,” 59th
Annual Device Research Conference Digest, pp. 85-86, 2001.
- M. She, Y.-C. King, T.-J. King, and C. Hu,
“Modeling and
design study of nanocrystal memory devices,” presented at the 59th
Annual Device Research Conference (Notre Dame, Indiana, USA),
June 2001.
- J. Kedzierski, M. Ieong, P. Xuan, J. Bokor, T.-J. King,
and C. Hu, “Design analysis of thin-body silicide source/drain
devices,” 2001 IEEE International
SOI Conference Proceedings, pp.
21-22, 2001.
- N. Lindert, Y.-K. Choi, L. Chang, E. Anderson, W.-C. Lee,
T.-J. King,
J. Bokor, and C. Hu, “Quasi-planar FinFETs with selectively
grown germanium raised source/drain,” 2001
IEEE International SOI
Conference Proceedings, pp. 111-112, 2001.
- L. Chang, K. J. Yang, Y.-C. Yeo, Y.-K. Choi, T.-J. King,
and C. Hu, "Reduction of direct-tunneling gate leakage current in
double-gate and ultra-thin body MOSFETs,” International Electron
Devices Meeting Technical Digest, pp. 99-102, 2001.
- Y.-K. Choi, N. Lindert, P. Xuan, S. Tang, D. Ha, E.
Anderson, T.-J. King,
J. Bokor, and C. Hu, "Sub-20nm CMOS FinFET
technologies,” International
Electron Devices Meeting Technical Digest,
pp. 421-424, 2001.
- Q. Lu, R. Lin, H. Takeuchi, T.-J. King, C. Hu, K.
Onishi,
R. Choi, C.-S. Kang, and J. C. Lee, “Deep-submicron CMOS process
integration of HfO2 gate dielectric with poly-Si gate,” 2001
International Semiconductor Device Research Symposium Proceedings,
pp.
377-380, 2001.
- I. Polishchuk, P. Ranade, T.-J. King, and C. Hu,
“Dual
work function metal gate CMOS transistors fabricated by Ni-Ti
interdiffusion,” 2001 International
Semiconductor Device Research
Symposium Proceedings, pp. 411-415, 2001.
- 2nd Best Student Paper:
Y.-K. Choi, T.-J. King,
and C. Hu,
“Spacer FinFET: Nano-scale CMOS technology for the terabit era,” 2001
International Semiconductor Device Research Symposium Proceedings,
pp.
543-546, 2001.
- M. She, T.-J.
King, C. Hu, W. Zhu, Z. Luo, J.-P. Han, and
T.-P. Ma, “Low-voltage, fast-programming p-channel flash memory with
JVD tunneling nitride,” 2001
International Semiconductor Device
Research Symposium Proceedings, pp. 641-644, 2001.
- Q. Lu, T.-J.
King, and C. Hu, “Hot carrier reliability of
n-MOSFET with ultra-thin HfO2 gate dielectric and poly-Si
gate,”
presented at the International
Reliability Physics Symposium (Dallas,
Texas, USA), April 2002.
- P. Ranade, R. Lin, Q. Lu, Y.-C. Yeo, H. Takeuchi, T.-J. King, and C. Hu,
“Molybdenum gate electrode technology for deep
sub-micron CMOS generations,” Gate
Stack and Silicide Issues in Silicon
Processing II Symposium, Materials Research Society Symposium
Proceedings Vol.670 (Materials Research Society, Warendale, PA, USA),
pp. K5.2.1-6, 2002.
- I. Polishchuk, P. Ranade, T.-J. King, and C. Hu,
“Dual
work function CMOS gate technology based on metal interdiffusion,” Gate
Stack and Silicide Issues in Silicon Processing II Symposium,
Materials
Research Society Symposium Proceedings Vol.670 (Materials Research
Society, Warendale, PA, USA), pp. K5.1.1-6, 2002.
- X. Huang, P. Restle, T. Bucelot, Y. Cao, and T.-J. King,
"Loop-based interconnect modeling and optimization approach for
multi-GHz clock network design,” presented at the Custom Integrated
Circuits Conference (Orlando, Florida, USA), May 2002.
- Y. Cao, R. A. Groves, N. D. Zamdmer, J.-O. Plouchart, R.
A. Wachnik, X. Huang, T.-J.
King, and C. Hu, "Frequency-independent
equivalent circuit model for on-chip spiral inductors,” Proceedings of
the IEEE 2002 Custom Integrated Circuits Conference, pp.
217-220, 2002.
- Q. Ji, X. Jiang, T.-J. King, K.-N. Leung,
and K.
Standiford, “Improvement of brightness for multicusp-plasma ion
source,” presented at the 46th
International Conference on Electron,
Ion and Photon Beam Technology and Nanofabrication (Anaheim,
California, USA), May 2002.
- S. A. Bhave, B. L. Bircumshaw, W. Z. Low, Y.-S. Kim, T.-J. King, R. T. Howe, and
A. P. Pisano, “Poly-SiGe: A high-Q
structural material for integrated RF MEMS,” Solid-State Sensor and
Actuator Workshop, Technical Digest, pp. 34-37, 2002.
- Q. Lu, H. Takeuchi, R. Lin, T.
King, C. Hu, K. Onishi, R. Choi, C. Kang and J. Lee, “Hot Carrier Reliability of
n-MOSFET with Ultra-thin HfO2 Gate Dielectric and Poly-Si Gate,” International Reliability Physics
Symposium Proceedings, p. 429-430, 2002.
- Q. Lu, H. Takeuchi, X. Meng, T.-J. King, C. Hu, K.
Onishi, H.-J. Cho, and J. Lee, “Improved performance of ultra-thin HfO2
CMOSFETs using poly-SiGe gate,” 2002
VLSI Symposium on Technology,
Digest of Technical Papers, pp. 86-87, 2002.
- I. Polishchuk, K. J. Yang, T.-J. King, and C. Hu,
“Improved MOSFET electron mobility for advanced gate dielectric
stacks,” 60th Annual Device Research
Conference, Conference Digest, pp.
75-76, 2002.
- I. Polishchuk, Y.-C. Yeo, T.-J. King, and C. Hu,
“Tunneling through multi-layer gate dielectrics - an analytical model,”
60th Annual Device
Research Conference, Conference Digest, pp. 105-106,
2002.
- Y.-K. Choi, D. Ha, T.-J. King, and J. Bokor,
"Reduction of
Gate-Induced Drain Leakage (GIDL) Current in Single-Gate Ultra-Thin
Body and Double-Gate FinFET Devices," presented at the 2002
International Conference on Solid State Devices and Materials
(Nagoya,
Japan), September 2002.
- D. Ha, P. Ranade, Y.-K. Choi, J.-S. Lee, T.-J. King, and
C. Hu, "Ultra Thin Body Silicon-On-Insulator (UTB SOI) MOSFET with
Metal Gate Work-function Engineering for Sub-70nm Technology Node,"
presented at the 2002 International
Conference on Solid State Devices
and Materials (Nagoya, Japan), September 2002.
- K.-J. Yang, H. Takeuchi, T.-J. King, and C. Hu,
"Frequency
Dependence of Capacitance Measurement for Advanced Gate Dielectrics,"
presented at the 2002 International
Conference on Solid State Devices
and Materials (Nagoya, Japan), September 2002.
- Y. Cao, X. Huang, D. Sylvester, T.-J. King, and C. Hu,
"Impact of On-Chip Interconnect Frequency-Dependent R(f)L(f) on Digital
and RF Design," presented at the 15th
Annual IEEE International
ASIC/SOC Conference (Rochester, New York, USA), September 2002.
- X. Huang, Y. Cao, T.-J. King, and C. Hu,
"Analytical
Performance Models for RLC Interconnects and Application to Clock
Optimization," presented at the 15th
Annual IEEE International ASIC/SOC
Conference (Rochester, New York, USA), September 2002.
- H. Takeuchi and T.-J.
King, “Investigation of Interface
Properties of CVD HfO2 by SCA (Surface Charge Analysis),”
presented at
the International SEMATECH Gate
Stack Engineering Working Group
Symposium (Austin, Texas, USA), October 16, 2002.
- S. Sedky, J. Schroeder, T. Sands, R. Howe, and T.-J. King,
“Pulsed laser annealing of silicon-germanium films,” presented at the MRS 2002 Fall Meeting,
Symposium J (Boston, Massachusetts, USA),
December 2002.
- B. Yu, L. Chang, S. Ahmed, H. Wang, S. Bell, C.-Y. Yang,
C. Tabery, C. Ho, T.-J. King,
J. Bokor, M.-R. Lin, and D. Kyser, "FinFET
Scaling: Towards 10nm Gate Length,"
International Electron Devices
Meeting Technical Digest, pp. 251-254, 2002.
- Y.-K. Choi, L. Chang, P. Ranade, J. Lee, D. Ha, S.
Balasubramanian, A. Agarwal, T.-J.
King, and J. Bokor, "FinFET Process
Refinements for Improved Mobility and Gate Work Function Engineering,"
International Electron Devices Meeting Technical Digest, pp.
259-262,
2002.
- P. Ranade, Y.-K. Choi, D. Ha, A. Agarwal, M. Ameen, and T.-J. King,
"Tunable-Work-Function Molybdenum Gate Technology for
FDSOI-CMOS," International Electron
Devices Meeting Technical Digest,
pp. 363-366, December 2002.
- C. Kuo, T.-J.
King, and C. Hu, "A Capacitorless
Double-Gate DRAM Cell Design for High Density Applications," International Electron
Devices Meeting Technical Digest, pp. 843-846,
2002.
- H. Takeuchi, P. Ranade, and T.-J. King,
“Low-temperature
dopant activation technology using elevated Ge-S/D structure,”
presented at the First International
SiGe Technology and Device Meeting
(Nagoya, Japan), pp. 163-164, 2003.
- M. She and T.-J.
King, “Improved SONOS-type flash memory
using HfO2 as trapping layer,” presented at the 19th IEEE Non-Volatile
Semiconductor Memory Workshop (Monterey, California, USA), pp.
53-55,
2003.
- D. Ha, Q. Lu, H. Takeuchi, T.-J. King, K. Onishi,
Y.-H.
Kim, and J. C. Lee, “Impact of gate process technology on EOT of HfO2
gate dielectric,” MRS Symposium
Proceedings Vol. 765, pp. 41-45, 2003
(presented at the MRS 2003 Spring Meeting, Symposium D, April 2003).
- S. Balasubramanian, L. Chang, B. Nikolic, and T.-J. King,
"Circuit-performance implications for double-gate MOSFET scaling below
25 nm," Proceedings of the 2003
Silicon Nanoelectronics Workshop, pp.
16-17, June 2003.
- H. Takeuchi, M. She, K. Watanabe, and T.-J. King,
“Damageless sputter deposition for metal gate CMOS technology,” 61st
Annual Device Research Conference Digest, pp. 35-36, 2003.
- M. She, H. Takeuchi, and T.-J. King, “SONNS memory:
improvement over SONOS flash memory,” 61st
Annual Device Research
Conference Digest, pp. 55-56, 2003.
- B. Bircumshaw, G. Liu, H. Takeuchi, T.-J. King, R. Howe,
O. O’Reilly, and A. Pisano, “The radial bulk annular resonator:
towards a 50W RF MEMS filter,” Proceedings
of the 12th International
Conference on Solid-State Sensors, Actuators, and Microsystems
(Transducers ’03), pp. 875-878, 2003.
- A. Yagishita, T.-J.
King, and J. Bokor, "Schottky barrier
height reduction and drive current improvement in metal source/drain
MOSFET with strained-Si channel," Extended
Abstracts of the 2003
International Conference on Solid-State Devices and Materials,
pp.
708-709.
- H. Takeuchi, D. Ha, and T.-J. King,
“Observation of Bulk HfO2 Defects by Spectroscopic
Ellipsometry,”
presented at the AVS 50th
International Symposium, Topical Conference
on High-K Gate Dielectrics and Devices (Baltimore, MD, USA),
November
2003.
- B. C.-Y. Lin, T.-J.
King, and R. T. Howe, “Optimization of
poly-SiGe deposition processes for integrated MEMS,” presented at the MRS 2003 Fall Meeting,
Symposium A (Boston, MA, USA), November 2003.
- K. Buchheit, H. Takeuchi, and T.-J. King, “Properties of
ultra-thin silicon nitride barriers,” presented at the MRS 2003 Fall
Meeting, Symposium E (Boston, MA, USA), November 2003.
- M.-A. Eyoum, E. Quevy , H. Takeuchi, T.-J. King, and R.T.
Howe, “Ashing technique for nano-gap fabrication of electrostatic
transducers,” presented at the MRS
2003 Fall Meeting, Symposium M
(Boston, MA, USA), November 2003.
- Y.-K. Choi, D. Ha, J. Bokor, and T.-J. King, “Reliability
study of CMOS FinFETs,” International
Electron Devices Meeting
Technical Digest, pp. 177-180, 2003.
- P. Xuan, M. She, J. Bokor, and T.-J. King, “FinFET SONOS
Flash Memory for Embedded Applications,” International Electron Devices
Meeting Technical Digest, pp. 609-612, 2003.
- J. Fossum, M. M. Chowdhury, V. P. Trivedi, T.-J. King,
Y.-K. Choi, J. An, and B. Yu, “Physical insights on design and modeling
of nanoscale FinFETs,” International
Electron Devices Meeting Technical Digest, pp.
679-283, 2003.
- B. L. Bircumshaw, M. L. Wasilik, E. B. Kim, Y. R. Su, H.
Takeuchi, C. W. Low, G. Liu, A. P. Pisano, T.-J. King, and R. T. Howe,
“Hydrogen peroxide etching and stability of p-type poly-SiGe films,”
presented at the 17th IEEE Micro
Electro Mechanical Systems Conference
(Maastricht, The Netherlands), January 2004.
- C. F. H. Gondran, E. Morales, A. Guerry, W. Xiong, C. R.
Cleavelin, R. Wise, S. Balasubramanian, and T.-J. King, “Fin sidewall
micro-roughness measurement by AFM,” presented at the MRS 2004 Spring
Meeting, Symposium E (San Francisco, California, USA), April
2004.
- E. P. Quevy, S. A. Bhave, H. Takeuchi, T.-J. King, and R.
T. Howe, “Poly-SiGe high frequency resonators based on lithographic
definition of nano-gap lateral transducers,” presented at Hilton Head
2004: A Solid State Sensor, Actuator and Microsystems Workshop
(Hilton
Head Island, South Carolina, USA), June 2004.
- M.-A. N. Eyoum, Y. R. Su, B. L. Bircumshaw, D. Kouzminov,
H. Takeuchi, R. T. Howe, and T.-J.
King, “Effects of boron concentration
on Si1-xGex properties for integrated MEMS
technology,” presented at Hilton
Head 2004: A Solid
State Sensor, Actuator and Microsystems
Workshop (Hilton Head Island, South Carolina, USA), June 2004.
- H. Kam, L. Chang, and T.-J. King, “Impact of 3D
source-drain doping profiles and contact schemes on FinFET performance
in the nanoscale regime,” Proceedings
of the 2004 Silicon
Nanoelectronics Workshop, pp. 9-10, 2004.
- C. W. Low, M. L. Wasilik, H. Takeuchi, T.-J. King, and R.
T. Howe, “In-situ doped poly-SiGe LPCVD process using BCl3
for
post-CMOS integration of MEMS devices,” presented at the Symposium on SiGe:
Materials, Processing, and Devices (part of the 2004
Joint International Meeting of The Electrochemical Society, The
Electrochemical Society of Japan and The Japan Society of Applied
Physics), (Honolulu, Hawaii, USA), October 2004.
- S. Balasubramanian, J. L. Garrett, V. Vidya, B. Nikolic,
and T.-J. King,
“Energy-delay optimization of thin-body MOSFETs for the
sub-15nm regime,” 2004
IEEE International SOI
Conference Digest, pp. 27-29, 2004.
- W. Xiong, C. R. Cleavelin, R. Wise, S. Yu, M. Pas, R. J.
Zaman, M. Gostkowski, K. Matthews, C. Maleville, P. Patruno, T.-J. King, and J. P.
Colinge, “Full/partial depletion effects in FinFETs,” presented
at the 2004 IEEE International SOI
Conference (Charleston, South Carolina, USA), October 2004.
- C. W. Low, B. L. Bircumshaw, T. Dorofeeva, G. Solomon, T.-J. King, and R. T. Howe,
“Stress Stability of Poly-SiGe and Various Oxide Films in Humid
Environments,” presented at the 2004
MRS Fall Meeting, Symposium U: Stability of Thin Films and
Nanostructures (Boston, Massachusetts, USA), November 2004.
- D. Ha, H. Takeuchi, Y.-K. Choi, T.-J. King, W. Bai, D.-L.
Kwong, A. Agarwal, and M. Ameen, “Molybdenum-gate HfO2 CMOS
FinFET technology,” International
Electron Devices Meeting Technical Digest, pp. 643-646,
2004.
- H. Takeuchi, H. Y. Wong, D. Ha, and T.-J. King, “Impact of
oxygen vacancies on high-k gate dielectric engineering,” International
Electron Devices Meeting Technical Digest, pp. 829-832, 2004.
- H. Y. Wong, H. Takeuchi, A. Padilla, T.-J. King, M. Ameen, and
A. Agarwal, "Pulsed excimer laser annealing for meeting near-term front
end processes gate-stack challenges," presented at the 207th Meeting of the Electrochemical
Society, Symposium K1 (Quebec City, Canada), May 2005.
- A. Carlson and T.-J.
King, “Multiple-drain transistors for reconfigurable
applications,” presented at the 2005
Device Research Conference (Santa Barbara, California, USA).
- K. Shin, T. Lauderdale, and T.-J. King, “Effect of
tensile capping layer on 3-D stress profiles in FinFET channels,”
presented at the 2005 Device
Research Conference (Santa Barbara, California, USA).
- Best Paper Award: Z.
Guo, S. Balasubramanian, R. Zlatanovici, T.-J. King, and Borivoje
Nikolic, “FinFET-based SRAM design,” presented at the International Symposium on Low Power
Electronics and Design (San Diego, California, USA), pp. 2-7,
August 2005.
- H. Kam, D. Lee, R. T. Howe, and T.-J. King, “A new
nano-electro-mechanical field effect transistor (NEMFET) design for
low-power electronics,” IEEE
International Electron Devices Meeting Technical Digest,
pp. 477-480, 2005.
- K. Shin and T.-J.
King, “Dual stress capping layer enhancement study for hybrid
orientation FinFET CMOS technology,” presented at the IEEE International Electron Devices Meeting
(Washington D.C., USA), December 2005.
- E. P. Quevy, A. San Paulo, E. Basol, R. T. Howe, T.-J. King, and J. Bokor,
“Back-end-of-line Poly-SiGe disk resonators,” presented at the 19th IEEE Conference on Micro Electro
Mechanical Systems (Istanbul, Turkey), January 2006.
- E. P. Quevy, R. T. Howe, and T.-J.
King, “Reconstituted wafer technology for heterogeneous
integration,” presented at the 19th
IEEE Conference on Micro Electro Mechanical Systems (Istanbul,
Turkey), January 2006.
- B. C.-Y. Lin, T.-J.
King, and Richard S. Muller, "Poly-SiGe MEMS actuators for adaptive
optics,"
Photonics WEST, sponsored by SPIE, The International Society for
Optical Engineering, Conference 6113, Paper 6113-28, San Jose, CA,
January 25, 2006.
- K. Shiraishi, H. Takeuchi, Y. Akasaka, H. Watanabe, N.
Umezawa, T. Chikyow, Y. Nara, T.-J.
King Liu, and K. Yamada,”Mechanism of Fermi-Level Pinning for
n-like Metal Silicides on Hf-based Gate Dielectrics,” Proceedings of the IEEE 2006 Silicon Nanoelectronics Workshop,
pp. 115-116, 2006.
- V. Varadarajan, L. Smith, S. Balasubramanian, and T.-J. King Liu, “Multi-gate
FET design for tolerance to statistical dopant fluctuations,” Proceedings of the IEEE 2006 Silicon
Nanoelectronics Workshop, pp. 137-138, 2006.
- Y. Yasuda, C.-H. Lin, T.-J. King Liu, and C. Hu,
“Impact of HfSiON induced flicker noise on scaling of future
mixed-signal CMOS, 2006 Symposium on
VLSI Technology Digest of Technical Papers, pp. 130-131, 2006.
- W. Xiong, K. Shin, C. R. Cleavelin, T. Schulz, K.
Schruefer, I. Cayrefourcq, M. Kennard, C. Mazure, P. Paturno, and T.-J. King Liu, “FinFET
performance enhancment with tensile metal gates and strained silicon on
insulator (sSOI) substrate,” 2006
Device Research Conference Digest, pp. 39-40, 2006.
- V. Vidya and T.-J.
King Liu, “VT adjustment by Leff
engineering for LSTP single gate work-function CMOS FinFET technology,”
presented at the 16th Biennial
University Government Industry Microelectronics Symposium (San
Jose, California, USA), June 2006.
- K. Shiraishi, H. Takeuchi, Y. Akasaka, H. Watanabe, N.
Umezawa, T. Chikyow, Y. Nara, T.-J.
King Liu, and K. Yamada,”Theory of Fermi level pinning of high-k
dielectrics,” presented at the 2006
International Conference on
Simulation of Semiconductor Proceses and Devices (Monterey,
California,
USA), September 2006.
- G. Liu, T.-J.
King Liu, and A. M. Niknejad, “A 1.2V, 2.4GHz fully integrated
linear CMOS power amplifier with efficiency enhancement,” presented at
the 2006 IEEE Custom
Integrated Circuits Conference (San Jose, California, USA),
September 2006.
- A. Carlson, Z. Guo, S. Balasubramanian, L.-T. Pang, T.-J. King Liu, and B.
Nikolic, “FinFET SRAM with enhanced read/write margins,”
presented at the IEEE International
SOI Conference (Niagara Falls, New York, USA), October 2006.
- C. W. Low, T.-J.
King Liu, and R. T. Howe, “Study of poly-SiGe structural
properties for modularly integrated MEMS,” presented at the Second International Symposium on SiGe and
Ge: Materials, Processing, and Devices (Cancun, Mexico),
November 2006.
- V. Varadarajan, Y. Yasuda, S. Balasubramanian, and T.-J. King Liu, “WireFET
technology for 3-D integrated circuits,” presented at the 2006 International Electron Devices Meeting
(San Francisco, California, USA), December 2006.
- C.-H. Hsu, W. Xiong, C.-T. Lin, Y.-T. Huang, M. Ma, C. R.
Cleavelin, P. Patruno, M. Kennard, I. Cayrefourcq, K. Shin, and T.-J.
King Liu, “Multi-gate MOSFETs with dual contact etch stop liner
stressors on tensile metal gate and strained silicon on insulator
(SOI),” presented at the International
Symposium on VLSI Technology, Systems, and Applications
(Hsinchu, Taiwan R.O.C.), April 2007.
- A. Padilla and T.-J.
King Liu, “Dual-bit SONOS FinFET
non-volatile memory cell and new method of charge detection,” presented
at the International
Symposium on VLSI Technology, Systems, and Applications
(Hsinchu, Taiwan R.O.C.), April 2007.
- Best Student Paper
Award: D. T. Lee, X. Sun, E. Quevy, R. T. Howe, and T.-J. King Liu, “WetFET --
a
novel
fluidic gate-dielectric transistor for sensor applications,” presented
at the International
Symposium on VLSI Technology, Systems, and Applications
(Hsinchu, Taiwan R.O.C.), April 2007.
- P. Kalra, P. Majhi, D. Heh, G. Bersuker, C. Young, N.
Vora, R. Harris, P. Kirsch, R. Choi, M. Chang, J. Lee, H. Hwang, H.-H.
Tseng, R. Jammy, and T.-J.
King Liu, “Impact of flash annealing on performance and
reliability of high-k/metal-gate MOSFETs for sub-45nm CMOS,” Int’l Electron Devices Meeting Technical
Digest, pp. 353-356, 2007.
- W. Y. Choi, H. Kam, D. Lee, J. Lai, and T.-J. King Liu, “Compact
nano-electro-mechanical non-volatile memory (NEMory) for 3D
integration,” Int’l Electron Devices
Meeting Technical Digest, pp. 603-606, 2007.
- A. Carlson and T.-J.
King Liu, “Negative and iterated spacer lithography processes
for low variability and ultra-dense integration,” Proc. SPIE Vol. 6924,
2008.
- K. Patel, T.-J.
King Liu, and C. Spanos, “Impact of line edge roughness on
double-gate FinFET performance variability,” Proc. SPIE Vol. 6925, 2008.
- P. Kalra, P. Majhi, H.-H. Tseng, R. Jammy, and T.-J. King Liu,
"Optimization of flash annealing parameters to achieve ultra-shallow
junctions for sub-45nm CMOS," to be presented at the MRS 2008 Spring Meeting (San
Francisco, CA, USA), March 2008.
- J. Rosenbaum, P. Atkinson, T.-J. King Liu, H. Kam, and
B. Graves, “A case study on an innovative approach to on-line technical
education in an industrial setting,” to be presented at the IACEE 11th World Conference on Continuing
Engineering Education (Atlanta, Georgia, USA), 2008.
- P. Kalra, P. Majhi, H.-H. Tseng, R. Jammy, and T.-J. King Liu, “Infusion
doping for sub-45nm CMOS technology nodes,” presented at the 17th International Conference on Ion
Implantation Technology (Monterey, California, USA), June 2008.
- C. Shin, A. Carlson, X. Sun, K. Jeon, and T.-J. King Liu, “Tri-gate
bulk MOSFET design for improved robustness to random dopant
fluctuations,” IEEE 2008 Silicon
Nanoelectronics Workshop (Honolulu, HI, USA), June 2008.
- A. Carlson, X. Sun, C. Shin, and T.-J. King Liu, “SRAM yield
and performance enhancements with tri-gate bulk MOSFETs,” IEEE 2008 Silicon Nanoelectronics Workshop
(Honolulu, HI, USA), June 2008.
- A. Padilla, S. Lee, D. Carlton, and T.-J. King Liu, “Enhanced
endurance of dual-bit SONOS NVM cells using the GIDL read method,” 2008 Symposium on VLSI Technology, Digest
of Technical Papers, pp. 142-143, June 2008.
- A. Carlson, Z. Guo, L.-T. Pang, T.-J. King Liu, and B.
Nikolic, “Compensation of systematic variations through optimal biasing
of SRAM wordlines,” to be presented at the 2008 Custom Integrated Circuits Conference
(San Jose, California, USA), September 2008.
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