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Table of Calculated and Measured Resonance Frequencies for the First Electrostatic-Comb Driven Resonators [1990]
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The year 1990 continued exploration of the first comb-driven lateral resonators and produced a follow-on publication expanding on comb-driven folded-beam measurement and analysis.
W. C. Tang, T.-C. H. Nguyen, M. W. Judy, and R. T. Howe, “Electrostatic-comb drive of lateral polysilicon resonators,” Sensors and Actuators, vol. A21-23, pp. 328-331, 1990. (4 pages)
Prof. Clark T.-C. Nguyen,
574 Cory Hall,
University of California at Berkeley,
Berkeley, CA 94720,
Email: ctnguyen at berkeley dot edu