Roa Wen Chen
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M97/90
December 1997
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/ERL-97-90.pdf
Advisor: Costas J. Spanos
BibTeX citation:
@phdthesis{Chen:M97/90, Author = {Chen, Roa Wen}, Title = {OES-Based Sensing for Plasma Processing in IC Manufacturing}, School = {EECS Department, University of California, Berkeley}, Year = {1997}, Month = {Dec}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/3349.html}, Number = {UCB/ERL M97/90} }
EndNote citation:
%0 Thesis %A Chen, Roa Wen %T OES-Based Sensing for Plasma Processing in IC Manufacturing %I EECS Department, University of California, Berkeley %D 1997 %@ UCB/ERL M97/90 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1997/3349.html %F Chen:M97/90