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SELECTED
PUBLICATIONS
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POLY-Si
THIN-FILM TRANSISTOR TECHNOLOGY
- T.-J. King,
M. G. Hack, and I-W. Wu, "Effective density-of-states distributions for
accurate modeling of polycrystalline-silicon thin-film transistors," Journal of Applied Physics, Vol.
75, No. 2, pp. 908-913, 1994.
- Y.-J. Tung, P. G. Carey, P. M. Smith, S. D. Theiss, X.
Meng, R. Weiss, G. A. Davis, V. Aebi, and T.-J. King, “An
ultra-low-temperature-fabricated poly-Si TFT with stacked composite
ECR-PECVD gate oxide,” SID
International Symposium Digest of Technical Papers, Vol. 29, pp.
887-890, 1998.
- Y.-J. Tung, J. Boyce, J. Ho, X. Huang, and T.-J. King, “A comparative
study of hydrogen and deuterium plasma treatment effects on the
performance and reliability of polysilicon TFTs,” presented at the 56th Annual Device Research Conference
(Charlottesville, Virginia, USA), June 1998.
- S. D. Theiss, P. G. Carey, P. M. Smith, P. Wickboldt, T.
W. Sigmon, Y.-J. Tung, and T.-J.
King, “Polysilicon thin film transistors fabricated at 100oC
on a flexible plastic substrate,” International
Electron Devices Meeting Technical Digest, pp. 257-260, 1998.
- T.-J. King, “Poly-Si TFT technologies for future
flat-panel displays,” Information
Display, Vol. 17, No. 4, pp. 24-26, 2001.
ADVANCED
CMOS MATERIALS AND PROCESSES
- T.-J. King,
J. R. Pfiester, and K. C. Saraswat, "A
variable-work-function polycrystalline-Si1-xGex
gate material for
submicrometer CMOS technologies," IEEE
Electron Device Letters, Vol.
12, No. 10, pp. 533-535, 1991.
- T.-J. King,
J. P. McVittie, K. C. Saraswat, and J. R. Pfiester, "Electrical
properties of heavily doped polycrystalline silicon-germanium films," IEEE Transactions on Electron Devices,
Vol. 41, No. 2, pp. 228-232, 1994.
- T.-J. King
and K. C. Saraswat, "Deposition and properties of low-pressure
chemical-vapor deposited polycrystalline silicon-germanium films," Journal of the Electrochemical Society,
Vol. 141, No. 8, pp. 2235-2241, 1994.
- W.-C. Lee, T.-J.
King, and C. Hu, "Investigation of poly-Si1-xGex
for dual gate CMOS technology," IEEE
Electron Device Letters, Vol. 19, No. 7, pp. 247-249, 1998.
- H. Takeuchi, W.-C. Lee, P. Ranade, and T.-J. King, “Improved
PMOSFET short-channel performance using ultra-shallow Si0.8Ge0.2
source/drain extensions,” International
Electron Devices Meeting Technical Digest, pp. 501-504, 1999.
- Q. Lu, R. Lin, P. Ranade, T.-J. King, and C. Hu,
“Metal gate work function adjustment for future CMOS technology,”
presented at the 2001 Symposium on
VLSI Technology (Kyoto, Japan), June 2001.
- Q. Lu, H. Takeuchi, X. Meng, T.-J. King, C. Hu, K.
Onishi, H.-J. Cho, and J. Lee, “Improved performance of ultra-thin HfO2
CMOSFETs using poly-SiGe gate,” presented at the 2002 VLSI Symposium on Technology
(Honolulu, Hawaii, USA), June 2002.
- P. Ranade, Y.-K. Choi, D. Ha, A. Agarwal, M. Ameen, and T.-J. King,
"Tunable-Work-Function Molybdenum Gate Technology for FDSOI-CMOS," International Electron Devices Meeting
Technical Digest, pp. 363-366, December 2002.
- A. Yagishita, T.-J.
King, and J. Bokor, "Schottky barrier
height reduction and drive current improvement in metal source/drain
MOSFET with strained-Si channel," Extended
Abstracts of the 2003
International Conference on Solid-State Devices and Materials,
pp.
708-709.
NANOSCALE
TRANSISTOR TECHNOLOGY
- 2002 EDS Paul Rappaport
Award: Y. C. Yeo, V. Subramanian, J. Kedzierski, P. Xuan, T.-J. King, J. Bokor, and
C. Hu, “Nanoscale ultra-thin-body silicon-on-insulator P-MOSFET with a
SiGe/Si heterostructure channel,” IEEE
Electron Device Letters, Vol. 21, No. 4, pp. 161-163, 2000.
- D. Hisamoto, W.-C. Lee, J. Kedzierski, H. Takeuchi, K.
Asano, C. Kuo, E. Anderson, T.-J.
King, J. Bokor, and C. Hu, “FinFET -- a self-aligned double-gate
MOSFET scalable to 20 nm,” IEEE
Transactions on Electron Devices, Vol. 47, No. 12, pp.
2320-2325, 2000.
- Y.-K. Choi, Y.-C. Jeon, P. Ranade, H. Takeuchi, T.-J. King, J. Bokor, and
C. Hu, “30nm ultra-thin-body SOI MOSFET with selectively deposited Ge
raised S/D,” 58th Annual Device
Research Conference Digest, pp. 23-24, 2000.
- J. Kedzierski, P. Xuan, E. H. Anderson, J. Bokor, T.-J. King, and C. Hu,
"Complementary silicide source/drain thin-body MOSFETs for the 20nm
gate length regime,” International
Electron Devices Meeting Technical Digest, pp. 57-60, 2000.
- N. Lindert, Y.-K. Choi, L. Chang, E. Anderson, W.-C. Lee,
T.-J. King,
J. Bokor, and C. Hu, “Quasi-planar NMOS FinFETs with sub-100nm gate
lengths,” presented at the 59th
Annual Device Research Conference (Notre Dame, Indiana, USA),
June 2001.
- Y.-K. Choi, N. Lindert, P. Xuan, S. Tang, D. Ha, E.
Anderson, T.-J. King,
J. Bokor, and C. Hu, "Sub-20nm CMOS FinFET technologies,” International Electron Devices Meeting
Technical Digest, pp. 421-424, 2001.
- Y.-K. Choi, L. Chang, P. Ranade, J. Lee, D. Ha, S.
Balasubramanian, A. Agarwal, T.-J.
King, and J. Bokor "FinFET Process Refinements for Improved
Mobility and Gate Work Function Engineering," International Electron Devices Meeting
Technical Digest, pp. 259-262, 2002.
- J. Fossum, M. M. Chowdhury, V. P. Trivedi, T.-J. King,
Y.-K. Choi, J. An, and B. Yu, “Physical insights on design and modeling
of nanoscale FinFETs,” International
Electron Devices Meeting, pp.
679-283, 2003.
SEMICONDUCTOR
MEMORY DEVICES
- Y.-C. King, T.-J.
King, and C. Hu, "Charge-trap memory device fabricated by
oxidation of Si1-xGex," IEEE Transactions on Electron Devices,
Vol. 48, No. 4, pp. 696-700, 2001.
- C. Kuo, T.-J.
King, and C. Hu, “A capacitorless double-gate DRAM cell,” IEEE Electron Device Letters, Vol.
23, No. 6, pp. 345-347, 2002.
- M. She, H. Takeuchi, and T.-J. King,
“Silicon-nitride as a tunnel dielectric for improved SONOS-type flash
memory,” IEEE Electron Device Letters,
Vol. 24, No. 5, pp. 309-311, 2003.
- M. She and T.-J.
King, “Improved SONOS-type flash memory
using HfO2 as trapping layer,” presented at the 19th IEEE Non-Volatile
Semiconductor Memory Workshop (Monterey, California, USA), pp.
53-55,
2003.
- C. Kuo, T.-J.
King, and C. Hu, “Direct tunneling RAM (DT-RAM) for high-density
memory applications,” IEEE Electron
Device Letters, Vol. 24, No. 7, pp. 475-477, 2003.
- M. She and T.-J.
King, “Impact of crystal size and tunnel dielectric on
semiconductor nanocrystal memory performance,” IEEE Transactions on Electron Devices,
Vol. 50, No. 9, pp. 1934-1940, 2003.
- C. Kuo, T.-J.
King, and C. Hu, “A capacitorless double gate DRAM technology
for sub-100-nm embedded and stand-alone memory applications,” IEEE Transactions on Electron Devices,
Vol. 50, No. 12, pp. 2408-2416, 2003.
- P. Xuan, M. She, J. Bokor, and T.-J. King, “FinFET SONOS
Flash Memory for Embedded Applications,” International Electron Devices
Meeting Technical Digest, pp. 609-612, 2003.
MICRO-ELECTROMECHANICAL
SYSTEMS TECHNOLOGY
- J. M. Heck, Chris G. Keller, A. E. Franke, Lilac Muller,
R. T. Howe, and T.-J. King,
“High aspect ratio poly-silicon-germanium microstructures,” Proceedings of the 1999 International
Conference on Solid-State Sensors and Actuators -- Transducers ‘99
(Sendai, Japan), pp. 328-331, 1999.
- A. E. Franke, Y. Jiao, M. T. Wu, T.-J. King, and R. T. Howe,
“Post-CMOS modular integration of poly-SiGe microstructures using
poly-Ge sacrificial layers,” Solid-State
Sensor and Actuator Workshop Technical Digest, pp. 18-21, June
2000.
- A. E. Franke, T.-J.
King, and R. T. Howe, “Integrated MEMS technologies,” MRS Bulletin, Vol. 26, No. 4, pp.
291-295, 2001.
- S. A. Bhave, B. L. Bircumshaw, W. Z. Low, Y.-S. Kim, T.-J. King, R. T. Howe, and
A. P. Pisano, “Poly-SiGe: A high-Q structural material for integrated
RF MEMS,” Solid-State Sensor and
Actuator Workshop, Technical Digest, pp. 34-37, 2002.
- Invited Paper: T.-J. King, R. T. Howe and
S. Sedky "Recent progress in modularly integrated MEMS technologies," International Electron Devices Meeting
Technical Digest, pp. 199-202, 2002.
- M.-A. E. Eyoum and T.-J. King, “Low resistance
silicon-germanium technology for modular integration of MEMS with
electronics,” Journal of the
Electrochemical Society, Vol. 151, No. 3, pp. J21-J25, 2004.
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