Michael A. Lieberman
Department of Electrical Engineering and Computer Sciences
University of California, Berkeley

Publications by M.A. Lieberman (in refereed journals)

  1. ``Plasma Density Measurement by Cavity Perturbation in High Density Plasma,'' (with A. J. Lichtenberg), Phys. Fluids, 12, 1969.
  2. ``Solution of Fokker-Planck Equation for Mirror-Confined, Hot Electron Plasmas,'' Phys. Fluids, 13, 1970.
  3. ``Verification of a Classical, Self-Consistent Theory of Particle Loss in a Hot Electron, Magnetic Mirror Compression Experiment,'' (with A. J. Lichtenberg and T. Takeshita), Plasma Phys., 13, 141, 1971.
  4. ``Diagnostics for Hot-Electron, Magnetically Confined Plasmas,'' (with A. J. Lichtenberg and M.J. Schwartz), Plasma Phys., 13, 89, 1971.
  5. ``Stochastic and Adiabatic Behavior of Particles Accelerated by Periodic Forces,'' (with A. J. Lichtenberg) Phys. Rev., A., 1852, 1972.
  6. ``Multiple Mirror Confinement of Plasmas,'' (with B. Grant Logan, A. J. Lichtenberg and A. Makhijani), Phys. Rev. Lett., 28, 144, 1972.
  7. ``Experimental Evidence of Multiple-Mirror Plasma Confinement,'' (with B. Grant Logan, I. G. Brown and A. J. Lichtenberg), Phys. Rev. Lett., 29, 1435, 1972.
  8. ``Theory of Electron Cyclotron Resonance Heating I: Short Time and Adiabatic Effects,'' (with A. J. Lichtenberg and F. Jaeger), Plasma Phys., 14, 1073, 1972.
  9. ``Theory of Electron Cyclotron Resonance Heating II: Long Time and Stochastic Effects,'' (with A. J. Lichtenberg) Plasma Phys., 15, 125, 1973.
  10. ``Production of Alkali Plasmas by Photoionization,'' (with M. Luksenberg and T. Berg), Rev. Sci. Instr., 44, 35, 1973.
  11. ``Shielding of Moving Test Particles in Warm, Isotropic Plasmas,'' (with L. Chen and A. B. Langdon), J. Plasma Phys., 9, 311, 1973.
  12. ``Observation of Ion Heating Near Cyclotron Harmonics Using an RF Modulated Electron Beam,'' (with C. L. Hsieh and T. A. Shepp), Phys. Fluids, 16, 203, 1973.
  13. ``Magnetic Compression and Electron Cyclotron Heating of a Low Temperature, Lithium Plasma,'' (with J. Kim) Phys. Fluids, 17, 559, 1974.
  14. ``Plasma Confinement in Multiple-Mirror Systems I: Theory,'' (with A. J. Makhijani, A. J. Lichtenberg and B. Grant Logan), Phys. Fluids, 17, 1291, 1974.
  15. ``Plasma Confinement in Multiple-Mirror System II: Experiment and Reactor Calculation,'' (with B. Grant Logan, I. G. Brown and A. J. Lichtenberg), Phys. Fluids, 17, 1302, 1974.
  16. ``Low Impedance Intense Electron Beam Device,'' (with B. Myers and S. Eylon), Rev. Sci. Instr., 46, 1399, 1975.
  17. ``Electron Cyclotron Resonance Heating in a Pulsed Mirror Experiment,'' (with N. Convers Wyeth and A. J. Lichtenberg), Plasma Phys., 17, 679, 1975.
  18. ``United States Uranium Resources: An Analysis of Historical Data,'' Science, 192, 431, 1976.
  19. ``Cold Plasma Stabilization of a Mirror-Confined, Hot Electron Plasma,'' (with I. G. Brown, A. J. Lichtenberg and N. Convers Wyeth), Phys. Fluids, 19, 1203, 1976.
  20. ``Multiple-Mirror Confinement with Collision-Independent Scattering,'' (with A. J. Lichtenberg), Nucl. Fusion, 16, 533, 1976.
  21. ``Power Balance and Impurity Effect in Two-Component, Multiple Mirror Reactors,'' (with S. T. Yang), Nucl. Fusion, 17, 597, 1977.
  22. ``Axial Feedback Stabilization of Flute Mode in a Mirror Confined Plasma,'' (with S. L. Wong), Plasma Phys., 19, 745, 1977.
  23. ``Reply to Comments on Uranium Resources (Letter),'' Science, 196, 604-608, (6 May 1977).
  24. ``Axial Feedback Stabilization of Flute Mode in a Multiple Mirror,'' (with S. L. Wong), Plasma Phys, 20, 403 (1978).
  25. ``Two Component Multiple Mirror Reactor with Depressed Ion Temperature,'' (with S. T. Yang), Nucl. Fusion, 18, 965 (1978).
  26. ``Minimum-Average-B Wells in Linked, Magnetic Mirror Fields,'' (with J. C. Riordan and A. J. Lichtenberg), Nucl. Fusion, 19, 21 (1979).
  27. Energy and Power (textbook, with M. C. Branch and L. M. Grossman), Chapters on ``Energy Resources'' (completed), ``Energy Consumption'', ``Electric Energy'', and ``Controlled Fusion'' (completed), in preparation.
  28. ``MHD Stabilization of Finite Beta Multiple Mirror Plasmas,'' (with M. Tuszewski, D. Price, R. Bravenec, K. Doniger, C. Hartman, and A. J. Lichtenberg), Nucl. Fusion 19, 1244 (1979).
  29. ``Diffusion in Near Integrable Hamiltonian Systems with Three Degrees of Freedom,'' (with J. L. Tennyson and A. J. Lichtenberg), in Nonlinear Dynamics and the Beam-Beam Interaction, M. Month and A. G. Herrara, eds., AIP Conf. Proc. No. 57, 272-301, (American Institute of Physics, New York, 1979).
  30. ``Arnold Diffusion in Hamiltonian Systems with Three Degrees of Freedom,'' Ann. NY Acad. Sci., 327 (1980).
  31. ``Fermi Acceleration Revisited,'' (with A. J. Lichtenberg and R. H. Cohen), Physica D 1, 291 (1980).
  32. ``Radial Losses in High Beta Multiple Mirror Plasmas,'' (with M. Tuszewski), Phys. Fluid 24, 320 (1981).
  33. ``Viscous Plasma Flow in a Multiple-Mirror Configuration,'' (with R. V. Bravenec, A. J. Lichtenberg, and H. Berk), Phys. Fluids 24, 1320 (1981).
  34. ``Theory of Multifrequency ECRH,'' (with J. E. Howard, A. J. Lichtenberg, and R. H. Cohen), Conference Proceedings of the 2nd Workshop on Hot Electron Ring Physics, San Diego, California, December 1-3, 1981, (N. Uckan, ed.), Vol. 2, p. 561.
  35. Regular and Stochastic Motion (with A. J. Lichtenberg) Springer-Verlag New York, Inc., 499 pages, 1983. Also translated into Russian (1984)
  36. ``Chaotic Motion Along Resonance Layers in Near-Integrable Hamiltonian Systems with Three or More Freedoms,'' (with J. L. Tennyson), in Long-Time Prediction in Dynamics (C. W. Horton, Jr., L. E. Reichl, and V. Szebehely, eds., J. Wiley, New York, 1983).
  37. ``Two-Frequency Fermi Mapping,'' (with J. E. Howard and A. J. Lichtenberg), Physica 5D, 243 (1982).
  38. ``Effects of Ambipolar Potential on Multiple Mirror Confinement,'' (with F. Najmabadi and A. J. Lichtenberg) Phys. Fluids 26, 1018 (1983).
  39. ``Parameter Optimizations of Multiple Mirror Reactors,'' (with F. Najmabadi and A. J. Lichtenberg) Nuclear Fusion 23, 609 (1983).
  40. ``Radial and Axial Losses in a Multiple-Mirror Experiment'' (with H. D. Price, A. J. Lichtenberg and M. Tuszewski), Nucl. Fusion 23, 1043 (1983).
  41. ``Analytical Calculation of Invariant Distributions on Strange Attractors,'' (with K. Y. Tsang), Physica 11D 147, (1984).
  42. ``Invariant Distribution on Strange Attractors in Highly Dissipative Systems,'' (with K. Tsang), Phys. Lett., 103A, 175 (1984).
  43. ``A Study of High Beta Ballooning Modes,'' (with H. D. Price, N.M.P. Benjamin, B. K. Kang, and A. J. Lichtenberg), Physics of Fluids 28, 392 (1985).
  44. ``A Theory of Modulational Diffusion'' (with B. V. Chirikov, D. L. Shepelyanksy, and F. M. Vivaldi), Physica 14D, 289 (1985).
  45. ``A Theoretical Study of ICRF Effects on Multiple Mirror Confinement,'' (with K. J. Doniger and A. J. Lichtenberg), Nuclear Fusion 25, 3 (1985).
  46. ``Transient Chaos in Dissipatively Perturbed, Near-Integrable Hamiltonian Systems,'' (with K. Y. Tsang), Phys. Rev. Lett., 55, 908 (1985).
  47. ``Corrections to Quasilinear Diffusion in Area-Preserving Maps,'' (with N. M. Murray and A. J. Lichtenberg), Phys. Rev. A32, 2413 (1986).
  48. ``Measurement of a Curvature Driven, Trapped Particle Mode Created by a Potential Barrier,'' (with J. C. Fernandez, C. P. Chang, A. J. Lichtenberg, and H. Meuth), Phys. Fluids 29, 1208 (1986).
  49. ``Transient Chaotic Distributions in Dissipative Systems,'' (with K. Y. Tsang) Physica 21D, 401 (1986).
  50. ``Axial Plasma Injection and Shock Formation in Multiple Mirrors,'' (with R. V. Bravenec and A. J. Lichtenberg), Phys. Fluids 29, 1217 (1986).
  51. ``Velocity Diffusion in Two-Frequency Electron Cyclotron Resonance Heating,'' (with A. J. Lichtenberg, J. E. Howard, and R. Cohen), Phys. Fluids 29, 1061 (1986).
  52. ``Four Dimensional Mapping Model for Two Frequency Electron Cyclotron Heating,'' (with J. E. Howard, A. J. Lichtenberg, and R. H. Cohen), Physica 20D, 259 (1986).
  53. ``Many-Dimensional Hamiltonian Systems,'' Physics of High Energy Particle Accelerators, AIP Conference Proceedings, vol. 153, 631(1987).
  54. ``Experimental Observation of Stabilization of an Axisymmetric Mirrors at High Beta with a Nearby Wall,'' (with R. A. Close, B. K. Kang, A. J. Lichtenberg, and H. Meuth), Phys. Fluids 29, 3892 (1986).
  55. ``Stochasticity and Resonances in the Two Beam Accelerator,'' (with N. W. Murray) Proceedings of the Symposium on Advanced Accelerator Concepts, American Institute of Physics, 1987.
  56. ``Observation of a Potential Barrier Created by Electron Cyclotron Resonance Heating,'' (with C. P. Chang, H. Meuth, and A. J. Lichtenberg), Phys. Fluids 31, 123 (1988).
  57. ``The Effect of Quasi-Accelerator Modes on Diffusion,'' (with A. J. Lichtenberg and N. W. Murray), Physica 28D, 371 (1987).
  58. ``Axial Feedback Stabilization of Flute Modes for Mirror Machines,'' (with B. K. Kang and A. Sen), IEEE Trans. on Plasma Science 16, 22 (1988).
  59. ``Electron Beam Time-of-Flight Potential Diagnostic,'' (with B. T. Archer and H. Meuth) Rev. Sci. Instrum. 59, 128 (1988).
  60. ``Transient Electrostatic Potentials Driven by Short-Pulse Electron Cyclotron Heating,'' (with A. J. Lichtenberg and R. H. Cohen) Phys. Fluids 30, 3540 (1987).
  61. ``A Collisional Treatment of the Trapped Particle Mode in Multi-Region Mirror Systems,'' (with H. Ramachandran, A. J. Lichtenberg, and A. K. Sen) Phys. Fluids 31, 2310 (1988).
  62. ``Radial Current Distribution at a Planar Magnetron Cathode,'' (with A.E. Wendt and H. Meuth) J. Vac. Sci. and Technol. A6, 1827 (1988).
  63. ``Diffusion in Two Dimensional Mappings,'' (with A.J. Lichtenberg), Physica D, 33, 211 (1988).
  64. ``Axial Distribution of Optical Emission in a Planar Magnetron Discharge,'' (with Lan Gu), J. Vac. Sci. and Technol. A 6, 2960 (1988).
  65. ``Analytical Solution for Capacitive R.F. Sheath,'' IEEE Trans. on Plasma Sci. 16, 638 (1988).
  66. "Self-Consistent Stochastic Heating in Radio Frequency Discharges," (with C.G. Goedde and A.J. Lichtenberg), J. Appl. Phys. 64, 4375 (1988).
  67. "Macroscopic Modeling of Radio-Frequency Plasma Discharges," (with G.R. Misium and A.J. Lichtenberg), J. Vac. Sci. and Technol. A 7, 1007 (1989).
  68. ``A Method for Obtaining a Canonical Hamiltonian for Nonlinear LC Circuits,'' (with G.M. Bernstein), IEEE Trans. CAS 36, 411 (1989).
  69. "Dynamics of a Collisional, Capacitive RF Sheath", IEEE Trans. Plasma Sci. 17, 338 (1989).
  70. "Spherical Shell Model of an Asymmetric RF Discharge", J. Appl. Phys. 65, 4186 (1989).
  71. ``Nonlinear Dynamics of a Digital Phase Locked Loop,'' (with G.M. Bernstein and A.J. Lichtenberg), IEEE Transactions on Communications vol. 37, no. 10, pp. 1062-1070 (1989).
  72. "Cavity Perturbation Measurement of Plasma Density in Complex Geometry RF Discharges" (with R.M. Moroney and A.J. Lichtenberg), J. Appl. Phys. 66, 1618 (1989).
  73. "Model of Plasma Immersion Ion Implantation", J. Appl. Phys. 66, 2926 (1989).
  74. "Secure Random Number Generation using Chaotic Circuits" (with G.M. Bernstein), IEEE Transactions on Circuits and Systems vol. 37, no. 9, pp. 1157-1164 (1990).
  75. A.E. Wendt and M.A. Lieberman, "Spatial Structure of a Planar Magnetron Discharge," Journal of Vacuum Science and Technology A vol. 8, no. 2, pp. 902-907, March/April 1990.
  76. C.G. Goedde, A.J. Lichtenberg and M.A. Lieberman, "Parametric Instabilities in the Discrete Sine-Gordon Equation," Physica D vol 41, pp. 341-355, April 1990.
  77. D.A. Carl, D.W. Hess and M.A. Lieberman, "Oxidation of Silicon in an ECR Oxygen Plasma: Kinetics, Physico-Chemical and Electrical Properties," Journal of Vacuum Science and Technology A vol. 8, no. 3, pp. 2924-2930, May/June 1990.
  78. M.A. Lieberman and S.E. Savas, "Bias Voltage in Finite Length, Cylindrical and Coaxial Radio-Frequency Discharges," Journal of Vacuum Science and Technology A vol. 8, no. 3, pp. 1632-1641, May/June 1990.
  79. D.A. Carl, D.W. Hess, and M.A. Lieberman, "Kinetics of Photoresist Etching in an Electron Cyclotron Resonance Plasma," Journal of Applied Physics vol 68, no. 4, p. 1859 (1990).
  80. B.P. Wood, A.J. Lichtenberg and M.A. Lieberman, "Arnold Diffusion in Weakly Coupled Standard Maps," Physical Review A vol. 42, no. 10, pp. 5885-5893, November, 1990.
  81. A.H. Sato and M.A. Lieberman, "Electron Beam Probe Measurements of Electric Fields in RF Discharges," Journal of Applied Physics vol. 68, no. 12, pp. 6117-6124, December, 1990.
  82. M.V. Alves, M.A. Lieberman, V. Vahedi and C.K. Birdsall, "Sheath Voltage Ratio for Asymmetric RF Discharges," Journal of Applied Physics vol. 69, no. 7, pp. 3823-3829, April, 1991. 1990.
  83. V. Vahedi, M.A. Lieberman, M.V. Alves, J.P. Verboncoeur and C.K. Birdsall, "A One Dimensional Collisional Model for Plasma Immersion Ion Implantation," Journal of Applied Physics vol. 69, no. 4, pp. 2008-2014, February, 1991.
  84. M.A. Lieberman, A.J. Lichtenberg and S.E. Savas, "Model of Magnetically Enhanced, Capacitive RF Discharges," IEEE Transactions on Plasma Science vol. 19, no. 2, pp. 189-196, 1990.
  85. D.A. Carl, M.C. Williamson, M.A. Lieberman, and A.J. Lichtenberg, "Axial RF Electric Field Intensity and Ion Density during Low to High Mode Transition in Argon Electron Cyclotron Resonance Discharges", Journal of Vacuum Science and Technology B, vol. 9, no. 2, pp. 339-347, 1991.
  86. B.P. Wood, M.A. Lieberman, and A.J. Lichtenberg, "Sheath Motion in a Capacitively Coupled Radio Frequency Discharge", IEEE Transactions on Plasma Science, vol. 19, no. 4, pp. 619-627, 1991.
  87. X.Y. Qian, D. Carl, J. Benasso, N.W. Cheung, M.A. Lieberman, I.G. Brown, J.E. Galvin, R.A. MacGill, and M.I. Current, "A Plasma Immersion Ion Implantation Reactor for ULSI Fabrication," Nucl. Instr. Meth. Phys. Res. B vol. 55, no. 1-4, pp. 884-887, April, 1991.
  88. X.Y. Qian, N.W. Cheung, M.A. Lieberman, R. Brennan, M.I. Current, and N. Jha, "Conformal Implantation for Trench Doping with Plasma Immersion Ion Implantation," Nucl. Instr. Meth. Phys. Res. B vol. 55, no. 1-4, pp. 898-901, April, 1991.
  89. X.Y. Qian, M.H. Kiang, J. Huang, D. Carl, N.W. Cheung, M.A. Lieberman, I.G. Brown, K.M. Yu, and M.I. Current, "Plasma Immersion Pd Ion Implantation Seeding Pattern Formation for Selective Electroless Cu Plating," Nucl. Instr. Meth. Phys. Res. B vol. 55, no. 1-4, pp. 888-892, April, 1991.
  90. X.Y. Qian, N.W. Cheung, M.A. Lieberman, M.I. Current, P.K. Chu, W.L. Harrington, C.W. Magee, and E. M. Botnick, "Sub-100 nm P+/N Junction Formation Using Plasma Immersion Ion Implantation," Nucl. Instr. Meth. Phys. Res. B vol. 55, no. 1-4, pp. 821-825, April, 1991.
  91. X.Y. Qian, N.W. Cheung, M.A. Lieberman, S.B. Felch, R. Brennen, and M.I. Current, "Plasma Immersion Ion Implantation of SiF4 and BF3 for Sub-100 nm P+/N Junction Fabrication," Applied Physics Letters vol. 59, no. 3, pp. 348-350, 1991.
  92. M. de Sousa Vieira, A.J. Lichtenberg, and M.A. Lieberman, "Nonlinear Dynamics of Self-Synchronizing Systems," International Journal of Bifurcation and Chaos, vol. 1, no. 3, pp. 691-699, September, 1991.
  93. D.A. Carl, D.W. Hess, M.A. Lieberman, T.D. Nguyen, and R. Gronsky, "Effects of DC Bias on the Kinetics and Electrical Properties of Silicon Dioxide Grown in an Electron Cyclotron Resonance Plasma," J. Appl. Phys., vol. 70, no. 6, pp. 3301-3313, September, 1991.
  94. R.A. Stewart and M.A. Lieberman, "Model of Plasma Immersion Ion Implantation for Voltage Pulses with Finite Rise- and Fall-Times," J. Appl. Phys., vol. 70, pp. 3481-3487, October, 1991.
  95. C.G. Goedde, A.J. Lichtenberg, and M.A. Lieberman, "Chaos and the Approach to Equilibrium in the Discrete Sine-Gordon Equation", Physica D, vol. 59, no. 1-3, pp. 200-225, Oct. 1, 1992.
  96. M.H. Kiang, M.A. Lieberman, N.W. Cheung and X.Y. Qian, "Pd/Si Plasma Immersion Ion Implantation for Selective Electroless Copper Plating on SiO2," Applied Physics Letters vol. 60, no. 22, pp. 2767-2769, June, 1992.
  97. C.A. Pico, M.A. Lieberman and N.W. Cheung, "PMOS Integrated Circuit Fabrication using BF3 Plasma Immersion Ion Implantation," Journal of Electronic Materials vol. 21, no. 1, pp. 75-79, January, 1992.
  98. R.J. Lynch, S. Das, M.A. Lieberman and D.W. Hess, "Electron Cyclotron Resonance Etching of Silylated Resist," Proceedings SPIE - Advances in Resist Technology and Processing IX Vol. 1672, pp. 429-440, 9-10 March 1992.
  99. M.H. Kiang, C.A. Pico, M.A. Lieberman, N.W. Cheung, X.Y. Qian, and K.M. Yu "Selective Copper Plating in Silicon Dioxide Trenches with Metal Plasma Immersion Ion Implantation," Materials Research Society Symposium Proceedings vol. 223, pp. 377-383, 1991.
  100. C.A. Pico, X.Y. Qian, E. Jones, M.A. Lieberman and N.W. Cheung, "Shallow P+/N Junction Fabrication by Plasma Immersion Ion Implantation," Materials Research Society Symposium Proceedings vol. 223, pp. 115-119, 1991.
  101. M. de Sousa-Vieira, P. Khoury, A.J. Lichtenberg, M.A. Lieberman, W. Wonchoba, J. Gullicksen, J. Huang, R. Sherman and M. Steinberg, "Numerical and Experimental Studies of Self-Synchronization and Synchronized Chaos," International Journal of Bifurcation and Chaos vol. 2, no. 3, 645-657, 1993.
  102. M.C. Williamson, A.J. Lichtenberg and M.A. Lieberman, "Self-Consistent Electron Cyclotron Resonance Absorption in a Plasma with Varying Parameters," Journal of Applied Physics vol. 72, no. 9, pp. 3924-3933, Nov. 1 1992.
  103. Maria de Sousa Vieira, A.J. Lichtenberg, and M.A. Lieberman, "Synchronization of Regular and Chaotic Systems," Physical Review A vol. 46, no. 12, pp. R7359-R7362, Dec. 15, 1992.
  104. V. Vahedi, C.K. Birdsall, M.A. Lieberman, G. DiPeso and T.D. Rognlien, "Verification of Frequency Scaling Laws for Capacitive Radio-Frequency Discharges using Two-Dimensional Simulations," Physics of Fluids B vol. 5, no. 7, pp. 2719-2729, July 1993.
  105. V. Vahedi, R.A. Stewart, and M.A. Lieberman "Analytic Model of the Ion Angular Distribution in a Collisional Sheath," Journal of Vacuum Science and Technology A vol. 11, no. 4, pp. 1275-1282, July-Aug. 1993.
  106. V. Vahedi, C.K. Birdsall, M.A. Lieberman, G. DiPeso, and T.D. Rognlien, ``Capacitive RF Discharges Modeled by Particle-In-Cell Monte-Carlo Simulation: I. Analysis of Numerical Techniques,'' Plasma Sources Science and Technology, vol. 2, pp. 261-272, December, 1993.
  107. V. Vahedi, C.K. Birdsall, M.A. Lieberman, G. DiPeso, and T.D. Rognlien, ``Capacitive RF Discharges Modeled by Particle-In-Cell Monte-Carlo Simulation: II. Comparisons with Laboratory Measurements of Electron Energy Distribution Functions,'' Plasma Sources Science and Technology, vol. 2, pp. 273-278, December, 1993.
  108. B.P. Wood, A.J. Lichtenberg, and M.A. Lieberman "Arnold and Arnold-like Diffusion in Many Dimensions," Physica D, vol. 71, no. 1-2, pp. 132-145, 1994.
  109. A.J. Lichtenberg, V. Vahedi, M.A. Lieberman, and T. Rognlien, "Modeling Electronegative Plasma Discharges," Journal of Applied Physics, vol. 75, no. 5, pp. 2339-2347, March 1994; vol. 76, no. 1, p. 625, July 1994.
  110. C. Lee, D.B. Graves, M.A. Lieberman, and D.W. Hess, "Global Model of Plasma Chemistry in a High Density Oxygen Discharge," J. Electrochemical Society, vol. 141, no. 6, pp. 1546-1555, June 1994.
  111. K.M. Kalpakjian, M.A. Lieberman, and W.G. Oldham, "Frequency Effects in the Reactive Ion Etching of Silylated Photoresist," Journal of Vacuum Science and Technology B, vol. 12, no. 3, pp. 1351-1361, May/June 1994.
  112. W.E. Wonchoba, M.A. Lieberman, and A.J. Lichtenberg, "The Dynamics of a Class of Coupled Digital Oscillators," Nonlinearity, vol. 7, pp. 1695-1715, December, 1994.
  113. Maria de Sousa Vieira, A.J. Lichtenberg, and M.A. Lieberman, "Nonlinear Dynamics of Digital Phase-Locked Loops with Delay," International Journal of Bifurcation and Chaos vol. 4, no. 3, pp. 715-726, 1994.
  114. M. de Sousa Vieira, A.J. Lichtenberg, and M.A. Lieberman, "Self-Synchronization of Many Coupled Oscillators," International Journal of Bifurcation and Chaos vol. 4, no. 6, pp. 1563-1577, 1994.
  115. K. Niazi, A.J. Lichtenberg, M.A. Lieberman, and D.L. Flamm, "Operation of a Helical Resonator Source," Plasma Sources Science and Technology vol. 3, pp. 482-495, 1994.
  116. M.A. Lieberman and R.A. Gottscho, "Design of High Density Plasma Sources for Materials Processing," Physics of Thin Films, vol. 18, ed. by M. Francombe and J. Vossen, Academic Press, New York, pp. 1-119, September 1994.
  117. M.A. Lieberman and A.J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, John Wiley and Sons, New York, October 21, 1994, 572 pages.
  118. J. De Luca, A.J. Lichtenberg, and M.A. Lieberman, "Time Scale to Ergodicity in the Fermi-Pasta-Ulam System," CHAOS, vol. 5, no. 1, pp. 283-297, 1995.
  119. Min Young Cho, A.J. Lichtenberg, and M.A. Lieberman, "Minimum Stopping Distance for Linear Control of an Automatic Car-Following System," IEEE Transactions on Vehicular Technology, vol. 45, no. 2, pp. 383-390, May, 1996.
  120. Sumio Ashida, M.A. Lieberman, and C. Lee, "Spatially Averaged (Global) Model of Time Modulated High Density Argon Plasmas," Journal of Vacuum Science and Technology A, vol. 13, no. 5, pp. 2498-2507, Sep/Oct 1995.
  121. C. Lee and M.A. Lieberman, "Global Model of Ar, O2, Cl2, and Ar/O2 High Density Plasma Discharges," Journal of Vacuum Science and Technology A, vol. 13, no. 2, pp. 368-380, Mar/Apr 1995.
  122. P.N. Wainman, M.A. Lieberman, A.J. Lichtenberg, R.A. Stewart, and C. Lee, "Characterization at Different Aspect Ratios (Radius/Length) of a Radio Frequency Inductively Coupled Plasma Source," Journal of Vacuum Science and Technology A, vol. 13, no. 5, pp. 2464-2469, Sept/Oct 1995.
  123. V. Vahedi, M.A. Lieberman, G. DiPeso, T.D. Rognlien, and D. Hewett, "Analytic Model of Power Deposition in Inductively Coupled Plasma Sources," Journal of Applied Physics, vol. 78, no. 3, pp. 1446-1458, August 1, 1995.
  124. W. En, M.A. Lieberman, and N.W. Cheung, "Comparison of Experimental Target Currents with Analytical Model results for Plasma Immersion Ion Implantation," IEEE Transactions on Plasma Science, vol. 23, no. 3, pp. 415-421, June, 1995.
  125. B.P. Wood, A.J. Lichtenberg, and M.A. Lieberman "Stochastic Electron Heating in a Capacitive RF Discharge with Non-Maxwellian and Time-Varying Distributions", IEEE Transactions on Plasma Science, vol. 23, no. 1, pp. 89-96, Feb 1995.
  126. C. Lee, M.A. Lieberman, and D.B. Graves, "Sensitivity Analysis of Plasma Chemistry for High Density Discharges," Conference Proceedings of the Electrochemical Society, 195th Annual Meeting, San Francisco, CA, May 22-27, 1994, 10 pages.
  127. C. Lee, M.A. Lieberman, and D.B. Graves, "Role of Etch Products in Polysilicon Etching in a High Density Chlorine Discharge," Plasma Chemistry and Plasma Processing, vol. 16, no. 1, pp. 99-120, 1996.
  128. K. Niazi, A.J. Lichtenberg, and M.A. Lieberman, "The Dispersion and Matching Characteristics of the Helical Resonator Plasma Source", IEEE Transactions on Plasma Science, vol. 23, no. 5, pp. 833-843, October 1995.
  129. S. Ashida, M.R. Shim, and M.A. Lieberman, "Measurements of Pulsed-Power Modulated Argon Plasmas in an Inductively Coupled Plasma Source", Journal of Vacuum Science and Technology A, vol. 14, no. 2, pp. 391-397, Mar/Apr 1996.
  130. M.A. Lieberman and S. Ashida, "Global Models of Pulse-Power Modulated High Density, Low Pressure Discharges," Plasma Sources Science and Technology, vol. 5, pp. 145-158, May, 1996.
  131. I. Kouznetsov, A.J. Lichtenberg, and M.A. Lieberman, "Modeling Electronegative Discharges at Low Pressure," Plasma Sources Science and Technology, vol. 5, no. 4, pp. 662-676, November 1996.
  132. P. Khoury, M.A. Lieberman, and A.J. Lichtenberg, "Degree of Synchronization of Noisy Maps on the Circle," Physical Review E, vol. 54, pp. 3377-3388, October 1996.
  133. Y.T. Lee, M.A. Lieberman, A.J. Lichtenberg, F. Bose, H. Baltes, and R. Patrick, "Global Model for High Pressure Electronegative Radio-Frequency Discharges," Journal of Vacuum Science and Technology A, vol. 15, no. 1, pp. 113-126, Jan/Feb 1997.
  134. M.A. Lieberman, G.S. Selwyn, and M. Tuszewski, "Plasma Generation for Materials Processing," MRS Bulletin, vol. 21, no. 8, pp. 32-37, Aug 1996.
  135. H.A. Tanaka, M.D.S. Vieira, A.J. Lichtenberg, M.A. Lieberman, and S. Oishi, "Stability of Synchronization States in One Dimensional Networks of Second Order PLLs," International Journal of Bifurcation and Chaos, vol. 7, no. 3, pp681-690, March 1997.
  136. S. Ashida and M.A. Lieberman "Spatially Averaged (Global) Model of Time Modulated High Density Chlorine Plasmas," Japanese Journal of Applied Physics, vol. 36, no. 2, pp. 854-861, February 1997.
  137. A.J. Lichtenberg, I.G. Kouznetsov, Y.T. Lee, M.A. Lieberman, I.D. Kaganovich, and L.D. Tsendin, "Modelling Plasma Discharges at High Electronegativity", Plasma Sources Science and Technology vol. 6, no. 3, pp. 437-449, August, 1997.
  138. J.T. Gudmundsson and M.A. Lieberman, "Magnetic Induction and Plasma Impedance in a Cylindrical Inductive Discharge," Plasma Sources Science and Technology, vol. 6, no. 4, pp. 540-550, November 1997.
  139. J.T. Gudmundsson and M.A. Lieberman, "Model and Measurements for a Planar Inductive Oxygen Discharge", Plasma Sources Science and Technology, vol. 7, no. 1, pp. 1-12, February, 1998.
  140. Yaoxi Wu and M.A. Lieberman, "A Travelling Wave Driven, Inductively Coupled Large Area Plasma Source", Applied Physics Letters, vol. 72, no. 7, pp. 777-779, 16 February 1998.
  141. P. Khoury, M.A. Lieberman, and A.J. Lichtenberg "Experimental Measurement of the Degree of Chaotic Synchronization Using a Distribution Exponent", Physical Review E, vol. 57, no. 5, pp. 5448-5466, May, 1998.
  142. M.A. Lieberman and V.A. Godyak, "From Fermi Acceleration to Collisionless Discharge Heating", IEEE Transactions on Plasma Sciences, vol. 26, no. 3, pp. 955-986, June, 1998.
  143. M.A. Lieberman, "The Dynamics of Fermi Acceleration," in Electron Kinetics and Applications of Glow Discharges, ed. by U. Kortshagen and L.D. Tsendin, NATO ASI Series B, vol. 367, pp. 215-225, 1998.
  144. M.A. Lieberman and R.W. Boswell, "Modeling the Transitions from Capacitive to Inductive to Wave-Sustained RF Discharges," J. Phys. IV France vol. 8, no. Pr7, pp. 145-164, October, 1998.
  145. J.T. Gudmundsson, T. Kimura, and M.A. Lieberman "Experimental Studies of O2/Ar Plasma in a Planar Inductive Discharge", Plasma Sources Science and Technology, vol. 8, pp. 22-30, January, 1999.
  146. C.-F. Yeh, T.-J. Chen, C. Liu, J.T. Gudmundsson, and M.A. Lieberman, "Hydrogenation of Polysilicon Thin Film Transistor in a Planar Inductive H2/Ar Discharge", IEEE Electron Devices Letters, vol. 20, no. 5, pp. 223-225, May 1999.
  147. M.M. Turner and M.A. Lieberman, "Hysteresis and the E to H Transition in Radiofrequency Inductive Discharges," Plasma Sources Science and Technology, vol. 8, pages 313-324, June 1999.
  148. Emi Kawamura, V. Vahedi, M.A. Lieberman, and C.K. Birdsall "Ion Energy Distributions in RF Sheaths; Review, Analysis, and Simulation", Plasma Sources Science and Technology, vol. 8, no. 3, pp. R45-R64, August 1999.
  149. I.G. Kouznetsov, A.J. Lichtenberg, and M.A. Lieberman "Internal Sheaths in Electronegative Discharges", Journal of Applied Physics, vol. 86, no. 3, pp. 4142-4153, October 15, 1999.
  150. M.A. Lieberman, A.J. Lichtenberg, and A.M. Marakhtanov, "Instabilities in Low Pressure Inductive Discharges with Attaching Gases," Applied Physics Letters vol. 75, no. 23, pp. 3617-3619, 6 December 1999.
  151. M.A. Lieberman, "Plasma Discharges for Materials Processing and Display Applications," in Advanced Technologies Based on Wave and Beam Generated Plasmas, ed. by H. Schluter and A. Shivarova, NATO Science Series 3: High Technology, vol. 67, pp. 1-22, 1999.
  152. A.J. Lichtenberg, M.A. Lieberman, I.G. Kouznetsov, and T.H. Chung, "Transitions and Scaling Laws for Electronegative Discharge Models," Plasma Sources Science and Technology, vol. 9, no. 1, pp. 45-56, February 2000.
  153. M.A. Lieberman, "Fundamentals of Plasmas and Sheaths", Chapter 2 in Handbook of Plasma Immersion Ion Implantation and Deposition, Andre Anders, editor, John Wiley and Sons, New York, 2000.
  154. Yaoxi Wu and M.A. Lieberman, "The Influence of Antenna Configuration and Standing Wave Effects on Density Profile in a Large Area Inductive Plasma Source," Plasma Sources Science and Technology, vol. 9, no. 2, pp. 210-218, May 2000.
  155. J.T. Gudmundsson, A.M. Marakhtanov, K.K. Patel, V.P. Gopinath, and M.A. Lieberman, "On the Plasma Parameters of a Planar Inductive Oxygen Discharge," J. Phys. D: Applied Physics, vol. 33, no. 11, pp. 1323-1331, 7 June 2000.
  156. A.J. Lichtenberg and M.A. Lieberman, "Modeling a Metal-Vapor Buffer-Gas Hollow Cathode Discharge," Journal of Applied Physics, vol. 87, no. 10, pp. 7191-7197, May 15, 2000.
  157. C. Charles, A.W. Degeling, T.E. Sheridan, J.H. Harris, M.A. Lieberman, and R.W. Boswell, "Absolute Measurements of Radiofrequency Fields Using a Retarding Field Energy Analyzer," The Physics of Plasmas, vol.7, no. 12, pp. 5232-4, Dec. 2000.
  158. G. Gozadinos, D. Vender, M.M. Turner, and M.A. Lieberman, "Collisionless Electron Heating by Capacitive Radio Frequency Sheaths," Plasma Sources Science and Technology, vol. 10, no. 2, pp. 117-124, May 2001.
  159. J. T. Gudmundsson, A. M. Marakhtanov, K. K. Patel, V. P. Gopinath and M. A. Lieberman, A reply to a comment on: "On the Plasma Parameters of a Planar Inductive Oxygen Discharge", Journal of Physics D: Applied Physics, vol. 33, pp. 3010-3012 (2000)
  160. K.L. Scott, T.-J. King, M.A. Lieberman and K.-N. Leung, "Pattern Generators and Microcolumns for Ion Beam Lithography," J. Vac. Sci. Technol. B vol. 18, no. 6, pp. 3172-3176, Nov/Dec 2000.
  161. K. Takechi and M.A. Lieberman, "Photoresist Etching in an Inductively Coupled, Traveling Wave Driven, Large Area Plasma Source," Journal of Applied Physics, vol. 89, no. 2, pp. 869-877, January 15, 2001.
  162. J.T. Gudmundsson, I.G. Kouznetsov, K.K. Patel, and M.A. Lieberman, "Electronegativity of Low Pressure High Density Oxygen Discharges," Journal of Physics D: Applied Physics vol. 34, pp. 1100-1109 (March 2001).
  163. P. Chabert, A.J. Lichtenberg, M.A. Lieberman and A.M. Marakhtanov, "Instabilities in Low-Pressure Electronegative Inductive Discharges," Plasma Sources Science and Technology, vol. 10, pp. 478-489, 2001.
  164. K. Takechi and M.A. Lieberman, Effect of Ion Energy on Photoresist Etching in an Inductively Coupled, Traveling Wave Driven, Large Area Plasma Source," Journal of Applied Physics, vol. 89, no. 10, pp. 5318-5321, 15 May 2001.
  165. T. Kimura, A.J. Lichtenberg, and M.A. Lieberman, "Modeling Two Dimensional Electronegative Discharges," Plasma Sources Science and Technology, vol. 10, pp. 430-439, 2001.
  166. K. Takechi and M.A. Lieberman, "Effect of Argon Addition to an O2 Plasma in an Inductively Coupled, Traveling Wave Driven, Large Area Plasma Source: O2/Ar Mixture Plasma Modeling and Photoresist Etching" Journal of Applied Physics, vol. 90, no. 7, pp. 3205-3211, October 2001.
  167. M.A. Lieberman, J.P. Booth, P. Chabert, J.M. Rax, and M.M. Turner, "Standing Wave and Skin Effects in Large Area, High Frequency, Capacitive Discharges," Plasma Sources Science and Technology, vol. 11, no. 3, pp. 283-293, August 2002.
  168. Suwon Cho and M.A. Lieberman, "Local and Global Particle and Power Balance in Large Area Capacitive Discharges," Plasma Sources Science and Technology, vol. 12, no. 2, pp. 244-254, May 2003.
  169. Suwon Cho and M.A. Lieberman, "Self-Consistent Discharge Characteristics of Collisional Helicon Plasmas," Physics of Plasmas, vol. 10, no. 3, pp. 882-890, March 2003.
  170. P. Chabert, H. Abada, J.-P. Booth, and M.A. Lieberman, "Radical Dynamics in Unstable CF4 Inductive Discharges," Journal of Applied Physics, vol. 94, no. 1, pp. 76-84, July 2003.
  171. P. Chabert, A.J. Lichtenberg, M.A. Lieberman, and A.M. Marakhtanov, "Dynamics of Steady and Unsteady Operation of Inductive Discharges with Attaching Gases," Journal of Applied Physics, vol. 94, no. 2, pp. 831-843, July 2003.
  172. C. Charles, R.W. Boswell, and M.A. Lieberman, "Energy Balance in a Low Pressure Capacitive Discharge Driven by a Double-Saddle Antenna," Physics of Plasmas, vol. 10, no. 3, pp. 891-899, April 2003.
  173. A.M. Marakhtanov, M. Tuszewski, M.A. Lieberman, A.J. Lichtenberg, and P. Chabert, "Stable and Unstable Behavior of Inductively Coupled Electronegative Discharges," Journal of Vacuum Science and Technology, vol. A21, no. 6, pp. 1849-64, Nov/Dec 2003.
  174. M.A. Lieberman, "The Dynamics of Fermi Acceleration: From Cosmic Rays to Discharge Heating," Chapter 3 in Nonlinear Dynamics: From Lasers to Butterflies, ed. by R. Ball, World Scientific, Singapore, pp. 115-164, 2003.
  175. P. Chabert, J.L. Raimbault, J.M. Rax, and M.A. Lieberman, "Self-Consistent Nonlinear Transmission Line Model of Standing Wave Effects in a Capacitive Discharge," Physics of Plasmas, vol. 11, no. 5, pp. 1775-85, May 2004.
  176. M.A. Lieberman and A.J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, Second Edition, John Wiley and Sons, New York, April, 2005, 757 pages.
  177. P. Chabert, J.L. Raimbault, P. Levif, J.M. Rax, and M.A. Lieberman, "Inductive Heating and E to H Transitions in Capacitive Discharges," Physical Review Letters, vol. 95, no. 20, pp. 205001-04, 11 November 2005.
  178. A. Aanesland, C. Charles, R.W. Boswell, and M.A. Lieberman, "Grounded Radio-Frequency Electrodes in Contact with High Density Plasmas," Physics of Plasmas, vol. 12, pp. 13505-11, November 2005.
  179. M.A. Lieberman, A.J. Lichtenberg, Sungjin Kim, J.T. Gudmundsson, D.L. Keil, and Jisoo Kim, "Plasma Ignition in a Grounded Chamber Connected to a Capacitive Discharge," Plasma Sources: Science and Technology vol. 15, pp. 276-287, March 2006.
  180. P. Chabert, J.-L. Raimbault, P. Levif, J.-M. Rax, and M.A. Lieberman, "Inductive Heating and E to H Transitions in High Frequency Capacitive Discharges," Plasma Sources: Science and Technology vol. 15, pp. S130-S136, April 2006.
  181. M.A. Lieberman and C. Charles, "A Theory For Formation of a Low Pressure, Current-Free Double Layer," Physical Review Letters, vol. 97, no. 4, pp. 045003, 28 July 2006.
  182. Sungjin Kim, M.A. Lieberman, A.J. Lichtenberg, and J.T. Gudmundsson, "Improved Volume-Averaged Model for Steady and Pulsed-Power Electronegative Discharges," Journal of Vacuum Science and Technology A, vol. 24, pp. 2025-2040, Nov/Dec 2006.
  183. M.A. Lieberman, C. Charles, and R.W. Boswell, "A Theory for Formation of a Low Pressure, Current-Free Double Layer," Journal of Physics D: Applied Physics, vol. 39, pp. 3294-3304, July 2006.
  184. Emi Kawamura, M.A. Lieberman, and A.J. Lichtenberg, "Stochastic Heating in Single and Dual Frequency Capacitive Discharges," Physics of Plasmas, vol. 13, p. 053506 1-14, May 2006.
  185. Sungjin Kim, Zhuwen Zhou, M.A. Lieberman, and A.J. Lichtenberg, "Relaxation Oscillations in a Capacitive Discharge Chamber Connnected to a Peripheral Grounded Chamber," Journal of Applied Physics, vol. 100, pp. 1033021-9, Nov. 2006.
  186. Zhuwen Zhou, M.A. Lieberman, and Sungjin Kim, "Instability Parameters of Optical Oscillation Frequency in Plasma Central Discharge and Periphery Region," Chinese Physics Letters, vol. 23, pp. 2251-2254, 2006.
  187. P. Chabert, P. Levif, J.-L. Raimbault, J.-M. Rax, M.M. Turner, and M.A. Lieberman, "Electron Heating in Multiple-Frequency Capacitive Discharges," Plasma Physics and Controlled Fusion, vol. 48, pp. B2321-B237, November 2006.
  188. A. Aanesland, C. Charles, M.A. Lieberman, and R.W. Boswell, "Upstream Ionization Instability Associated with a Current-Free Double Layer," Physical Review Letters, vol. 97, pp. 75003-6, August 18, 2006.
  189. A. Aanesland, M.A. Lieberman, C. Charles, and R.W. Boswell, "Experiments and Theory of an Upstream Ionization Instability Excited by an Accelerated Electron Beam Through a Current-Free Double Layer," The Physics of Plasmas, vol. 13, pp. 1221011-10, 2006.
  190. C. Charles, R.W. Boswell, and M.A. Lieberman, "Xenon Ion Beam Characterization in a Helicon Double Layer Thruster," Applied Physics Letters, vol. 89, pp. 261503-5, 2006.
  191. Alan Wu, M.A. Lieberman, and J.P. Verboncoeur, "A Model for Computing Ion Energy Distributions in Multi-Frequency Capacitive Discharges," Journal of Applied Physics, vol. 101, pp. 056105-7, 2007.
  192. Zhu-Wen Zhou, M.A. Lieberman, and Sungjin Kim, "Review of Relaxation Oscillations in Plasma Processing Discharges," Chinese Physics, vol. 16, pp. 758-765, March 2007.
  193. E. Kawamura, M.A. Lieberman, A.J. Lichtenberg, and E.A. Hudson, "Capacitive Discharges Driven by Combined DC/RF Sources," Journal of Vacuum Science and Technology A, vol. 25, pp. 1456-1474, Sep/Oct 2007.
  194. P. Chabert, A.J. Lichtenberg, and M.A. Lieberman, "Theory of a Double-Layer in an Expanding Electronegative Plasma," The Physics of Plasmas, vol. 14, pp. 093502-1/11, Sep 2007.
  195. Insook Lee, D.B. Graves, and M.A. Lieberman "Modeling Electromagnetic Effects in Capacitive Discharges," Plasma Sources Science and Technology, vol. 17, p. 015018 (16pp), Feb. 2008.
  196. M.A. Lieberman, A.J. Lichtenberg, E. Kawamura, Thomas Mussenbrock, and Ralf Peter Brinkmann, "The Effects of Nonlinear Series Resonance on Ohmic and Stochastic Heating in Capacitive Discharges," Physics of Plasmas, vol. 15, pp. 061505/1-9, June 2008.
  197. E. Kawamura, A.J. Lichtenberg, and M.A. Lieberman "Secondary Electrons in RF and DC/RF Capacitive Discharges," Plasma Sources Science and Technology, vol. 17, 045002 (11pp), 2008.
  198. M.A. Lieberman, "The Langmuir Isotherm and the Standard Model of Ion-Assisted Etching," Plasma Sources Science and Technology, vol. 18, 014002 (5pp), 2009.
  199. T. Mussenbrock, R.P. Brinkmann, M.A. Lieberman, A.J. Lichtenberg, and E. Kawamura, "Enhancement of Ohmic and Stochastic Heating by Resonance Effects in Capacitive Radio-Frequency Discharges: A Theoretical Approach," Physical Review Letters, vol. 101, 085004 (4pp), 2008.
  200. G. Leray, P. Chabert, A.J. Lichtenberg and M.A. Lieberman, "Fluid Model of an Electronegative Discharge with Magnetized Electrons and Unmagnetized Ions," Journal of Physics D: Applied Physics, vol. 42, 194020, October 2009.
  201. E. Kawamura, A.J. Lichtenberg and M.A. Lieberman, "Double Layer Formation in a Two-Region Electronegative Plasma," Physics of Plasmas, vol. 16, 122114, December 2009.
  202. K. Takahashi, C. Charles, R. Boswell, M.A. Lieberman, and R. Hatakeyama, "Characterization of the Temperature of Free Electrons Diffusing from a Magnetically Expanding Current-Free Double Layer Plasma," Journal of Physics D: Applied Physics, vol. 43, 162001, April 2010.
  203. E. Kawamura, A.J. Lichtenberg, and M.A. Lieberman, "Waves in expanding electronegative plasmas containing double layers," Journal of Applied Physics, vol. 107, 123301, June 15 2010.
  204. M.A. Lieberman and A.J. Lichtenberg, "Electron heating of voltage-driven and matched dual frequency discharges," Plasma Sources Science and Technology, vol. 19, 065006, December 2010.
  205. E. Kawamura, A.J. Lichtenberg, and M.A. Lieberman, "Two-dimensional particle-in-cell simulations of transport in a magnetized electronegative plasma," Journal of Applied Physics, vol. 108, 103305, November 15 2010.
  206. Qing Li, Yi-Kang Pu, M.A. Lieberman, and D.J. Economou, "Dynamic Model of Streamer Coupling for Homogeneity of Glowlike Dielectric Barrier Discharges," Physical Review E, vol. 83, 046405, April 2011.
  207. E. Kawamura, D.B. Graves, and M.A. Lieberman, "Fast 2D Hybrid Fluid-Analytical Simulation of Inductive/Capacitive Discharges," Plasma Sources Science and Technology, vol. 20, 035009, June 2011.
  208. J.T. Gudmundsson and M.A. Lieberman, "On the Ar+ and Xe+ Velocities Near the Presheath-Sheath Boundary in a Ar/Xe Discharge," Physical Review Letters, volume 107, 045002, July 2011.
  209. Ying Wang, M.A. Lieberman, Alan Wu, and J.P. Verboncoeur, "Verification of Collisionless Sheath Model of Capacitive RF Discharges by Particle-in-Cell Simulations," Journal of Applied Physics, volume 110, 033307, August 2011.
  210. C. Lazzaroni, P. Chabert, M.A. Lieberman, A.J. Lichtenberg, and A. Leblanc, "Analytical-numerical global model of atmospheric-pressure radio-frequency capacitive discharges," Plasma Sources Science and Technology volume 21, 035013 (2012)
  211. E. Kawamura, A.J. Lichtenberg and M.A. Lieberman, "Electronegative plasma equilibria with spatially varying ionization", Journal of Physics D: Applied Physics volume 45, 495204 (2012).
  212. E. Kawamura, M.A. Lieberman, A.J. Lichtenberg and D.B. Graves, "Two-dimensional simulation of inductive-capacitive transition instability in an electronegative plasma", Plasma Sources Science and Technology, volume 21, 045014 (2012).
  213. C. Lazzaroni, M.A. Lieberman, A.J. Lichtenberg and P. Chabert, "Comparison of a hybrid model to a global model of atmospheric pressure radio-frequency discharges", Journal of Physics D: Applied Physics volume 45, 495204 (2012)
  214. J.T. Gudmundsson, E. Kawamura, and M.A. Lieberman, "A benchmark study of a capacitively coupled oxygen discharge of the oopd1 particle-in-cell Monte Carlo code," Plasma Sources Science and Technology volume 22, 035011 (2013)
  215. E. Kawamura, M.A. Lieberman, and A.J. Lichtenberg, "Narrow gap electronegative capacitive discharges," Physics of Plasmas volume 20, 101603 (2013)