PUBLICATIONS
Jeffrey Bokor

  1. Bischel, W. K., Bokor, J., Dallarosa, J., and Rhodes, C. K. "ArF laser photolysis of OCSe. II. Effect of vibrational excitation on Se(1S) quantum yields," J. Chem. Phys. 70 (12), 5593-5597, 1979. Full text pdf

  2. Bischel, W. K., Bokor, J., Kligler, D. J., and Rhodes, C. K. "Nonlinear optical processes in atoms and molecules using rare-gas halide lasers," IEEE J. Quantum Electron. QE-15 (5), 380-392, 1979. Full text pdf

  3. Bokor, J., Bischel, W. K., and Rhodes, C. K. "Doppler-free spectroscopy of the v2 band in 14NH3: Application to 16-µm generation," J. Appl. Phys. 50 (7), 4541-4544, 1979. Full text pdf

  4. Eggleston, J., Dallarosa, J., Bischel, W. K., Bokor, J., and Rhodes, C. K. "Generation of 16-µm radiation in 14NH3 by two-quantum excitation of the 2v–2 (7,5) state," J. Appl. Phys. 50 (6), 3867-3870, 1979. Full text pdf

  5. Bokor, J. and Rhodes, C. K. "Energy splitting between the B and C states of xenon chloride," J. Chem. Phys. 73 (6), 2626-2628, 1980. Full text pdf

  6. Bokor, J., Zavelovich, J., and Rhodes, C. K. "Isotope effect in multiphoton ultraviolet photolysis of CO," J. Chem. Phys. 72 (2), 965-971, 1980. Full text pdf

  7. Bokor, J., Zavelovich, J., and Rhodes, C. K. "Multiphoton ultraviolet spectroscopy of some 6p levels in krypton," Phys. Rev. A21 (5), 1453-1459, 1980. Full text pdf

  8. Egger, H., Hawkins, R. T., Bokor, J., Pummer, H., Rothschild, M., and Rhodes, C. K. "Generation of high-spectral-brightness tunable XUV radiation at 83 nm," Opt. Lett. 5 (7), 282-284, 1980. Full text pdf

  9. Hawkins, R. T., Egger, H., Bokor, J., and Rhodes, C. K. "A tunable, ultrahigh spectral brightness KrF* excimer laser source," Appl. Phys. Lett. 36 (6), 391-392, 1980. Full text pdf

  10. Kligler, D. J., Bokor, J., and Rhodes, C. K. "Collisional and radiative properties of the H2 E,F 1SIGMA9 state," Phys. Rev. A21 (2), 607-617, 1980. Full text pdf

  11. Bokor, J., Freeman, R. R., Panock, R. L., and White, J. C. "Generation of high-brightness coherent radiation in the vacuum ultraviolet by four-wave parametric oscillation in mercury vapor," Opt. Lett. 6 (4), 182-184, 1981. Full text pdf

  12. Bokor, J., Freeman, R. R., White, J. C., and Storz, R. H. "Two-photon excitation of the n = 3 level in H and D atoms," Phys. Rev. A24 (1), 612-614, 1981. Full text pdf

  13. Rothschild, M., Egger, H., Hawkins, R. T., Bokor, J., Pummer, H., and Rhodes, C. K. "High-resolution spectroscopy of molecular hydrogen in the extreme ultraviolet region," Phys. Rev. A23 (1), 206-213, 1981. Full text pdf

  14. White, J. C., Bokor, J., Freeman, R. R., and Henderson, D. "Tunable ArF* excimer-laser source," Opt. Lett. 6 (6), 293-294, 1981. Full text pdf

  15. Bokor, J., Freeman, R. R., and Cooke, W. E. "Autoionization-pumped laser," Phys. Rev. Lett. 48 (18), 1242-1245, 1982. Full text pdf

  16. Bucksbaum, P. H., Bokor, J., Storz, R. H., and White, J. C. "Amplification of ultrashort pulses in krypton fluoride at 248 nm," Opt. Lett. 7 (9), 399-401, 1982. Full text pdf

  17. Bucksbaum, P. H., Bokor, J., Storz, R. H., White, J. C., and Auston, D. H. "Generation and pulsewidth measurement of amplified ultrashort ultraviolet laser pulses in krypton fluoride." In K B. Eisenthal, R. M. Hochstrasser, W. Kaiser, and A. Laubereau (eds.), Picosecond Phenomena III, New York: Springer-Verlag, 1982, p. 130-133.

  18. Freeman, R. R., Bokor, J., and Cooke, W. E. "Four-wave parametric mixing in optically inverted barium ions," Phys. Rev. A26 (5) 3029-3030, 1982. Full text pdf

  19. Heaven, M., Miller, T. A., Freeman, R. R., White, J. C., and Bokor, J. "Two-photon absorption, laser-induced fluorescence detection of Cl atoms," Chem. Phys. Lett. 86 (5, 6), 458-462, 1982. Full text pdf

  20. White, J. C., Bokor, J., and Henderson, D. "Optically pumped atomic thulium lasers," IEEE J. Quantum Electron. QE-18 (3), 320-322, 1982. Full text pdf

  21. Bokor, J., Bucksbaum, P. H., and Freeman, R. R. "Generation of 35.5-nm coherent radiation," Opt. Lett. 8 (4), 217-219, 1983. Full text pdf

  22. Bokor, J., Bucksbaum, P. H., and Freeman, R. R. "Generation of 35.5 nm coherent radiation." In H. P. Weber and W. Luthy (eds.), Laser Spectroscopy VI, New York: Springer-Verlag, 1983, p. 382-384.

  23. Bokor, J., Eichner, L., Storz, R. H., Bucksbaum, P. H., and Freeman, R. R. "Wavelength conversion with excimer lasers." In C. K. Rhodes, H. Egger, and H. Pummer (eds.), Excimer Lasers-1983, New York: American Institute of Physics, 1983. p. 143-150.

  24. Falcone, R. W. and Bokor, J. "Dichroic beam splitter for extreme-ultraviolet and visible radiation," Opt. Lett. 8 (1), 21-23, 1983. Full text pdf

  25. Freeman, R. R., Jopson, R. M., Bokor, J., and Cooke, W. E. "Planetary atoms." In H. P. Weber and W. Luthy (eds.), Laser Spectroscopy VI, New York: Springer-Verlag, 1983, p. 220-223.

  26. Jopson, R. M., Darack, S., Freeman, R. R., and Bokor, J. "Laser-plasma-induced extreme-ultraviolet radiation from liquid mercury," Opt. Lett 8 (5), 265-267, 1983. Full text pdf

  27. Jopson, R. M., Freeman, R. R., Cooke, W. E., and Bokor, J. "Electron shake-up in two-photon excitation of core electrons of Rydberg autoionizing states," Phys. Rev. Lett. 51 (18), 1640-1643, 1983. Full text pdf

  28. Bloomfield, L. A., Freeman, R. R., Cooke, W. E., and Bokor, J. "Angular momentum dependence of autoionization rates in doubly excited Rydberg states of Ba," Phys. Rev. Lett. 53 (23), 2234-2237, 1984. Full text pdf

  29. Bucksbaum, P. H. and Bokor, J. "Measurement of ultrafast melting and regrowth velocities in pulsed laser heated silicon." In J. C. C. Fan and N. M. Johnson (eds.), Energy Beam-Solid Interactions and Transient Thermal Processing, New York: Elsevier, 1984, p. 93-98.

  30. Bucksbaum, P. H. and Bokor, J. "Rapid melting and regrowth velocities in silicon heated by ultraviolet picosecond laser pulses," Phys. Rev. Lett. 53 (2), 182-185, 1984. Full text pdf

  31. Cooke, W. E., Jopson, R. M., Bloomfield, L A., Freeman, R. R., and Bokor, J. "Correlations in highly excited two-electron atoms: Planetary behavior." In S. E. Harris and T. B. Lucatorto (eds.), Laser Techniques in the Extreme Ultraviolet, New York: American Institute of Physics, 1984, p. 91-100.

  32. Haight, R., Bokor, J., Storz, R. H., Stark, J., Freeman, R. R., and Bucksbaum, P. H. "Ultraviolet photoemission studies of surfaces using picosecond pulses of coherent XUV radiation." In D. H. Auston and K. B. Eisenthal (eds.), Ultrafast Phenomena IV, New York: Springer-Verlag, 1984, p. 413-416.

  33. Jopson, R. M., Freeman, R. R., Cooke, W. E., and Bokor, J. "Two-photon spectroscopy of 7sn´d autoionizing states of barium." Phys. Rev. A29 (6), 3154-3158, 1984. Full text pdf

  34. Bokor, J., Haight, R., Freeman, R. R., and Bucksbaum, P. H. "Picosecond time-resolved photoemission spectroscopy of semiconductor surfaces." In T. W. Hansch and Y. R. Shen (eds.), Laser Spectroscopy VII, New York: Springer-Verlag, 1985, p. 340-343.

  35. Bokor, J., Haight, R., Stark, J., Storz, R. H., Freeman, R. R., and Bucksbaum, P. H. "Picosecond time resolved photoemission study of the InP(110) surface." In G. A. Mourou, D. M. Bloom, and C.-H. Lee (eds.), Picosecond Electronics and Optoelectronics, New York: Springer-Verlag, 1985, p. 94-96.

  36. Bokor, J., Haight, R., Storz, R. H., Stark, J., Freeman, R. R., and Bucksbaum, P. H. "Time- and angle-resolved photoemission study of InP(110)," Phys. Rev. B32 (6), 3669-3675, 1985. Full text pdf

  37. Freeman, R. R., Bloomfield, L. A., Bokor, J., and Cooke, W. E. "Laser investigations of electron correlations: Doubly excited states of Ba." In T. W. Hansch and Y. R. Shen (eds.), Laser Spectroscopy VII, New York: Springer-Verlag, 1985, p. 77-80.

  38. Haight, R., Bokor, J., Stark, J., Storz, R. H., Freeman, R. R., and Bucksbaum, P. H. "Picosecond time-resolved photoemission study of the InP(110) surface," Phys. Rev. Lett. 54 (12), 1302-1305, 1985. Full text pdf

  39. Thompson, M. O., Bucksbaum, P. H., and Bokor, J. "Relation between temperature and solidification velocity in rapidly cooled liquid silicon." In D. K. Biegelson, G. A. Rozgonyi, and C. V. Shank (eds.), Energy Beam-Solid Interactions and Transient Thermal Processing 1984, Pittsburgh, PA: Materials Research Society, 1985, p. 181-186.

  40. Attwood, D. T. and Bokor, J. (eds.), Short Wavelength Coherent Radiation: Generation and Applications, New York: American Institute of Physics, 1986.

  41. Bokor, J., Johnson, A. M., Storz, R. H., and Simpson, W. M. "High-speed circuit measurements using photoemission sampling," Appl. Phys. Lett. 49 (4), 226-228, 1986. Full text pdf

  42. Bokor, J., Johnson, A. M., Storz, R. H., and Simpson, W. M. "High-speed circuit measurements using photoemission sampling." In G. R. Fleming and A. E. Siegman (eds.), Ultrafast Phenomena V, New York: Springer-Verlag, 1986, p. 123-126.

  43. Bokor, J., Storz, R., Freeman, R. R., and Bucksbaum, P. H. "Picosecond surface electron dynamics on photoexcited Si(111)2×1 surfaces," Phys. Rev. Lett. 57 (7), 881-884, 1986. Full text pdf

  44. Haight, R. and Bokor, J. "Direct observation of adsorbate-induced band-gap states on GaAs(100)," Phys. Rev. Lett. 56 (26), 2846-2849, 1986. Full text pdf

  45. Haight, R., Bokor, J., Freeman, R. R., and Bucksbaum, P. H. "Time and angle resolved ultraviolet photoemission spectroscopy studies of single crystal surface and interfaces," J. Vac. Sci. Technol. A 4(3), 1481-1486, 1986. Full text pdf

  46. Bokor, J., Johnson, A. M., Simpson, W. M., Storz, R. H., and Smith, P. R. "Coplanar vacuum photodiode for measurement of short-wavelength picosecond pulses," Appl. Phys. Lett. 53 (26), 2599-2601, 1988. Full text pdf

  47. Tang, S. L., Bokor, J., and Storz, R. H. "Direct force measurement in scanning tunneling microscopy," Appl. Phys. Lett. 52 (3), 188-190, 1988. Full text pdf

  48. Bokor, J. "Ultrafast dynamics at semiconductor and metal surfaces," Science 246 (4934), 1130-1134, 1989. Full text pdf

  49. Bokor, J. and Halas, N. J. "Time-resolved study of silicon surface recombination," IEEE J. Quantum Electron. 25(12), 2550-2555, 1989. Full text pdf

  50. Halas, N. J. and Bokor, J. "Surface recombination of the Si(111)2×1 surface," Phys. Rev. Lett. 62 (14), 1679-1682, 1989. Full text pdf

  51. Bjorkholm, J. E., Bokor, J., Eichner, L., Freeman, R. R., Gregus, J., Jewell, T. E., Mansfield, W. M., MacDowell, A. A., Raab, E. L., Silfvast, W. T., Szeto, L. H., Tennant, D. M., Waskiewicz, W. K., White, D. L., Windt, D., Wood, O. R. II, and Bruning, J. H. "Reduction imaging at 14 nm using multilayer-coated optics: Printing of features smaller than 0.1 µm," J. Vac. Sci. Technol. B 8(6), 1509-1513, 1990. Full text pdf

  52. Jewell, T. E., Becker, M. M., Bjorkholm, J. E., Bokor, J., Eichner, L., Freeman, R. R., Mansfield, W. M., MacDowell, A. A., O'Malley, M. L., Raab, E. L., Silfvast, W. T., Szeto, L. H., Tennant, D. M., Waskiewicz, W. K., White, D. L., Wood, O. R. II. "20:1 projection soft X-ray lithography using tri-level resist," Proc. SPIE, San Diego, CA, June 1990.

  53. White, D. L., Becker, M., Bokor, J., Bjorkholm, J. E., Eichner, L., Freeman, R. R., Jewell, T. E., Mansfield, W. M., MacDowell, A. A., O'Malley, M. L., Raab, E. L., Silfvast, W. T., Szeto, L. H., Tennant, D. M., Waskiewicz, W. K., Windt, D. L., and Wood, O. R. II. "Soft X-ray projection lithography: Developing a practical printer," Proc. SPIE, San Diego, CA, June 1990.

  54. White, D. L., Becker, M., Bokor, J., Bjorkholm, J. E., Eichner, L., Freeman, R. R., Jewell, T. E., Mansfield, W. M., MacDowell, A. A., O'Malley, M. L., Raab, E. L., Silfvast, W. T., Szeto, L. H., Tennant, D. M., Waskiewicz, W. K., Windt, D. L., and Wood, O. R. II. "Soft X-ray projection lithography with 20× reduction and 0.1 mm resolution," Proc. SPIE, San Diego, CA, June 1990.

  55. Bjorkholm, J. E., Bokor, J., Eichner, L., Freeman, R. R., Gregus, J., Jewell, T. E., Mansfield, W. M., MacDowell, A. A., O'Malley, M. L, Raab, E. L., Silfvast, W. T., Szeto, L. H., Tennant, D. M., Waskiewicz, W. K., White, D. L., Windt, D. L., and Wood, O. R. II. "Experiments in projection lithography using soft X-rays," Microelectronic Eng. 13 (1-4), 243-250, 1991. Abstract html

  56. Fann, W. S., Storz, R., and Bokor, J. "Observation of above-threshold multiphoton photoelectric emission from image-potential surface states," Phys. Rev. B44 (19), 10980-10982, 1991. Full text pdf

  57. Kubiak, G. D., Tichenor, D. A., Malinowski, M. E., Stulen, R. H., Haney, S. J., Berger, K. W., Brown L. A., Bjorkholm, J. E., Freeman, R. R., Mansfield, W. M., Tennant, D. M., Wood, O. R. II, Bokor, J., Jewell, T. E., White, D. L., Windt, D. L., and Waskiewicz, W. K. "Diffraction-limited soft X-ray projection lithography with a laser plasma source," J. Vac. Sci. Technol. B 9(6), 3184-3188, 1991. Full text pdf

  58. MacDowell, A. A., Bjorkholm, J. E., Bokor, J., Eichner, L., Freeman, R. R., Mansfield, W. M., Pastalan, J., Szeto, L. H., Tennant, D. M., Wood, O. R. II, Jewell, T. E., Waskiewicz, W. K., White, D. L., Windt, D. L., Silfvast, W. T., and Zernike, F. "Soft X-ray projection lithography using a 1:1 ring field optical system," J. Vac. Sci. Technol. B 9(6), 3193-3197, 1991. Full text pdf

  59. Mohideen, U., Tom, H. W. K., Freeman, R. R., Bokor, J., and Bucksbaum, P. H. "Nonlinear Compton scattering in a pulsed focused laser beam." In P. H. Bucksbaum and N. Ceglio (eds.), Short-Wavelength Coherent Radiation,
  60. Murnane, M., Kapteyn, H., Falcone, R., Gaylord, T., Glytsis, E., Gnall, R. P., Mansfield, W. M., and Bokor, J. "Efficient coupling of high-intensity sub-picosecond laser pulses into solid grating targets." In P. H. Bucksbaum and N. Ceglio (eds.), Short-Wavelength Coherent Radiation, Washington, D.C.: Optical Society of America, 1991.

  61. Tichenor, D. A., Kubiak, G. D., Malinowski, M. E., Stulen, R. H., Haney, S. J., Berger, K. W., Brown, L. A., Freeman, R. R., Mansfield, W. M., Wood, O. R. II, Tennant, D. M., Bjorkholm, J. E., MacDowell, A. A., Bokor, J., Jewell, T. E., White, D. L., Windt, D. L., and Waskiewicz, W. K. "Diffraction-limited soft x-ray projection imaging using a laser plasma source," Opt. Lett. 16 (20), 1557-1559, 1991. Full text pdf

  62. Tom, H. W. K., Sher, M. H., Wood, O. R. II, Mansfield, W. M., Mohideen, U., Freeman, R. R., and Bokor, J. "High damage threshold gratings using coated silicon substrates." In P. H. Bucksbaum and N. Ceglio (eds.), Short-Wavelength Coherent Radiation, Washington, D.C.: Optical Society of America, 1991.

  63. White, D. L., Bjorkholm, J. E., Bokor, J., Eichner, L., Freeman, R. R., Jewell, T. E., Mansfield, W. M., MacDowell, A. A., Szeto, L. H., Taylor, D. W., Tennant, D. M., Waskiewicz, W. K., Windt, D. L., and Wood, O. R. II. "Soft X-ray projection lithography," Solid State Technology 34 (7), 37-42, 1991. Text pdf

  64. Wood, O. R. II, Bjorkholm, J. E., Bokor, J., Eichner, L., Freeman, R. R., Jewell, T. E., Mansfield, W. M., MacDowell, A. A., Szeto, L. H., Tennant, D. M., Waskiewicz, W. K., White, D. L., Windt, D. L., and Bruning, J. H. "High resolution soft-X-ray projection imaging." In J. Bokor (ed.), Soft-X-Ray Projection Lithography, Washington, D.C.: Optical Society of America, 1991.

  65. Bokor, J. and Haight, R. "Multiphoton photoemission." In S. Kevan (ed.), Angle-Resolved Photoemission, Amsterdam: Elsevier, 1992.

  66. Fann, W. S., Storz, R., Tom, H. W. K., and Bokor, J. "Direct measurement of nonequilibrium electron-energy distributions in subpicosecond laser-heated gold films," Phys. Rev. Lett. 68 (18), 2834-2837, 1992. Full text pdf

  67. Fann, W. S., Storz, R., Tom, H. W. K., and Bokor, J. "Electron thermalization in gold," Phys. Rev. B46 (20), 13592-13595, 1992. Full text pdf

  68. MacDowell, A. A., Bjorkholm, J. E., Bokor, J., Eichner, L., Freeman, R. R., Pastalan, J., Silfvast, W. T., Szeto, L. H., Tennant, D. M., Wood, O. R. II, Jewell, T. E., Mansfield, W. M., Waskiewicz, W. K., White, D. L., and Windt, D. L. "Reduction imaging with soft X rays for projection lithography," Rev. Sci. Instrum. 63 (1), 737-740, 1992. Full text pdf

  69. Mohideen, U., Tom, H. W. K., Freeman, R. R., Bokor, J., and Bucksbaum, P. H. "Interaction of free electrons with an intense focused laser pulse in Gaussian and conical axicon geometries," J. Opt. Soc. Am. B 9Full text pdf

  70. Park, B. G., Bokor, J., Luftman, H. S., Rafferty, C. S., and Pinto, M. R. "Ultrashallow junctions for ULSI using As+2 implantation and rapid thermal anneal," IEEE Electron Device Lett. 13 (10), 507-509, 1992. Full text pdf

  71. Yan, R. H., Lee, K. F., Jeon, D. Y., Kim, Y. O., Park, B. G., Pinto, M. R., Rafferty, C. S., Tennant, D. M., Westerwick, E. H., Chin, G. M., Morris, M. D., Early, K., Mulgrew, P., Mansfield, W. M., Watts, R. K., Voshchenkov, A. M., Bokor, J., Swartz, R. G., and Ourmazd, A. "High performance 0.1-µm room temperature Si MOSFETs," 1992 Symposium on VLSI Technology Digest of Technical Papers, p. 86-87, 1992. Full text pdf

  72. Yan, R.-H., Lee, K. F., Jeon, D. Y., Kim, Y. O., Park, B. G., Pinto, M. R., Rafferty, C. S., Tennant, D. M., Westerwick, E. H., Chin, G. M., Morris, M. D., Early, K., Mulgrew, P., Mansfield, W. M., Watts, R. K., Voshchenkov, A. M., Bokor, J., Swartz, R. G., and Ourmazd, A. "89-GHz room-temperature silicon MOSFET's," IEEE Electron Device Lett. 13 (5), 256-258, 1992. Full text pdf

  73. Attwood, D., Sommargren, G., Beguiristain, R., Nguyen, K., Bokor, J., Ceglio, N., Jackson, K., Koike, M., and Underwood, J. "Undulator radiation for at-wavelength interferometry of optics for extreme-ultraviolet lithography," Appl. Opt. 32 (34), 7022-7031, 1993. Full text pdf

  74. Fann, W. S., Storz, R., Tom, H. W. K., and Bokor, J. "Direct measurement of nonequilibrium electron-energy distributions in sub-picosecond laser-heated gold films," Surface Sci. 283, 221-225, 1993. Full text pdf

  75. MacDowell, A. A., Bjorkholm, J. E., Early, K., Freeman, R. R., Himel, M. D., Mulgrew, P. P., Szeto, L. H., Taylor, D. W., Tennant, D. M., Wood, O. R. II, Bokor, J., Eichner, L., Jewell, T. E., Waskiewicz, W. K., White, D. L., Windt, D. L., D'Souza, R. M., Silfvast, W. T., and Zernike, F., "Soft-x-ray projection imaging with a 1:1 ring-field optic," Appl. Opt. 32 (34), 7072-7078, 1993. Full text pdf

  76. Mohideen, U., Sher, M. H., Tom, H. W. K., Aumiller, G. D., Wood, O. R. II, Freeman, R. R., Bokor, J., and Bucksbaum, P. H. "High intensity above-threshold ionization of He," Phys. Rev. Lett. 71 (4), 509-512, 1993. Full text pdf

  77. Murnane, M. M., Kapteyn, H. C., Gordon, S. P., Bokor, J., Glytsis, E. N., and Falcone, R. W. "Efficient coupling of high-intensity subpicosecond laser pulses into solids," Appl. Phys. Lett. 62 (10), 1068-1070, 1993. Full text pdf

  78. Park, B., King, C. A., Eaglesham, D. J., Sorsch, T. W., Weir, B., Luftman, H., Bokor, J., and Kim, Y. O. "Ultrashallow p+n junctions formed by diffusion from a RTCVD-deposited B:Ge layer," Proc. SPIE 2091, p. 122, 1993. Abstract html

  79. Sher, M. H., Mohideen, U., Tom, H. W. K., Wood, O. R. II, Aumiller, G. D., McIlrath, T. J., Bokor, J., Freeman, R. R., and Sugar, J. "Soft X-ray pulse length measurement by pump-probe absorption spectroscopy," Proc. SPIE 1860, p. 112, 1993. Abstract html

  80. Tichenor, D. A., Kubiak, G. D., Malinowski, M. E., Stulen, R. H., Haney, S. J., Berger, K. W., Brown, L. A., Sweatt, W. C., Bjorkholm, J. E., Freeman, R. R., Himel, M. D., MacDowell, A. A., Tennant, D. M., Wood, O. R. II, Bokor, J., Jewell, T. E., Mansfield, W. M., Waskiewicz, W. K., White D. L, and Windt, D. L. "Soft-x-ray projection lithography experiments using Schwarzschild imaging optics," Appl. Opt. 32 (34), 7068-7071, 1993. Full text pdf

  81. Assaderaghi, F., Sinitsky, D., Parke, S., Bokor, J., Ko, P. K., and Hu, C. "A dynamic threshold voltage MOSFET (DTMOS) for ultra-low voltage operation," IEDM Technical Digest, p. 479-482, 1994. Full text pdf

  82. Assaderaghi, F., Parke, S., Sinitsky, D., Bokor, J., Ko, P. K., and Hu, C. "A dynamic threshold voltage MOSFET (DTMOS) for very low voltage operation," IEEE Electron Device Lett. 15 (12), 510-512, 1994. Full text pdf

  83. Assaderaghi, F., Sinitsky, D., Gaw, H., Bokor, J., Ko, P. K. and Hu, C. "Saturation velocity and velocity overshoot of inversion layer electrons and holes," IEDM Technical Digest, p. 479-482, 1994. Full text pdf

  84. Goldberg, K. A., Beguiristain, R., Bokor, J., Medecki, H., Jackson, K., Attwood, D. T., Sommargren, G. E., Spallas, J. P., and Hostetler, R. "At-wavelength testing of optics for EUV," Proc. SPIE 2437, p. 347, 1995. Abstract html

  85. Goldberg, K. A., Beguiristain, R., Bokor, J., Medecki, H., Jackson, K., Attwood, D. T., Sommargren, G. E., Spallas, J. P., and Hostetler, R. "Point diffraction interferometry at EUV wavelengths." In D. T. Attwood and F. Zernike (eds.), Extreme Ultraviolet Lithography, Washington, D.C.: Optical Society of America, 1994.

  86. Goldberg, K. A., Beguiristain, R., Bokor, J., Medecki, H., Attwood, D. T., Jackson, K., Tejnil, E., and G. E. Sommargren, G. E. "Progress towards lambda/20 extreme ultraviolet interferometry," J. Vac. Sci. Technol. B 13(6), 2923-2927, 1995. Full text pdf

  87. Wann, H. C., Hu, C., Noda, K., Sinitsky, D., Assaderaghi, F., and Bokor, J. "Channel doping engineering of MOSFET with adaptable threshold voltage using body effect for low voltage and low power applications," Proc. 1995 Symposium on Technology, Systems, and Applications, 159-163, 1995. Full text pdf

  88. Bokor, J., Neureuther, A. R., and Oldham, W. G., "Advanced lithography for ULSI," IEEE Circ. And Dev. 12, 11-15, 1996. Full text pdf

  89. Budiarto, E., Margolies, J., Jeong, S., Son, J., and Bokor, J. "High-intensity terahertz pulses at 1-kHz repetition rate," IEEE J. Quantum Electron. 32 (10), 1839-1846, 1996. Full text pdf

  90. Goldberg, K. A., Tejnil, E., and Bokor, J. "A 3-D numerical study of pinhole diffraction to predict the accuracy of EUV point diffraction interferometry." In G. D. Kubiak and D. R. Kania (eds.), OSA Trends in Optics and Photonics Vol. 4, Extreme Ultraviolet Lithography, Washington, D.C.: Optical Society of America, 133-137, 1996.

  91. Jeong, S., Zacharias, H., and Bokor, J. "Ultrafast carrier dynamics on the Si(100)2×1 surface," Phys. Rev. B54 (24), R17300-R17303, 1996. Full text pdf

  92. Medecki, H., Tejnil, E., Goldberg, K. A., and Bokor, J. "Phase-shifting point diffraction interferometer," Opt. Lett. 21 (19), 1526-1528, 1996. Full text pdf

  93. Nguyen, K. B., Cardinale, G. F., Tichenor, D. A., Kubiak, G. D., Berger, K., Ray-Chaudhuri, A. K., Perras, Y., Haney, S. J., Nissen, R., Krenz, K., Stulen, R. H., Fujioka, H., Hu, C., Bokor, J., Tennant, D. M., and Fetter, L. A. "Fabrication of metal-oxide-semiconductor devices with extreme ultraviolet lithography," J. Vac. Sci. Technol. B 14(6), 4188-4192, 1996. Full text pdf

  94. Nguyen, K. B., Cardinale, G. F., Tichenor, D. A., Berger, K., Ray-Chaudhuri, A. K., Perras, Y., Haney, S. J., Nissen, R., Krenz, K., Stulen, R. H., Fujioka, H., Hu, C., Bokor, J., Tennant, D. M., and Fetter, L. A. "Fabrication of MOS devices with extreme ultraviolet lithography." In G. D. Kubiak and D. R. Kania (eds.), OSA Trends in Optics and Photonics Vol. 4, Extreme Ultraviolet Lithography, Washington, D.C.: Optical Society of America, p. 208-211, 1996.

  95. Son, J.-H., Jeong, S., and Bokor, J. "Noncontact probing of metal-oxide-semiconductor inversion layer mobility," Appl. Phys. Lett. 69 (12), 1779-1780, 1996. Full text pdf

  96. Tejnil, E., Goldberg, K. A., Medecki, H., Beguiristain, R., Bokor, J., and Attwood, D. T. "Phase-shifting point diffraction interferometry for at-wavelength testing of lithographic optics." In G. D. Kubiak and D. R. Kania (eds.), OSA Trends in Optics and Photonics Vol. 4, Extreme Ultraviolet Lithography, Washington, D.C.: Optical Society of America, p. 118-123, 1996.

  97. Tejnil, E., Goldberg, K. A., Anderson, E. H., and Bokor, J. "Zonal placement errors in zone plate lenses." In G. D. Kubiak and D. R. Kania (eds.), OSA Trends in Optics and Photonics Vol. 4, Extreme Ultraviolet Lithography, Washington, D.C.: Optical Society of America, p. 138-142, 1996.

  98. Tien, N. C., Jeong, S., Phinney, L. M., Fushinobu, K., and Bokor, J. "Surface adhesion reduction in silicon microstructures using femtosecond laser pulses," Appl. Phys. Lett. 68 (2), 197-199, 1996. Full text pdf

  99. Assaderaghi, F., Sinitsky, D., Parke, S. A., Bokor, J., Ko, P. K., and Hu, C. "Dynamic threshold-voltage MOSFET (DTMOS) for ultra-low voltage VLSI," IEEE Trans. Electron Dev. 44 (3), 414-422, 1997. Full text pdf

  100. Assaderaghi, F., Sinitsky, D., Bokor, J., Ko, P. K., Gaw, H., and Hu, C. "High-field transport of inversion-layer electrons and holes including velocity overshoot," IEEE Trans. Electron Dev. 44 (4), 664-671, 1997. Full text pdf

  101. Goldberg, K. A., Tejnil, E., Lee, S. H., Medecki, H., Attwood, D. T., Jackson, K. H., and Bokor, J. "Characterization of an EUV Schwarzschild objective using phase-shifting point diffraction interferometry," Proc. SPIE 3048, p. 264-270, 1997. Abstract html

  102. Kedzierski, J., Bokor, J., and Kisielowski, C. "Fabrication of planar silicon nanowires on silicon-on-insulator using stress limited oxidation," J. Vac. Sci. Technol. B 15(6), 2825-2828, 1997. Full text pdf

  103. Lin, Y. and Bokor, J. "Minimum critical defects in extreme-ultraviolet lithography masks," J. Vac. Sci. Technol. B 15(6), 2467-2470, 1997. Full text pdf

  104. Orenstein, J., Bokor, J., Budiarto, E., Corson, J., Mallozzi, R., Bozovic, I., and Eckstein, J. N. "Nonlinear electrodynamics in cuprate superconductors," Physica C 282, 252-255, 1997. Full text pdf

  105. Sinitsky, D., Assaderaghi, F., Hu, C., and Bokor, J. "High field hole velocity and velocity overshoot in silicon inversion layers," IEEE Electron Device Lett. 18 (2), 54-56, 1997. Full text pdf

  106. Sinitsky, D., Assaderaghi, F., Orshansky, M., Bokor, J., and Hu, C. "An extension of BSIM3 model incorporating velocity overshoot," Proc. 1997 International Symposium on VLSI Technology, Systems, and Applications, p. 307-310, 1997. Full text pdf

  107. Sinitsky, D., Assaderaghi, F., Orshansky, M., Bokor, J., and Hu, C. "Velocity overshoot of electrons and holes in Si inversion layers," Solid-State Electron. 41 (8), 1119-1125, 1997. Full text pdf

  108. Sinitsky, D., Tu, R., Liang, C., Chan, M. Bokor, J., and Hu, C. "AC output conductance of SOI MOSFET's and impact on analog applications," IEEE Electron Device Lett. 18 (2), 36-38, 1997. Full text pdf

  109. Tejnil, E., Goldberg, K. A., Lee, S. H., Medecki, H., Batson, P. J., Denham, P. E., MacDowell, A. A., Bokor, J., and Attwood, D. "At-wavelength interferometry for extreme ultraviolet lithography," J. Vac. Sci. Technol. B 15(6), 2455-2461, 1997. Full text pdf

  110. Attwood, D., Anderson, E., Batson, P., Beguiristain, R., Bokor, J., Goldberg, K., Gullikson, E., Jackson, K., Nguyen, K., Koike, M., Medecki, H., Mrowka, S., Tackaberry, R., Tejnil, E., and Underwood, J. "At-wavelength metrologies for extreme ultraviolet lithography," Future Electron Devices J. 9 (Supplement 1), 5-14, 1998. (In Japanese)

  111. Budiarto, E., Pu, N.-W., Jeong, S., and Bokor, J. "Near-field propagation of terahertz pulses from a large-aperture antenna," Opt. Lett. 23 (3), 213-215, 1998. Full text pdf

  112. Goldberg, K. A., Naulleau, P., Lee, S., Bresloff, C., Henderson, C., Attwood, D., and Bokor, J. "High-accuracy interferometry of extreme ultraviolet lithographic optical systems," J. Vac. Sci. Technol. B 16(6), 3435-3439, 1998. Full text pdf

  113. Hisamoto, D., Lee, W.-C., Kedzierski, J., Anderson, E., Takeuchi, H., Asano, K., King, T.-J., Bokor, J., and Hu, C. "A folded-channel MOSFET for deep-sub-tenth micron era," IEDM Technical Digest, p. 1032-1034, 1998. Full text pdf

  114. Jeong, S., Idir, M., Johnson, L., Lin, Y., Batson, P., Levesque, R., Kearney, P., Yan, P.-Y., Gullikson, E., Underwood, J. H., and Bokor, J. "Actinic detection of EUVL mask blank defects," Proc. SPIE 3546, p. 524-530, 1998. Abstract html

  115. Jeong, S., Idir, M., Lin, Y., Johnson, L., Rekawa, S., Jones, M., Denham, P., Batson, P., Levesque, R., Kearney, P., Yan, P.-Y., Gullikson, E., Underwood, J. H., and Bokor, J. "At-wavelength detection of extreme ultraviolet lithography mask blank defects," J. Vac. Sci. Technol. B 16(6), 3430-3434, 1998. Full text pdf

  116. Krishnan, M. S., Yeo, Y. C., Lu, Q., King, T.-J., Bokor, J., and Hu, C. "Remote charge scattering in MOSFETs with ultra-thin gate dielectrics," IEDM Technical Digest, p. 571-574, 1998. Full text pdf

  117. Naulleau, P., Goldberg, K., Lee, S., Chang-Hasnain, C., Bresloff, C., Batson, P., Attwood, D., and Bokor, J. "Characterization of the accuracy of EUV phase-shifting point diffraction interferometry," Proc. SPIE 3331, p. 114-123, 1998. Abstract html

  118. Orshansky, M., Sinitsky, D., Scrobahaci, P., Bokor, J., and Hu, C. "Impact of velocity overshoot, polysilicon depletion, and inversion layer quantization on NMOSFET scaling," 56th Annual Device Research Conf. Digest, New York: IEEE, p. 18-19, 1998. Full text pdf

  119. Tejnil, E., Goldberg, K. A., and Bokor, J. "Phase effects owing to multilayer coatings in a two-mirror extreme-ultraviolet Schwarzschild objective," Appl. Opt. 37 (34), 8021-8029, 1998. Full text pdf

  120. Attwood, D. T., Naulleau, P., Goldberg, K. A., Tejnil, E., Chang, C., Beguiristain, R., Batson, P., Bokor, J., Gullikson, E. M., Koike, M., Medecki, H., and Underwood, J. H. "Tunable coherent radiation in the soft X-ray and extreme ultraviolet spectral regions," IEEE J. Quantum Electron. 35 (5), 709-720, 1999. Full text pdf

  121. Choi, Y.-K., Asano, K., Lindert, N., Subramanian, V., King, T.-J., Bokor, J., and Hu, C. "Ultra-thin body SOI MOSFET for deep-sub-tenth micron era," IEDM Technical Digest, p. 919-921, 1999. Full text pdf

  122. Goldberg, K. A., Naulleau, P., and Bokor, J. "Extreme ultraviolet interferometric measurements of diffraction-limited optics," J. Vac. Sci. Technol. B 17(6), 2982-2986, 1999. Full text pdf

  123. Goldberg, K. A., Naulleau, P., Lee, S.-H., Chang, C., Bresloff, C., Gaughan, R., Chapman, H. N., Goldsmith, J., and Bokor, J. "Direct comparison of EUV and visible-light interferometries," Proc. SPIE 3676, p. 635-642, 1999. Abstract html

  124. Gullikson, E. M., Baker, S., Bjorkholm, J. E., Bokor, J., Goldberg, K. A., Goldsmith, J. E. M., Montcalm, C., Naulleau, P., Spiller, E., Stearns, D. G., Taylor, J. S., and Underwood, J. H. "EUV scattering and flare of 10× projection cameras," Proc. SPIE 3676, p. 717-723, 1999. Abstract html

  125. Huang, X., Lee, W.-C., Kuo, C., Hisamoto, D., Chang, L., Kedzierski, J., Anderson, E., Takeuchi, H., Choi, Y.-K., Asano, K., Subramanian, V., King, T.-J., Bokor, J., and Hu, C. "Sub 50-nm FinFET: PMOS," IEDM Technical Digest, p. 67-70, 1999. Full text pdf

  126. Jeong, S. and Bokor, J. "Ultrafast carrier dynamics near the Si(100)2×1 surface," Phys. Rev B59 (7), 4943-4951, 1999. Full text pdf

  127. Jeong, S., Johnson, L, Lin, Y., Rekawa, S., Yan, P.-Y., Kearney, P. A., Tejnil, E., Underwood, J. H., and Bokor, J. "Actinic EUVL mask blank defect inspection system," Proc. SPIE 3676, p. 298-308, 1999. Abstract html

  128. Jeong, S., Johnson, L., Rekawa, S., Walton, C. C., Prisbrey, S. T., Tejnil, E., Underwood, J. H., and Bokor, J. "Actinic detection of sub-100 nm defects on extreme ultraviolet lithography mask blanks," J. Vac. Sci. Technol. B 17(6), 3009-3013, 1999. Full text pdf

  129. Jeong, S., Lai, C.-W., Rekawa, S., Walton, C. C., Prisbrey, S. T., and Bokor, J. "Cross correlation between actinic and visible defect inspection tool for extreme ultraviolet lithography," Proc. SPIE 3873, p. 814-821, 1999. Abstract html

  130. Kedzierski, J., Bokor, J., and Anderson, E. "Novel method for silicon quantum wire transistor fabrication," J. Vac. Sci. Technol. B 17(6), 3244-3247, 1999. Full text pdf

  131. Krishnan, M. S., Cheng, L., King, T.-J., Bokor, J. and Hu, C. "MOSFETs with 9 to 13 A thick gate oxides," IEDM Technical Digest, p. 241-244, 1999. Full text pdf

  132. Lutz, R. C., Specht, P., Zhao, R., Jeong, S., Bokor, J., and Weber, E. R. "Thermal stabilization of non-stoichiometric GaAs through beryllium doping," Defect and Impurity Engineered Semiconductors II. Symposium Proc., p. 55-59, 1999.

  133. Naulleau, P., Goldberg, K. A., Gullikson, E. M., and Bokor, J. "Interferometric at-wavelength flare characterization of extreme ultraviolet optical systems," J. Vac. Sci. Technol. B 17(6), 2987-2991, 1999. Full text pdf

  134. Naulleau, P. P., Goldberg, K. A., Lee, S. H., Chang, C., Attwood, D., and Bokor, J. "Extreme-ultraviolet phase-shifting point-diffraction interferometer: A wave-front metrology tool with subangstrom reference-wave accuracy," Appl. Opt. 38 (35), 7252-7263, 1999. Full text pdf

  135. Naulleau, P., Goldberg, K. A., Lee, S. H., Chang-Hasnain, C., Batson, P., Attwood, D., and Bokor, J. "Recent advances in EUV phase-shifting point diffraction interferometry," Proc. SPIE 3767, p. 154-163, 1999. Abstract html

  136. Pu, N.-W., Bokor, J., Jeong, S., and Zhao, R.-A. "Nondestructive picosecond ultrasonic characterization of Mo/Si extreme ultraviolet multilayer reflection coatings," J. Vac. Sci. Technol. B 17(6), 3014-3018, 1999. Full text pdf

  137. Pu, N.-W., Bokor, J., Jeong, S., and Zhao, R.-A. "Picosecond ultrasonic study of Mo/Si multilayer structures using an alternating-pump technique," Appl. Phys. Lett. 74 (2), 320-322, 1999. Full text pdf

  138. Pu, N.-W., Jeong, S., Zhao, R.-A., and Bokor, J. "Nondestructive picosecond ultrasonic characterization of Mo/Si multilayers using a novel pump-probe scheme," Proc. SPIE 3749, p. 196-197, 1999. Abstract html

  139. Pu, N.-W., Jeong, S., Zhao, R.-A., and Bokor, J. "Picosecond ultrasonic characterization of Mo/Si multilayers for extreme ultraviolet lithography," Proc. SPIE 3676, p. 627-634, 1999. Abstract html

  140. Subramanian, V., Kedzierski, J., Lindert, N., Tam, H., Su, Y., McHale, J., Cao, K., King, T.-J., Bokor, J., and Hu, C. "A bulk-Si-compatible ultrathin-body SOI technology for sub-100nm MOSFETs," 57th Annual Device Research Conf. Digest, p. 28-29, 1999. Full text pdf

  141. Zhao, R., Specht, P., Lutz, R. C., Pu, N.-W., Jeong, S., Bokor, J., and Weber, E. R. "Time-resolved reflectivity measurement of thermally stabilized low temperature grown GaAs doped with beryllium," Proc. 10th International Semiconducting and Insulating Materials, p. 130-133, 1999.

  142. Chang, L., Tang, S., King, T.-J., Bokor, J., and Hu, C. "Gate length scaling and threshold voltage control of double-gate MOSFETs," IEDM Technical Digest, p. 719-722, 2000. Full text pdf

  143. Choi, Y.-K., Asano, K., Lindert, N., Subramanian, V., King, T.-J., Bokor, J., and Hu, C. "Ultrathin-body SOI MOSFET for deep-sub-tenth micron era," IEEE Electron Device Lett. 21 (5), 254-255, 2000. Full text pdf

  144. Choi, Y.-K., Jeon, Y.-C., Ranade, P., Takeuchi, H., King, T.-J., Bokor, J., and Hu, C. "30nm ultra-thin-body SOI MOSFET with selectively deposited Ge raised S/D," 58th Annual Device Research Conf. Digest, p. 23-24, 2000. Full text pdf

  145. Goldberg, K. A., Naulleau, P., Batson, P., Denham, P., Anderson, E. H., Chapman, H., and Bokor, J. "Extreme ultraviolet alignment and testing of a four-mirror ring field extreme ultraviolet optical system," J. Vac. Sci. Technol. B 18(6), 2911-2915, 2000. Full text pdf

  146. Goldberg, K. A., Naulleau, P., Batson, P. J., Denham, P., Anderson, E. H., Bokor, J., and Chapman, H. N. "EUV interferometry of a four-mirror ring-field EUV optical system," Proc. SPIE 3997, p. 867-873, 2000. Original text pdf

  147. Jeong, S., Lai, C.-W., Rekawa, S., Walton, C. C., and Bokor, J. "Actinic defect counting statistics over 1 cm2 area of EUVL mask blank," Proc. SPIE 3997, p. 431-440, 2000. Original text pdf

  148. Kedzierski, J., Anderson, E., and Bokor, J. "Calixarene G-line double resist process with 15 nm resolution and large area exposure capability," J. Vac. Sci. Technol. B 18(6), 3428-3430, 2000. Full text pdf

  149. Kedzierski, J., Xuan, P., Anderson, E. H., Bokor, J., King, T.-J., and Hu, C. "Complementary silicide source/drain thin-body MOSFETs for the 20nm gate length regime," IEDM Technical Digest, p. 57-60, 2000. Full text pdf

  150. Kedzierski, J., Xuan, P., Subramanian, V., Bokor, J., King, T.-J., Hu, C., and Anderson, E. "A 20 nm gate-length ultra-thin body p-MOSFET with silicide source/drain," Superlattices and Microstructures 28 (5/6), 445-452, 2000. Full text pdf

  151. Lee, S. H., Naulleau, P., Goldberg, K. A., Cho, C. H., and Bokor, J. "EUV holographic aerial image recording," Proc. SPIE 3997, p. 823-827, 2000. Original full text pdf

  152. Lee, S. H., Piao, F., Naulleau, P., Goldberg, K. A., Oldham, W., and Bokor, J. "At-wavelength characterization of DUV-radiation-induced damage in fused silica," Proc. SPIE 3998, p. 724-731, 2000. Original text pdf

  153. Naulleau, P., Goldberg, K. A., Gullikson, E. M., and Bokor, J. "At-wavelength, system-level flare characterization of extreme-ultraviolet optical systems," Appl. Opt. 39 (17), 2941-2947, 2000. Full text pdf

  154. Naulleau, P., Goldberg, K. A., Lee, S. H., Chang, C., Attwood, D., and Bokor, J. "The EUV phase-shifting point diffraction interferometer," Proc. Eleventh U.S. National Synchrotron Radiation Instrumentation Conf., New York: American Institute of Physics, p. 66-72, 2000. Full text pdf

  155. Naulleau, P., Goldberg, K. A., Lee, S. H., Chang, C., Batson, P., Attwood, D., and Bokor, J. "The PS/PDI: A high accuracy development tool for diffraction limited short-wavelength optics," Proc. Sixth International Conf. on X-ray Microscopy, New York: American Institute of Physics, p. 595-600, 2000. Full text pdf

  156. Naulleau, P. P., Cho, C. H., Gullikson, E. M., and Bokor, J. "Transmission phase gratings for EUV interferometry," J. Synchrotron Rad. 7 (6), 405-410, 2000. Full text pdf

  157. Naulleau, P. P., Goldberg, K. A., and Bokor, J. "Extreme ultraviolet carrier-frequency shearing interferometry of a lithographic four-mirror optical system," J. Vac. Sci. Technol. B 18(6), 2939-2943, 2000. Full text pdf

  158. Tang, S. H., Xuan, P., Bokor, J., and Hu, C. "Comparison of short-channel effect and offstate leakage in symmetric vs. asymmetric double gate MOSFETs," Proc. IEEE International SOI Conf., p. 120-121, 2000. Full text pdf

  159. Xuan, P., Kedzierski, J., Subramanian, V., Bokor, J., King, T.-J., and Hu, C. "60nm planarized ultra-thin body solid phase epitaxy MOSFETs," 58th Annual Device Research Conf. Digest, p. 67-68, 2000. Full text pdf

  160. Yeo, Y. C., Subramanian, V., Kedzierski, J., Xuan, P., King, T.-J., Bokor, J., and Hu, C. "Nanoscale ultra-thin-body silicon-on-insulator P-MOSFET with a SiGe/Si heterostructure channel," IEEE Electron Device Lett. 21 (4), 161-163, 2000. Full text pdf

  161. Yi, M., Jeong, S., Rekawa, S., and Bokor, J. "Characterization of extreme ultraviolet lithography mask defects from extreme ultraviolet far-field scattering patterns," J. Vac. Sci. Technol. B 18(6), 2930-2934, 2000. Full text pdf

  162. Choi, Y.-K., Lindert, N., Xuan, P., Tang, S., Ha, D., Anderson, E., King, T.-J., Bokor, J., and Hu, C. "Sub-20nm CMOS FinFET technologies," IEDM Technical Digest, p. 421-424, 2001. Full text pdf

  163. Goldberg, K. A. and Bokor, J. "Fourier-transform method of phase-shift determination," Appl. Opt. 40 (17), 2886-2894, 2001. Full text pdf

  164. Huang, X., Lee, W.-C., Kuo, C., Hisamoto, D., Chang, L., Kedzierski, J., Anderson, E., Takeuchi, H., Choi, Y.-K., Asano, K., Subramanian, V., King, T.-J., Bokor, J., and Hu, C. "Sub-50 nm P-channel FinFET," IEEE Trans. Electron Dev. 48 (5), 880-886, 2001. Full text pdf

  165. Kedzierski, J., Ieong, M. K., Xuan, P., Bokor, J., King, T.-J., and Hu, C. "Design analysis of thin-body silicide source/drain devices," Proc. IEEE International SOI Conf., New York: IEEE, p. 21-22, 2001. Full text pdf

  166. Lee, S. H., Naulleau, P., Goldberg, K. A., Cho, C. H., Jeong, S. T., and Bokor, J. "Extreme-ultraviolet lensless Fourier-transform holography," Appl. Opt. 40 (16), 2655-2661, 2001. Full text pdf

  167. Lindert, N., Chang, L., Choi, Y.-K., Anderson, E. H., Lee, W.-C., King, T.-J., Bokor, J., and Hu, C. "Sub-60-nm quasi-planar FinFETs fabricated using a simplified process," IEEE Electron Device Lett. 22 (10), 487-489, 2001. Full text pdf

  168. Lindert, N., Choi, Y.-K., Chang, L., Anderson, E., Lee, W.-C., King, T.-J., Bokor, J., and Hu, C. "Quasi-planar FinFETs with selectively grown germanium raised source/drain," Proc. of IEEE International SOI Conf., pp. 111-112, 2001. Full text pdf

  169. Naulleau, P., Goldberg, K. A., Anderson, E. H., Batson, P., Denham, P. E., Jackson, K. H., Gullikson, E. M., Rekawa, S., and Bokor, J. "At-wavelength characterization of the extreme ultraviolet Engineering Test Stand Set-2 optic," J. Vac. Sci. Technol. B 19(6), 2396-2400, 2001. Full text pdf

  170. Naulleau, P., Goldberg, K. A., Anderson, E. H., Batson, P., Denham, P., Jackson, K., Rekawa, S., and Bokor, J. "Adding static printing capabilities to the EUV phase-shifting point diffraction interferometer," Proc. SPIE 4343, p. 639-645, 2001. Full text pdf

  171. Naulleau, P. P., Anderson, E. H., Gullikson, E. M., and Bokor, J. "Fabrication of high-efficiency multilayer-coated binary blazed gratings in the EUV regime," Opt. Comm. 200, 27-34, 2001. Full text pdf

  172. Shumway, M. D., Lee, S. H., Cho, C. H., Naulleau, P., Goldberg, K. A., and Bokor, J. "Extremely fine-pitch printing with a 10× Schwarzschild optic at extreme ultraviolet wavelengths," Proc. SPIE 4343, p. 357-362, 2001. Full text pdf

  173. Tichenor, D. A., Ray-Chaudhuri, A. K., Lee, S. H., Chapman, H. N., Replogle, W. C., Berger, K. W., Stulen, R. H., Kubiak, G. D., Klebanoff, L. E., Wronosky, J. B., O'Connell, D. J., Leung, A. H., Jefferson, K. L., Ballard, W. P., Hale, L. C., Blaedel, K., Taylor, J. S., Folta, J. A., Spiller, E., Soufli, R., Sommargren, G. E., Sweeney, D. W., Naulleau, P., Goldberg, K. A., Gullikson, E. M., Bokor, J., Attwood, D. T., Mickan, U., Hanzen, R., Panning, E., Yan, P.-Y., Bjorkholm, J. E., and Gwyn, C. W. "Initial results of the EUV Engineering Test Stand," pp. 10, 2001. Original text pdf

  174. Tichenor, D. A., Ray-Chaudhuri, A. K., Replogle, W. C., Stulen, R. H., Kubiak, G. D., Rockett, P. D., Klebanoff, L. E., Jefferson, K. L., Leung, A. H., Wronosky, J. B., Hale, L. C., Chapman, H. N., Taylor, J. S., Folta, J. A., Montcalm, C., Soufli, R., Spiller, E., Blaedel, K., Sommargren, G. E., Sweeney, D. W., Naulleau, P., Goldberg, K. A., Gullikson, E. M., Bokor, J., Batson, P. J., Attwood, D. T., Jackson, K. H., Hector, S. D., Gwyn, C. W., Yan, P.-Y. "System integration and performance of the EUV Engineering Test Stand," Proc. SPIE 4343, p. 19-37, 2001. Original text pdf

  175. Tang, S. H., Chang, L., Lindert, N., Choi, Y.-K., Lee, W.-C., Huang, X., Subramanian, V., Bokor, J., King, T.-J., and Hu, C. "FinFET - A quasi-planar double-gate MOSFET," IEEE International Solid-State Circuits Conf. Digest, p. 118-120, 2001. Full text pdf

  176. Yi, M., Haga, T., Walton, C., and Bokor, J. "High sensitivity actinic detection of native defects on extreme ultraviolet lithography mask blanks," J. Vac. Sci. Technol. B 19(6), 2401-2405, 2001. Full text pdf

  177. Choi, Y.-K., Chang, L., Ranade, P., Lee, J.-S., Ha, D., Balasubramanian, S., Agarwal, A., Ameen, M., King, T.-J., and Bokor, J. "FinFET process refinements for improved mobility and gate work function engineering," IEDM Technical Digest, p. 259-262, 2002. Full text pdf

  178. Goldberg, K. A., Naulleau, P., and Bokor, J. "Fourier transform interferometer alignment method," Appl. Opt. 41 (22), 4477-4483, 2002. Full text pdf

  179. Goldberg, K. A., Naulleau, P., Bokor, J., and Chapman, H. N. "Honing the accuracy of extreme ultraviolet optical system testing: At-wavelength and visible-light measurements of the ETS Set-2 projection optic," Proc. SPIE 4688, p. 329-337, 2002. Full text pdf

  180. Goldberg, K. A., Naulleau, P., Bokor, J., Chapman, H. N., and Barty, A. "Testing extreme ultraviolet optics with visible-light and extreme ultraviolet interferometry," J. Vac. Sci. Technol. B 20(6), 2834-2839, 2002. Full text pdf

  181. Lee, J.-S., Choi, Y.-K., Ha, D., King, T.-J., and Bokor, J. "Low-frequency noise characteristics in p-channel FinFETs," IEEE Electron Device Lett. 23 (12), 722-724, 2002. Full text pdf

  182. Liu, H., Xiong, Z., Sin, J. K. O., Xuan, P., and Bokor, J. "A high performance double-gate SOI MOSFET using lateral solid phase epitaxy," Proc. IEEE International SOI Conf., p. 28-29, 2002. Full text pdf

  183. Naulleau, P., Goldberg, K. A., Anderson, E. H., Attwood, D., Batson, P., Bokor, J., Denham, P., Gullikson, E., Harteneck, B., Hoef, B., Jackson, K., Olynick, D., Rekawa, S., Salmassi, F., Blaedel, K., Chapman, H., Hale, L., Mirkarimi, P., Soufli, R., Spiller, E., Sweeney, D., Taylor, J., Walton, C., O'Connell, D., Tichenor, D., Gwyn, C. W., Yan, P.-Y., and Zhang G. "Sub-70 nm extreme ultraviolet lithography at the Advanced Light Source static microfield exposure station using the engineering test stand set-2 optic," J. Vac. Sci. Technol. B 20(6), 2829-2833, 2002. Full text pdf

  184. Naulleau, P. P., Goldberg, K. A., Anderson, E. H., Attwood, D., Batson, P., Bokor, J., Denham, P., Gullikson, E., Harteneck, B., Hoef, B., Jackson, K., Olynick, D., Rekawa, S., Salmassi, F., Blaedel, K., Chapman, H., Hale, L., Soufli, R., Spiller, E., Sweeney, D., Taylor, J., Walton, C., Ray-Chaudhuri, A., O'Connell, D., Stulen, R., Tichenor, D., Gwyn, C. W., Yan, P.-Y., and Zhang G. "Static microfield printing at the Advanced Light Source with the ETS Set-2 optic," Proc. SPIE 4688, p. 61-71, 2002. Full text pdf

  185. Park, M., Yi, M., Mirkarimi, P., Larson, C., and Bokor, J. "Characterization of extreme ultraviolet lithography mask defects by actinic inspection with broadband extreme ultraviolet illumination," J. Vac. Sci. Technol. B 20(6), 3000-3005, 2002. Full text pdf

  186. Schenkel, T., Persaud, A., Park, S. J., Meijer, J., Kingsley, J. R., McDonald, J. W., Holder, J. P., Bokor, J., and Schneider, D. H. "Single ion implantation for solid state quantum computer development," J. Vac. Sci. Technol. B 20(6), 2819-2823, 2002. Full text pdf

  187. Xiong, S., Bokor, J., Xiang, Q., Fisher, P., Dudley, I., and Rao, P. "Study of gate line edge roughness effects in 50 nm bulk MOSFET devices," Proc. SPIE 4689, p. 733-741, 2002. Full text pdf

  188. Yeo, Y.-C., Subramanian, V., Kedzierski, J., Xuan, P., King, T.-J., Bokor, J., and Hu, C. "Design and fabrication of 50-nm thin-body p-MOSFETs with a SiGe heterostructure channel," IEEE Trans. Electron Dev. 49 (2), 279-286, 2002. Full text pdf

  189. Yi, M., Haga, T., Walton, C., Larson, C., and Bokor, J. "'Actinic-only'defects in extreme ultraviolet lithography mask blanks-Native defects at the detection limit of visible-light inspection tools," Jpn. J. Appl. Phys. 41 (Part 1, No. 6B), 4101-4104, 2002. Full text pdf

  190. Yi, M., Park, M., Mirkarimi, P., Larson, C., and Bokor, J. "At-wavelength inspection of defect smoothing in EUVL masks," Proc. SPIE 4688, p. 395-400, 2002. Original text pdf

  191. Yu, B., Chang, L., Ahmed, S., Wang, H., Bell, S., Yang, C.-Y., Tabery, C., Ho, C., Xiang, Q., King, T.-J., Bokor, J., Hu, C., Lin, M.-R., and Kyser, D. "FinFET scaling to 10nm gate length," IEDM Technical Digest, p. 251-254, 2002. Full text pdf

  192. Chang, L., Choi, Y.-K., Ha, D., Ranade, P., Xiong, S., Bokor, J., Hu, C., and King, T.-J. "Extremely scaled silicon nano-CMOS devices," Proc. IEEE 91 (11), 1860-1873, 2003. Full text pdf

  193. Chang, L., Choi, Y.-K., Kedzierski, J., Lindert, N., Xuan, P., Bokor, J., Hu, C., and King, T.-J. "Moore's Law lives on," IEEE Circuits and Devices Mag. 19 (1), 35-42, 2003. Full text pdf

  194. Choi, Y.-K., Grunes, J., Lee, J. S., Zhu, J., Somorjai, G. A., Lee, L. P., and Bokor, J. "Sub-lithographic patterning technology for nanowire model catalysts and DNA label-free hybridization detection," Proc. SPIE 5220, 10-19, 2003. Full text pdf

  195. Choi, Y.-K., Ha, D., King, T.-J., and Bokor, J. "Investigation of gate-induced drain leakage (GIDL) current in thin body devices: Single-gate ultra-thin body, symmetrical double-gate, and asymmetrical double-gate MOSFETs," Jpn. J. Appl. Phys. 42 (Part 1, No. 4B), 2073-2076, 2003. Full text pdf

  196. Choi, Y.-K., Ha, D., Snow, E., Bokor, J., and King, T.-J. "Reliability study of CMOS FinFETs," IEDM Technical Digest, p. 177-180, 2003. Full text pdf

  197. Choi, Y.-K., Lee, J. S., Zhu, J., Somorjai, G. A., Lee, L. P., and Bokor, J. "Sublithographic nanofabrication technology for nanocatalysts and DNA chips," J. Vac. Sci. Technol. B 21(6), 2951-2955, 2003. Full text pdf

  198. Choi, Y.-K., Zhu, J., Grunes, J., Bokor, J., and Somorjai, G. A. "Fabrication of sub-10-nm silicon nanowire arrays by size reduction lithography," J. Phys. Chem. B 107 (15), 3340-3343, 2003. Full text pdf

  199. Goldberg, K. A., Naulleau, P., Denham, P., Rekawa, S. B., Jackson, K., Anderson, E. H., Liddle, J. A., and Bokor, J. "EUV interferometry of the 0.3-NA MET optic," Proc. SPIE 5037, p. 69-74, 2003. Full text pdf

  200. Goldberg, K. A., Naulleau, P., Rekawa, S., Denham, P., Liddle, J. A., Anderson, E., Jackson, K., Bokor, J., and Attwood, D. "At-wavelength interferometry of high-NA diffraction-limited EUV optics," Proc. Eighth International Synchrotron Radiation Instrumentation Conf., August 28, 2003, pp. 4. (Preprint) Original text pdf

  201. Lee, J.-S., Choi, Y.-K., Ha, D., Balasubramanian, S., King, T.-J., and Bokor, J. "Hydrogen annealing effect on DC and low-frequency noise characteristics in CMOS FinFETS," IEEE Electron Device Lett. 24 (3), 186-188, 2003. Full text pdf

  202. Lee, J.-S., Ha, D., Choi, Y.-K., King, T.-J., and Bokor, J. "Low-frequency noise characteristics of ultrathin body p-MOSFETs with molybdenum gate," IEEE Electron Device Lett. 24 (1), 31-33, 2003. Full text pdf

  203. Naulleau, P., Goldberg, K. A., Anderson, E. H., Bokor, J., Gullikson, E., Harteneck, B., Jackson, K., Olynick, D., Salmassi, F., Baker, S., Mirkarimi, P., Spiller, E., Walton, C., and Zhang, G. "Lithographic characterization of the printability of programmed extreme ultraviolet substrate defects," J. Vac. Sci. Technol. B 21(4), 1286-1290, 2003. Full text pdf

  204. Naulleau, P., Goldberg, K. A., Anderson, E. H., Bokor, J., Harteneck, B., Jackson, K., Olynick, D., Salmassi, F., Baker, S., Mirkarimi, P., Spiller, E., Walton, C., O'Connell, D., Yan, P.-Y., and Zhang, G. "Printing-based performance analysis of the engineering test stand set-2 optic using a synchrotron exposure station with variable sigma," J. Vac. Sci. Technol. B 21(6), 2697-2700, 2003. Full text pdf

  205. Naulleau, P., Goldberg, K. A., Anderson, E. H., Bokor, J., Harteneck, B., Jackson, K., Olynick, D., Salmassi, F., Baker, S., Mirkarimi, P., Spiller, E., Walton, C., O'Connell, D., Yan, P.-Y., and Zhang, G. "Static EUV micro-exposures using the ETS Set-2 optics," Proc. SPIE 5037, p. 36-46, 2003. Abstract html

  206. Naulleau, P. P., Goldberg, K. A., Batson, P., Bokor, J., Denham, P., and Rekawa, S. "Fourier-synthesis custom-coherence illuminator for extreme ultraviolet microfield lithography," Appl. Opt. 42 (5), 820-826, 2003. Full text pdf

  207. Pu, N.-W. and Bokor, J. "Study of surface and bulk acoustic phonon excitations in superlattices using picosecond ultrasonics," Phys. Rev. Lett. 91 (7), 076101/1-4, 2003. Full text pdf

  208. Schenkel, T., Persaud, A., Park, S. J., Nilsson, J., Bokor, J., Liddle, J. A., Keller, R., Schneider, D. H., Cheng, D. W., and Humphries, D. E. "Solid state quantum computer development in silicon with single ion implantation," J. Appl. Phys. 94 (11), 7017-7024, 2003. Full text pdf

  209. Shumway, M. D., Naulleau, P., Goldberg, K. A., Snow, E. L., and Bokor, J. "Resist evaluation at 50 nm in the EUV using interferometric spatial frequency doubled imaging," Proc. SPIE 5037, p. 910-916, 2003. Full text pdf

  210. Xiong, S. and Bokor, J. "Sensitivity of double-gate and FinFET devices to process variations," IEEE Trans. Electron Dev. 50 (11), 2255-2261, 2003. Full text pdf

  211. Xuan, P. and Bokor, J. "Investigation of NiSi and TiSi as CMOS gate materials," IEEE Electron Device Lett. 24 (10), 634-636, 2003. Full text pdf

  212. Xuan, P., She, M., Harteneck, B., Liddle, A., Bokor, J., and King, T.-J. "FinFET SONOS flash memory for embedded applications," IEDM Technical Digest, p. 609-612, 2003. Full text pdf

  213. Liu, H., Sin, J. K. O., Xuan, P., and Bokor, J. "Characterization of the ultrathin vertical channel CMOS technology," IEEE Trans. Electron Dev. 51 (1), 106-112, 2004. Full text pdf

  214. Shumway, M. D., Snow, E. L., Goldberg, K. A., Naulleau, P., Cao, H., Chandhok, M., Liddle, J. A., Anderson, E. H., and Bokor, J. "EUV resist imaging below 50 nm using coherent spatial filtering techniques," Proc. SPIE 5374, 454-459, 2004. Full text pdf

  215. Tseng, Y.-C., Xuan, P., Javey, A., Malloy, R., Wang, Q., Bokor, J., and Dai, H. "Monolithic integration of carbon nanotube devices with silicon MOS technology," Nano Lett. 4 (1), 123-127, 2004. Full text pdf

  216. Wang, Y., Bokor, J., and Lee, A. "Maskless lithography using drop-on-demand inkjet printing method," Proc. SPIE 5374, p. 628-636, 2004. Full text pdf

  217. Xiong, S. and Bokor, J. "A simulation study of gate line edge roughness effects on doping profiles of short-channel MOSFET devices," IEEE Trans. Electron Dev. 51 (2), 228-232, 2004. Full text pdf
Last updated 10/08/04