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Must Read Papers:

1.51-GHz with Q >10,000 Even in Air!
A result of purposely impedance-mismatching a polydiamond disk with its polysilicon stem.


1.2-GHz with Q = 14,600!

Who says diamond is needed to get Q >10,000 at GHz frequencies? With the right "hollow-disk" ring design, polysilicon can do even better than diamond.



60-MHz Wine-Glass Disk Oscillator Makes the GSM Reference Oscillator Spec!
Higher power handling and a Q >50,000 crucial in making the spec.



Arraying for Impedance <480W at 72MHz!
Mechanically coupled resonator arrays automatically align resonator frequencies to allow output summation for low impedance and higher power handling.



In Fall Semester 2007, Prof. Nguyen is teaching

EE C245 / ME C218: Introduction to MEMS Design

Course Information



The Latest Award Winning Papers:

Solid-Gap Vibrating Micromechanical Resonator Wins Best Paper Award at the 2005 IEEE Int. Frequency Control Symposium!
Congratulations to Yu-Wei Lin for winning the Best Frequency Control Paper Award at the 2005 IEEE  Int. Frequency Control Symposium.


Chip-Scale Atomic Clock Overview Paper Wins the Jack Raper Award at the 2005 IEEE Int. Solid-State Circuits Conference!
Congratulations to all those in the CSAC program (which Prof. Nguyen ran while at DARPA), especially John Kitching from NIST, who co-authored this paper.


Vibrating RF MEMS Wins Best Invited Paper Award at the 2004 IEEE Custom Integrated Circuits Conference!
Read this for an overview on vibrating RF MEMS.


Resonator Array Oscillator Wins 2004 UFFC Symposium Best Frequency Control Paper Award!
Congratulations to Seungbae Lee for winning the Best Frequency Control Paper Award at the 2004 IEEE Ultrasonics, Ferroelectrics, and Frequency Control 50th Anniv. Joint Conf.


Ext. Wine-Glass Resonator Work Wins 2003 IEDM Best Paper Award!
Congratulations to Yuan Xie for winning the 2003 Int. Electron Devices Meeting Roger A. Haken Best Student Paper Award.


Professor Clark Nguyen

574 Cory Hall

Tel: (510)642-6251

E-mail: ctnguyen@eecs.berkeley.edu

Office Hours:

Tu 1:30-3 p.m., Th 3-4:30 p.m., both in 574 Cory

TA Office Hours:

Li-Wen Hung: M  9-10 a.m., 1:30-2:30 p.m., in 382 Cory

Yang Lin: W 11-12 a.m., 2-3 p.m., in 382 Cory


Tuesday, Thursday 9:30-11 a.m. in 3108 Etcheverry


Friday, 1-2 p.m., 293 Cory

Friday, 4-5 p.m., 293 Cory

Course Description:

In its most common definition, the field of microelectromechanical systems (or MEMS) encompasses tiny (generally chip-scale) devices or systems capable of realizing functions not easily achievable via transistor devices alone. Among the useful functions realized via MEMS are:

             1)   Sensing of various parameters that include inertial variables, such as acceleration and rotation rate; other physical variables, such as pressure and temperature; chemicals, often gaseous or liquids; biological species, such as DNA or cells; and a myriad of other sensing modes, e.g., radiation.

             2)     Control of physical variables, such as the direction of light (e.g., laser light), the direction of radiated energy, the flow of fluids, the frequency content of signals, etc. …

             3)     Generation and/or delivery of useful physical quantities, such as ultra-stable frequencies, power, ink, and drug doses, among many others.

Although useful, the above definition and functional list fall short of describing some of more fundamentally important aspects of MEMS that allows this field to accomplish incredible things. In particular, MEMS design and technology fundamentally offer the benefits of scaling in physical domains beyond the electrical domain, to additionally include the mechanical, chemical, and biological domains. We are all well aware of the benefits of scaling when applied to integrated circuits. Specifically, via continued scaling of dimensions over the years, integrated circuit transistor technology has brought about transistor-based circuits with faster speed, lower power consumption, and larger functional complexity than ever before. All of these benefits have come about largely through sheer dimensional scaling.

By scaling the features of devices that operate in other physical domains (e.g., mechanical), MEMS technology offers the same scaling benefits of

             1)     Faster speed, as manifested by higher mechanical resonance frequencies, faster thermal time constants, etc., as dimensions are scaled.

             2)     Lower power or energy consumption, as manifested by the smaller forces required to move tiny mechanical elements, or the smaller thermal capacities and higher thermal isolations achievable that lead to much smaller power consumptions required to maintain certain temperatures.

             3)     Higher functional complexity, in that integrated circuits of mechanical links and resonators, fluidic channels and mixers, movable mirrors and gratings, etc., now become feasible with MEMS technology.

Unfortunately, although scaling does bring about significant benefits, it can also introduce penalties. For example, although miniaturization of accelerometers lowers cost and greatly enhances their g-force survivability, it also often results in reduced resolution—a drawback that must be alleviated via proper design strategy. This course will examine the pros and cons of scaling via MEMS technology, with a specific focus on the physical principles, tools, and methodologies needed to properly model MEMS devices and concepts to the point of being able to identify methods for maximizing the advantages while suppressing any drawbacks.

There will be two hour-and-a-half lectures and a one-hour discussion session per week. The lectures will be supplemented by reading assignments (indicated on the COURSE SYLLABUS), additional reading material to be distributed throughout the course, problem sets (at the rate of one per week, occasionally per two weeks), one midterm exam, a project, and a final exam. Although the material covered in the lectures and in the reading is fundamentally the same, the perspectives differ, and you are all strongly encouraged to both attend the lecture and complete your reading assignments. Furthermore, there will be occasional announcements in lectures that will affect your problem sets and exams.

Lectures and Discussion, 4 credit hours.









Last Updated Tuesday, Aug. 7, 2012.

Contents copyright @ 2012. All rights reserved.

To report errors, please email: ctnguyen@eecs.berkeley.edu