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RF N/MEMS |
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CMOS-compatible N/MEMS technology
and CMOS-N/MEMS
integration |
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RF N/MEMS, such as high Q resonators, high Q filters, tunable
capacitors, inductors, or low-power switches |
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Piezoelectric nanostructure or
carbon nanotube (CNT)
fabrications, such as nano-string, nano-beam, nano-disk, or nano-ring |
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Piezoelectric N/MEMS devices for RF resonators and filters |
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- Microwave
and millimeter-wave integrated circuits for RF N/MEMS components |
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- Integrate
N/MEMS sensors with VLSI circuits for wireless sensor networks |
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- SAW
filters and layered SAW filters |
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Bio N/MEMS |
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Micro-fluidic systems
including the Microchannels, Microvalves, Micropumps, and
Micromixers |
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Micro-drops and Cells
manipulation |
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Integrate Bio-sensors,
actuators and microchannels to realize
Lab-on-a-Chip |
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Micro-fluidics
technology, such as thermal bobbles driven fluid injection,
acoustic waves driven injection |
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Biological ultrasonic waves, such as
using vibrations and acoustic waves for Bio-sensing or
Bio-imaging |
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Piezoelectric N/MEMS devices for Power generators and
Bio-sensors |
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