Chih-Ming Lin's Website

Home

Education

Experiences

Publications

Research

Skills

Links

Albums

[10]

C.-M. Lin, Y.-Y. Chen, V. V. Felmetsger, W.-C. Lien, T. Riekkinen, D. G. Senesky, and A. P. Pisano, "Surface acoustic wave devices on AlN/3C-SiC/Si multilayer structures," J. Micromech. Microeng., vol. 23, no. 2, 025019, Feb. 2013. (SCI, 2012 Impact Factor: 2.105) [Selected for IOPselect]

[09]

C.-M. Lin, Y.-Y. Chen, V. V. Felmetsger, D. G. Senesky, and A. P. Pisano, "AlN/3C-SiC composite plate enabling high-frequency and high-Q micromechanical resonators," Adv. Mater., vol. 24, no. 20, pp. 2722-2727, May 2012. (SCI, 2012 Impact Factor: 13.877) [Featured as the frontispiece]

[08]

C.-M. Lin, Y.-J. Lai, J.-C. Hsu, Y.-Y. Chen, D. G. Senesky, and A. P. Pisano, "High-Q aluminum nitride Lamb wave resonators with biconvex edges," Appl. Phys. Lett., vol. 99, 143501, Oct. 2011. (SCI, 2011 Impact Factor: 3.844)

[07]

C.-M. Lin, Y.-Y. Chen, and A. P. Pisano, "Theoretical investigation of Lamb wave characteristics in AlN/3C-SiC composite membranes," Appl. Phys. Lett., vol. 97, 193506, Nov. 2010. (SCI, 2010 Impact Factor: 3.820)

[06]

C.-M. Lin, W.-C. Lien, V. V. Felmetsger, M. A. Hopcroft, D. G. Senesky, and A. P. Pisano, "AlN thin films grown on epitaxial 3C-SiC (100) for piezoelectric resonant devices," Appl. Phys. Lett., vol. 97, 141907, Oct. 2010. (SCI, 2010 Impact Factor: 3.820)

[05]

C.-M. Lin, T.-T. Yen, V. V. Felmetsger, M. A. Hopcroft, J. H. Kuypers, and A. P. Pisano, "Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications," Appl. Phys. Lett., vol. 97, 083501, Aug. 2010. (SCI, 2010 Impact Factor: 3.820) [Selected for Virtual Journal of Nanoscale Science & Technology, vol. 22, Sept. 6, 2010]

[04]

C.-M. Lin, T.-T. Yen, Y.-J. Lai, V. V. Felmetsger, M. A. Hopcroft, J. H. Kuypers, and A. P. Pisano, "Temperature-compensated aluminum nitride Lamb wave resonators," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 57, no. 3, pp. 524-532, Mar. 2010. (SCI, 2010 Impact Factor: 1.460) [Featured as the front cover]

[03]

C.-M. Lin, T.-T. Wu, Y.-Y. Chen, and T.-T. Chou, "Improved frequency responses of SAW filters with interdigitated interdigital transducers on ZnO/Diamond/Si layered structure," J. Mech., vol. 23, no. 3, pp. 253-259, Sept. 2007. (SCI, 2007 Impact Factor: 0.722)

[02]

C.-M. Lin, Y.-Y. Chen, and T.-T. Wu, "A novel weighted method for layered SAW filters using slanted finger interdigital transducers," J. Phys. D: Appl. Phys., vol. 39, no. 3, pp. 466-470, Feb. 2006. (SCI, 2006 Impact Factor: 2.077)

[01]

T.-T. Wu and C.-M. Lin, "Analysis of SFIT SAW filters using coupling of modes model," J. Chin. Inst. Eng., vol. 27, no. 7, pp. 973-979, Nov. 2004. (SCI, 2004 Impact Factor: 0.208)

[22]

C.-M. Lin, Y.-Y. Chen, V. V. Felmetsger, D. G. Senesky, and A. P. Pisano, "Acoustic characteristics of the third-order quasi-symmetric Lamb wave mode in an AlN/3C-SiC plate," in Proc. IEEE Intl. Ultrason. Symp. (IUS'13), Prague, Czech Republic, Jul. 2013.

[21]

J. Zou, C.-M. Lin, D. G. Senesky, and A. P. Pisano, "Thermally stable SiO₂/AlN Lamb wave resonators utilizing the lowest-order quasi-symmetric mode at high temperatures," in Proc. IEEE Intl. Ultrason. Symp. (IUS'13), Prague, Czech Republic, Jul. 2013.

[20]

Y.-J. Lai, W.-C. Li, C.-M. Lin, V. V. Felmetsger, and A. P. Pisano, "High-temperature stable piezoelectric aluminum nitride energy harvesters utilizing elastically supported diaphragms," in Tech. Dig. Intl. Conf. Solid-State Sens. Actuators Microsyst. (Transducers'13), Barcelona. Spain, Jun. 2013.

[19]

C.-M. Lin, Y.-Y. Chen, V. V. Felmetsger, D. G. Senesky, and A. P. Pisano, "Two-port filters and resonators on AlN/3C-SiC plates utilizing high-order Lamb wave modes," in Tech. Dig. IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS'13), Taipei, Taiwan, pp. 789-792, Jan. 2013.

[18]

C.-M. Lin, Y.-Y. Chen, V. V. Felmetsger, D. G. Senesky, and A. P. Pisano, "Dispersion characteristics of high-order Lamb wave modes in an AlN/3C-SiC layered plate," accepted in Proc. IEEE Intl. Ultrason. Symp. (IUS'12), Dresden, Germany, Oct. 2012.

[17]

Y.-J. Lai, W.-C. Li, C.-M. Lin, V. V. Felmetsger, D. G. Senesky, and A. P. Pisano, "SiC/AlN piezoelectric energy harvesters for pulsed pressure sources in harsh environment applications," in Tech. Dig. Solid-State Sens. Actuators Microsyst. Workshop (Hilton Head'12), Hilton Head, SC, pp. 505-508, Jun. 2012.

[16]

C.-M. Lin, Y.-Y. Chen, V. V. Felmetsger, G. Vigevani, D. G. Senesky, and A. P. Pisano, "Micromachined aluminum nitride acoustic resonators with an epitaxial silicon carbide layer utilizing high-order Lamb wave modes," in Tech. Dig. IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS'12), Paris, France, pp. 733-736, Jan. 2012.

[15]

C.-M. Lin, T.-T. Yen, V. V. Felmetsger, J. H. Kuypers, and A. P. Pisano, "Intrinsic characteristics of thermally stable AlN Lamb wave resonators at high temperatures," in Proc. IEEE Intl. Ultrason. Symp. (IUS'11), Orlando, FL, pp. 2078-2081, Oct. 2011.

[14]

C.-M. Lin, Y.-J. Lai, T.-T. Yen, J.-C. Hsu, Y.-Y. Chen, D. G. Senesky, and A. P. Pisano, "Quality factor enhancement in Lamb wave resonators utilizing AlN plates with convex edges," in Tech. Dig. Intl. Conf. Solid-State Sens. Actuators Microsyst. (Transducers'11), Beijing, China, pp. 1512-1515, Jun. 2011.

[13]

C.-M. Lin, V. Yantchev, Y.-Y. Chen, V. V. Felmetsger, and A. P. Pisano, "Characteristics of AlN Lamb wave resonators with various bottom electrode configurations," in Proc. IEEE Intl. Freq. Control Symp. - Eur. Freq. Time Forum (FCS-EFTF'11), San Francisco, CA, pp. 505-509, May 2011.

[12]

C.-M. Lin, Y.-Y. Chen, V. V. Felmetsger, T.-T. Yen, W.-C. Lien, D. G. Senesky, and A. P. Pisano, "Surface acoustic wave propagation properties in AlN/3C-SiC/Si composite structure," in Proc. IEEE Intl. Ultrason. Symp. (IUS'10), San Diego, CA, pp. 1696-1699, Oct. 2010.

[11]

T.-T. Yen, C.-M. Lin, M. A. Hoprcoft, J. H. Kuypers, D. G. Senesky, and A. P. Pisano, "Synthesis of narrowband AlN Lamb wave ladder-type filters based on overhang adjustment," in Proc. IEEE Intl. Ultrason. Symp. (IUS'10), San Diego, CA, pp. 970-973, Oct. 2010.

[10]

G. Vigevani, R. J. Przybyla, T.-T. Yen, C.-M. Lin, A. Guedes, J. H. Kuypers, B. E. Boser, D. A. Horsley, and A. P. Pisano, "Characterization of a single port aluminum nitride tuning fork," in Proc. IEEE Intl. Ultrason. Symp. (IUS'10), San Diego, CA, pp. 1281-1284, Oct. 2010.

[09]

C.-M. Lin, W.-C. Lien, T.-T. Yen, V. V. Felmetsger, D. G. Senesky, M. A. Hopcroft, and A. P. Pisano, "Growth of highly c-axis oriented AlN films on 3C-SiC/Si substrate," in Tech. Dig. Solid-State Sens. Actuators Microsyst. Workshop (Hilton Head'10), Hilton Head Island, SC, pp. 324-327, Jun. 2010.

[08]

C.-M. Lin, T.-T. Yen, V. V. Felmetsger, M. A. Hopcroft, J. H. Kuypers, and A. P. Pisano, "Thermal compensation for aluminum nitride Lamb wave resonators operating at high temperature," in Proc. IEEE Intl. Freq. Contr. Symp. (FCS'10), Newport Beach, CA, pp. 14-18, Jun. 2010.

[07]

T.-T. Yen, C.-M. Lin, Y.-J. Lai, D. Wittwer, M. A. Hopcroft, and A. P. Pisano, "Fine frequency selection technique for aluminum nitride Lamb wave resonators," in Proc. IEEE Intl. Freq. Contr. Symp. (FCS'10), Newport Beach, CA, pp. 9-13, Jun. 2010.

[06]

T.-T. Yen, C.-M. Lin, X. Zhao, V. V. Felmetsger, D. G. Senesky, M. A. Hopcroft, and A. P. Pisano, "Characterization of aluminum nitride Lamb wave resonators operating at 600˚C for harsh environment RF applications," in Tech. Dig. IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS'10), Hong Kong, China, pp. 731-734, Jan. 2010.

[05]

Y.-M. Chen, M. Sheppy, T.-T. Yen, G. Vigevani, C.-M. Lin, J. H. Kuypers, M. A. Hopcroft, and A. P. Pisano, "Bi-chevron aluminum nitride actuators for high pressure microvalves," in Proc. Eurosensors XXIII, Lausanne, Switzerland, pp. 706-709, Sept. 2009.

[04]

C.-M. Lin, T.-T. Yen, Y.-J. Lai, V. V. Felmetsger, M. A. Hopcroft, J. H. Kuypers, and A. P. Pisano, "Experimental study of temperature-compensated aluminum nitride Lamb wave resonators," in Proc. Eur. Freq. Time Forum - IEEE Intl. Freq. Contr. Symp. (EFTF-FCS'09), Besançon, France, pp. 5-9, Apr. 2009.

[03]

J. H. Kuypers, C.-M. Lin, G. Vigevani, and A. P. Pisano, "Intrinsic temperature compensation of aluminum nitride Lamb wave resonators for multiple-frequency references," in Proc. IEEE Intl. Freq. Contr. Symp. (FCS'08), Honolulu, HI, pp. 240-249, May 2008. [Invited]

[02]

Y.-Y. Chen, C.-M. Lin, and T.-T. Wu, "A novel weighted method for wide-band SAW filters using slanted finger interdigital transducers on layered piezoelectric substrates," in Proc. IEEE Intl. Ultrason. Symp. (IUS'05), Rotterdam, Netherlands, pp. 2182-2185, Sept. 2005.

[01]

T.-T. Wu and C.-M. Lin, "Analysis of SFIT SAW filters using coupling of modes model," in Proc. Conf. Nano Eng. Micro Syst. Tech., Taipei, Taiwan, pp. 209-212, Nov. 2003.

[07]

C.-M. Lin, T.-T. Yen, M. A. Hopcroft, and A. P. Pisano, "Thermally stable piezoelectric resonators for frequency control and sensing applications at high temperature," US Patent. (in progress)

[06]

C.-M. Lin, T.-T. Yen, Y.-J. Lai, M. A. Hopcroft, and A. P. Pisano, "Temperature-compensated Lamb wave resonator (LWR) devices," US Patent. (in progress)

[05]

C.-C. Chou and C.-M. Lin, "Fluid injection devices with sensors, fluid injection system and method of analyzing fluid in fluid injection devices," US Patent, No. 7578583, granted on Aug. 25, 2009.

C.-C. Chou, W. Wang, and C.-M. Lin, "Microfluid injecting devices capable of inspecting and monitoring nozzle process on a real time basis and related methods," TW Patent, No. I288704, granted on Oct. 21, 2007.

C.-C. Chou and C.-M. Lin, "Surface acoustic wave driven fluid injection devices," TW Patent, No. I265097, granted on Nov. 1, 2006.

C.-C. Chou and C.-M. Lin, "Fluid injection devices with sensors, fluid injection system and method of analyzing fluid in fluid injection devices," TW Patent, No. I265096, granted on Nov. 1, 2006.

T.-T. Wu, C.-M. Lin, and Y.-Y. Chen, "Layered SAW devices using slanted finger interdigital transducerrs," TW Patent, No. I231647, granted on Apr. 21, 2005.

    Degree Thesis

C.-M. Lin, "Temperature-compensated and high-Q piezoelectric aluminum nitride Lamb wave resonators for timing and frequency control applications," Ph.D. Dissertation, Department of Mechanical Engineering, University of California, Berkeley, CA, USA, May 2013.

C.-M. Lin, "Temperature compensation of aluminum nitride Lamb wave resonators utilizing the lowest-order symmetric mode," M.S. Thesis, Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA, USA, Dec. 2012.

C.-M. Lin, "Analysis of RF wide band layered SAW filter using slanted finger interdigital transducer," M.S. Thesis, Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan, Jun. 2003. [Abstract (PDF)]
[Selected as the Best Master's Thesis in 2003 by the National Science Council]