Chris H. Clifford

 
 

I am a graduate student studying electrical engineering at the University of California - Berkeley.  I am in Professor Andrew Neureuther’s research group.  My main research area is extreme ultraviolet (EUV) lithography, specifically EUV masks with buried defects.  My most important contribution to date is a new simulator called RADICAL (Rapid Absorber Defect Interaction Computation for Advanced Lithography).  I am currently using this simulator to further understanding of EUV defects and develop compensation techniques to reduce their effects.

 

Welcome

 

Graduate Student ResearchER

department of electrical engineering and computer sciences

university of California - berkeley