Assorted scanning electron micrographs (SEMs) of MEMS resonators

capacitivegapofa60mhzdiskresonator_small.jpg sidewalletchedusingtheboschprocess_small.jpg meltedmems_small.jpg photo_small.jpg
porouspolysilicon_small.jpg polysiliconelectrodeandmicrocrystallinediamondresonator_small.jpg dielevelviewzoomingin13_small.jpg devicelevelviewzoomingin23_small.jpg
detailofthestemanchorofthediskresonatorzoomingin33_small.jpg crosssectionalview_small.jpg etchedepitaxiallygrownsic_small.jpg etchedepitaxiallygrownsic2_small.jpg
etchedepitaxiallygrownsic3_small.jpg resonatorarray_small.jpg microcrystallinediamondcombdrive_small.jpg polysiliconcombdrive_small.jpg
combdriveresonatorfingers_small.jpg wetetchedaluminumnitride_small.jpg

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