Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences


UC Berkeley



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EE W247B

Introduction to MEMS Design

Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS.


Clark Nguyen, Professor

Clark T.-C. Nguyen received the B. S., M. S., and Ph.D. degrees from the University of California at Berkeley in 1989, 1991, and 1994, respectively, all in Electrical Engineering and Computer Sciences. In 1995, he joined the faculty of the University of Michigan, Ann Arbor, where he was a Professor in the Department of Electrical Engineering and Computer Science up until mid-2006. In 2006, he joined the Department of Electrical Engineering and Computer Sciences at the University of California at Berkeley, where he is now a Professor and a co-Director of the Berkeley Sensor & Actuator Center. His research interests focus on micro electromechanical systems (MEMS) and include integrated micromechanical signal processors and sensors, merged circuit/micromechanical technologies, RF communication architectures, and integrated circuit design and technology. From 1995 to 1997, he was a member of the National Aeronautics and Space Administration (NASA)ís New Millennium Integrated Product Development Team on Communications, which roadmapped future communications technologies for NASA use into the turn of the century. In 2001, Prof. Nguyen founded Discera, Inc., a company aimed at commercializing communication products, based upon MEMS technology, with an initial focus on the very vibrating micromechanical resonators pioneered by his research. He served as Vice President and Chief Technology Officer (CTO) of Discera until mid-2002, at which point he joined the Defense Advanced Research Projects Agency (DARPA) on an IPA, where he served for 3.5 years as the Program Manager of the MEMS, Micro Power Generation (MPG), Chip-Scale Atomic Clock (CSAC), MEMS Exchange (MX), Harsh Environment Robust Micromechanical Technology (HERMIT), Micro Gas Analyzers (MGA), Radio Isotope Micropower Sources (RIMS), RF MEMS Improvement (RFMIP), Navigation-Grade Integrated Micro Gyroscopes (NGIMG), and Micro Cryogenic Coolers (MCC) programs, in the Microsystems Technology Office of DARPA.

Homepage: http://www.eecs.berkeley.edu/Faculty/Homepages/ctnguyen.html
Email:  ctnguyen@eecs


Kristofer Pister, Professor

He received a B.A. in Applied Physics from UC San Diego, 1986, and a M.S. and Ph.D. in Electrical Engineering, UC Berkeley, 1989 and 1992, respectively. Prior to joining the faculty of EECS in 1996, he taught in the Electrical Engineering Department, UCLA. Professor Pister developed Smart Dust, project is aimed at putting a complete sensing/communication platform inside a cubic millimeter. For this project, he was awarded the second annual Alexander Schwarzkopf Prize for Technological Innovation, in 2006, from the I/UCRC Association, a voluntary, independent organization of past and present members of the National Science Foundationís Industry/University Cooperative Research Center program involving 42 Centers, 110 Universities, and thousands of researchers, for developing and successfully commercializing Smart Dust. He has also focused his energies on synthetic insects, which he has characterized as "basically Smart Dust with legs." Professor Pister was award the Alfred F. Sperry Founder Award in 2009 for his "contributions to the science and technology of instrumentation, systems, and automation." Kris is a co-Director of the Berkeley Sensor and Actuator Center (BSAC) and a researcher with the Center for Information Technology Research in the Interest of Society (CITRIS).

Homepage: http://www.eecs.berkeley.edu/Faculty/Homepages/pister.html
Email:  pister@eecs


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