Silicon Carbide-Coated Microcomponents for the Rotary Engine-based Power System

M.B.J. Wijesundara and C. Carraro
(Professors Roya Maboudian --ChemE and Albert P. Pisano)

The goal of this project is to develop a facile method for the realization of SiC-coated Si and SiC-based components for MEMS-based micropower systems.

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