XZR Multi-Degree of Freedom Vertical Comb Drive

K. H. Jeong
(Professor Luke P. Lee --BioE)

The XZR comb drive with electrostatic and thermal actuation will provide multi-DOF controllability and high frequency operation, and is an ideal candidate for optical MEMS applications. The simplicity of fabrication will provide an economical and robust process. The XZR multi-DOF comb drive-based micro-optical components will be tested for fast image scanning, optical tuning facility, and beam steering as well as high-resolution optical detection capability.

Send mail to the author : (jhuggins@eecs.berkeley.edu)

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