MEMS Strain Gauge on Steel: Non-linear Analyses of Resonant Strain Gauges

Todd A. Lauderdale
(Professors Oliver O'Reilly --ME and Albert P. Pisano)

I am working in support of a large project to design a MEMS strain sensor for placement on steel. The goal of the design is to measure small strain in the substrate over a wide range of operating temperatures using a small gauge length. The long-range goals for my portion of the project are to thoroughly describe and predict the changes in the natural frequencies of various novel resonator and chip designs for a range of substrate displacements and operating temperatures.

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