MEMS Strain Gauge on Steel: Resonant Sensor Design and Fabrication

Julian Lippmann
(Professor Albert P. Pisano)
BSAC

The focus of this project is to fabricate a strain sensor capable of measuring micro-strain (10-6) with a gauge length no greater than 1 mm. The sensor will be capable of in-situ mounting on pre-existing, minimally treated steel substrates. In addition, the sensor will also have a dynamic range of at least 0-1000 Hz, and maintain sensitivity and linearity over a range of temperatures and environmental conditions.


Send mail to the author : (jhuggins@eecs.berkeley.edu)


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