RF Dielectric Fluid Immersed Silicon MEMS Tunable Capacitors

Daniel T. McCormick1 and Dr. Zhihong Li2
(Professor Norman Tien)

The objective of this project is to develop micro-electromechanical tunable capacitors employing dielectric fluids. In the case of electrostatic, mechanically tunable capacitors, the goal is to increase the capacitance per unit area and the tuning range, reduce the mechanical noise, and improve long-term reliability.

1Graduate Student (non-EECS)
2Postdoctoral Researcher

Send mail to the author : (jhuggins@eecs.berkeley.edu)

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