Silicon Carbide-based Nanomechanical Filter Arrays

Di Gao, Muthu B.J. Wijesundara, and Carlo Carraro
(Professors Roger T. Howe and Roya Maboudian --ChemE)

The goal of this project is to design, fabricate, and test novel SiC nanomechanical filter arrays for integrated microwatt transceivers. In order to achieve this goal, a series of microfabrication techniques including deposition, etching, and metalization of poly-SiC films will be developed. In addition, the mechanical and electrical properties of the deposited SiC films will be characterized.

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