MEMS Rotary Engine Power System/Soft Magnetic Pole Integration

Debbie G. Jones
(Professor Albert P. Pisano)

The objective of this research project is electroplating a soft magnetic material into the silicon rotor for the integrated generator design of the MEMS REPS project. We will use characterization of an advanced electroplating cell to control the deposition rate, composition, and residual stress of nickel-iron (NiFe). We will use fluidic self-assembly to position pre-released rotors over a partially insulated seed layer for selective deposition.

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