Fabrication of a High Aspect Ratio Piezoelectric Microactuator

Jonathan D. Foster
(Professor Richard M. White)

We seek to develop a new type of microactuator based on high aspect ratio piezoelectric processing. These microactuators utilize a combination of high aspect ratio patterning and conformal deposition in their fabrication. The output motion of these actuators is directed laterally, that is, in the plane of the wafer, allowing the interaction of actuators with each other. Modeling of these actuators indicates that they should provide large displacements and forces due to the high energy density of the actuator structure.

Send mail to the author : (jhuggins@eecs.berkeley.edu)

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