Integration of NEMS and MEMS by Localized Growth of Nanowires

Ongi Englander
(Professor Liwei Lin --ME)
BSAC

Integrated manufacturing of nano-to-micro systems is critical for the practical applications of nanotechnology. This research project aims (1) to develop an integrated manufacturing process to connect a nano-system to a micro-system and (2) to utilize the integrated structure for practical applications (such as enhanced sensors or heat dissipation).


Send mail to the author : (jhuggins@eecs.berkeley.edu)


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