NiTi Shape Memory Alloy (SMA) Films: Best Material for MEMs Actuators

Michael Vestel1
(Professor Albert P. Pisano)
BSAC

This research is based upon the hypothesis that there is a relationship between devitrification temperature and the microstructure of Ni-Ti films that are initially deposited in an amorphous state and then subsequently annealed to induce crystallization. This is a fully testable hypothesis, amenable to parametric control of annealing temperatures, annealing times, dynamic observations, and high spatial resolution characterization of the crystallized product.

1Postdoctoral Researcher

Send mail to the author : (jhuggins@eecs.berkeley.edu)


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