Performance Comparison of Integrated Z-axis Frame Microgyroscopes

Moorthi Palaniapan
(Professor Roger T. Howe)

The purpose of this work is to evaluate the performance of two different frame gyroscopes, namely the inside drive outside sense (IDOS) and the inside sense outside drive (ISOD) frame gyroscopes. To verify the performance difference, these integrated surface-micromachined frame gyroscopes were designed and fabricated on a single chip with the analog devices modular-MEMS (MOD-MEMS) process using 6 mm thick polysilicon as the structural material and a 5 V 0.8 mm foundry process.

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