Strain Gauge on Steel: Selective Strain Isolation

I-Yang Chen
(Professor Albert P. Pisano)
BSAC

The goal of this project is to design isolation trenches on a MEMS strain gauge such that the sensors accurately measure the strain field on a steel substrate, and devise methods to protect CMOS from strain experienced by the remainder of the strain gauge package.


Send mail to the author : (jhuggins@eecs.berkeley.edu)


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