GHz Nano-Mechanical Resonators

Brian Bircumshaw
(Professors Roger T. Howe, Oliver O'Reilly --ME, and Albert P. Pisano)

The goal of this project is to design, fabricate, and test multi-pole nano-mechanical resonators (NMRs) with center frequencies in the GHz range for low-power telecommunications applications. We intend to utilize polycrystalline silicon-germanium (poly-SiGe) and poly-Ge as the structural and sacrificial layers that will allow us to fabricate MEMS directly on top of foundry CMOS.

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