List of Abstracts for Tsu-Jae King

The EECS Research Summary for 2003

As-Deposited Poly-SiGe MEMS Structure with Low Stress and Low Strain Gradient Blake C.-Y. Lin
Planar Self-Aligned Double Gate Sub 50 nm MOSFETs Sriram Balasubramanian
Capacitorless DRAM Technologies for High Density Memory Applications Charles Kuo
Molybdenum Gate Work-Function Engineering for Ultra-Thin-Body Silicon-on-Insulator (UTB SOI) MOSFETs Daewon Ha
Pushkar Ranade
Yang-Kyu Choi
Impact of Gate Process Technology on EOT of HfO2 Gate Dielectric Daewon Ha
Hideki Takeuchi
Excimer Laser Annealing for Reducing Gate Depletion Effects in Deep-Submicron CMOS Technologies Hiu Yung Wong
Thin Silicon Nitride Layers for Abrupt Junctions Katherine Buchheit
Effects of Process-Induced Variations on Asymmetric vs. Symmetric Double-Gate MOSFETs Kyoungsub Shin
Sriram Balasubramanian
Hiu Yung Wong
Leland Chang
Selective SiGe CVD Process for Raised-S/D FinFET Application Kyoungsub Shin
Industrial FinFET Fabrication Using Standard Processing Tools Leland Chang
Contact Resistivity of p+ SiGe Deposited onto TiN Marie-Ange Eyoum
Development of a Focused Ion Beam System for High-throughput Maskless, Direct Lithography Qing Ji
Sub-10 nm FETs: Thin Body Back Gated Schottky Transistors Varadarajan Vidya
Threshold Voltage Control at Double-Gate Devices Yang-Kyu Choi
(14 abstracts total)