The goal of this project is to design, fabricate, and characterize an electrochemical oxygen micro-generator suitable for use in high density miniature cell culture arrays. As the design and fabrication of the bubbler are complete, we are currently characterizing the gas production of the bubbler. Current goals include the characterization of growth rates of bacterial suspensions growing on oxygen supplied by our bubbler and the determination of generated gas purity.
The goal of this project is to design, fabricate, and test novel SiC nanomechanical filter arrays for integrated microwatt transceivers. In order to achieve this goal, a series of microfabrication techniques including deposition, etching, and metalization of poly-SiC films will be developed. In addition, the mechanical and electrical properties of the deposited SiC films will be characterized.
The goal of this project is to design, fabricate, and test multi-pole nano-mechanical resonators (NMRs) with center frequencies in the GHz range for low-power telecommunications applications. We intend to utilize polycrystalline silicon-germanium (poly-SiGe) and poly-Ge as the structural and sacrificial layers that will allow us to fabricate MEMS directly on top of foundry CMOS.
The goal of this project is to optimize the SiGe film deposition process with laser thermo annealing and make 3 mm SiGe film possible for post CMOS radio frequency MEMS resonators. Economical growth rate, low thermal budget, small stress gradient, and high quality factor are the requirements for the SiGe film. Reducing capacitance feedthrough and expanding the frequency limit of the electronics will be essential in high frequency signal detection.
The goal of this project is to extend the fluidic self-assembly processes demonstrated recently at BSAC in order to assemble microfluidic components onto plastic substrates.
The goal of this project is to take the fluidic microassembly technique, developed by Uthara Srinivasan, and extend it such that electrical interconnects can be made between a microcomponent and the substrate.
The purpose of this work is to evaluate the performance of two different frame gyroscopes, namely the inside drive outside sense (IDOS) and the inside sense outside drive (ISOD) frame gyroscopes. To verify the performance difference, these integrated surface-micromachined frame gyroscopes were designed and fabricated on a single chip with the analog devices modular-MEMS (MOD-MEMS) process using 6 mm thick polysilicon as the structural material and a 5 V 0.8 mm foundry process.
The goal of this project is to develop and batch fabricate a very precise electrode for a high performance capacitive sensor using microfabrication techniques.
The goal of this research is to design and fabricate a millimeter-wave patch antenna, an anchor-tolerant ring resonator, and integrate the antenna and resonator to demonstrate the receiver front-end of an integrated radio platform.
The goal of this research is to design an X-axis rate gyroscope with vertical drive, to enable in-plane sensing.