The goal of this project is to fabricate 3D refractive microlenses and lenslets using surface micromachining and to investigate their use in micro-optical systems.
This project will demonstrate piston and tip/tilt actuation of an array of 500-750 Ám-radius hexagonal mirrors with fill factors exceeding 98%. The mirrors will actuate above the substrate in a piston motion over a range of greater than 5 Ám for astronomy applications and over 20 Ám for vision science applications. Tip/tilt rotations of about a degree are also required. The frequency response must exceed 4 kHz for astronomy and 100 Hz for vision science. Finally, a scalable interconnect must be investigated that will connect from hundreds to thousands of mirrors.
The focus of this project is to fabricate highly sensitive electrostatic-charge and remote-voltage sensors, using silicon micromachining.