Abstracts for Richard S. Muller

The EECS Research Summary for 2003


3D Refractive Microlenses and Lenslets

Hyuck Choo
(Professor Richard S. Muller)
BSAC

The goal of this project is to fabricate 3D refractive microlenses and lenslets using surface micromachining and to investigate their use in micro-optical systems.


Send mail to the author : (jhuggins@eecs.berkeley.edu)

MEMS, Segmented, Deformable Mirror for Adaptive Optics

Michael A. Helmbrecht1
(Professor Richard S. Muller)
BSAC

This project will demonstrate piston and tip/tilt actuation of an array of 500-750 Ám-radius hexagonal mirrors with fill factors exceeding 98%. The mirrors will actuate above the substrate in a piston motion over a range of greater than 5 Ám for astronomy applications and over 20 Ám for vision science applications. Tip/tilt rotations of about a degree are also required. The frequency response must exceed 4 kHz for astronomy and 100 Hz for vision science. Finally, a scalable interconnect must be investigated that will connect from hundreds to thousands of mirrors.

1Postdoctoral Researcher

Send mail to the author : (jhuggins@eecs.berkeley.edu)

Microsystems for Electrostatic Sensing

Patrick S. Riehl
(Professor Richard S. Muller)
BSAC

The focus of this project is to fabricate highly sensitive electrostatic-charge and remote-voltage sensors, using silicon micromachining.


Send mail to the author : (jhuggins@eecs.berkeley.edu)