We seek to develop a new type of microactuator based on high aspect ratio piezoelectric processing. These microactuators utilize a combination of high aspect ratio patterning and conformal deposition in their fabrication. The output motion of these actuators is directed laterally, that is, in the plane of the wafer, allowing the interaction of actuators with each other. Modeling of these actuators indicates that they should provide large displacements and forces due to the high energy density of the actuator structure.
Sequential flow injection (FI) involves the temporary immobilization of functionalized microspheres as a renewable surface for (bio) chemical assays. We describe a microfabricated FI system that employs the ultrasonic flexural plate wave (FPW) device to acoustically capture microspheres from fluid flow.
We report on the feasibility of coupling electrochemical vapor sensors to the Smart Dust wireless communication platform. Small, sensitive, and selective electrochemical sensors, which are available commercially for many chemical vapors, can advantageously be coupled to the Mica motes in a Smart Dust network.