Abstracts for Roya Maboudian --ChemE

The EECS Research Summary for 2003


Silicon Carbide-based Nanomechanical Filter Arrays

Di Gao, Muthu B.J. Wijesundara, and Carlo Carraro
(Professors Roger T. Howe and Roya Maboudian --ChemE)
BSAC

The goal of this project is to design, fabricate, and test novel SiC nanomechanical filter arrays for integrated microwatt transceivers. In order to achieve this goal, a series of microfabrication techniques including deposition, etching, and metalization of poly-SiC films will be developed. In addition, the mechanical and electrical properties of the deposited SiC films will be characterized.


Send mail to the author : (jhuggins@eecs.berkeley.edu)

Silicon Carbide-Coated Microcomponents for the Rotary Engine-based Power System

M.B.J. Wijesundara and C. Carraro
(Professors Roya Maboudian --ChemE and Albert P. Pisano)
BSAC

The goal of this project is to develop a facile method for the realization of SiC-coated Si and SiC-based components for MEMS-based micropower systems.


Send mail to the author : (jhuggins@eecs.berkeley.edu)