The goal of this project is to design, fabricate, and test multi-pole nano-mechanical resonators (NMRs) with center frequencies in the GHz range for low-power telecommunications applications. We intend to utilize polycrystalline silicon-germanium (poly-SiGe) and poly-Ge as the structural and sacrificial layers that will allow us to fabricate MEMS directly on top of foundry CMOS.
I am working in support of a large project to design a MEMS strain sensor for placement on steel. The goal of the design is to measure small strain in the substrate over a wide range of operating temperatures using a small gauge length. The long-range goals for my portion of the project are to thoroughly describe and predict the changes in the natural frequencies of various novel resonator and chip designs for a range of substrate displacements and operating temperatures.