Abstracts for Liwei Lin --ME

The EECS Research Summary for 2003


Reverse Capillary Action Constant Pressure Accumulation Device

Eric Hobbs
(Professors Liwei Lin --ME and Albert P. Pisano)
BSAC

The main goal of this project is the development of water-powered, osmotic micropumps to serve as clean, compact, and inexpensive power sources for bioassay and drug delivery applications. Osmosis is applied to design micropumps fabricated by MEMS-compatible processes for the integration with other microfluidic devices. The innovative osmotic micropumps will be able to serve as clean, compact, and inexpensive power sources for bioassay and drug delivery systems.


Send mail to the author : (jhuggins@eecs.berkeley.edu)

MEMS Strain Gauge on Steel: Testing Localized Silicon-Steel Bonds

Ted Prescop
(Professors Liwei Lin --ME and Albert P. Pisano)
BSAC

The overall group project aims to produce a high-resolution MEMS strain gauge for applications on steel. This particular project will develop a rapid bonding process for installing vacuum sealed MEMS strain sensor modules to steel components. To ensure that the MEMS strain gauge accurately measures the strain within a steel substrate, properties of the bond layer between silicon and steel must be observed and determined. A uniaxial strain rig will be used to measure the Youngs modulus, creep, and hysteresis of silicon-steel bonds within a temperature controlled environment. A mN strain gauge will be used to characterize the shear modulus and strength of microfabricated bonds of various shapes and widths.


Send mail to the author : (jhuggins@eecs.berkeley.edu)

Selective Induction Heating and Bonding

Andrew Cao
(Professor Liwei Lin --ME)
BSAC

The goal of this project is to develop wafer bonding and hermetic sealing technology based on induction heating for MEMS and IC post packaging. We will use induction heating to remotely operate thermal actuators for the MEMS assembly.


Send mail to the author : (jhuggins@eecs.berkeley.edu)

MEMS Sensor for Hard Disk Glide Test

Jongbaeg Kim
(Professor Liwei Lin --ME)
BSAC

The goal of this project is to model, design, fabricate, and test a micro force and motion sensor to identify the severity of the disk/head interfacial contact and the effect on the data accessing during the hard disk glide test.


Send mail to the author : (jhuggins@eecs.berkeley.edu)

Ultrasonic Bonding for MEMS Hermetic Packaging and Assembly

Jongbaeg Kim and Mu Chiao
(Professor Liwei Lin --ME)
BSAC

The goal of this project is to develop ultrasonic bonding as a new bonding method for MEMS level hermetic sealing and packaging. We aim to demonstrate the feasibility and find the right bonding conditions and parameter values.


Send mail to the author : (jhuggins@eecs.berkeley.edu)

High Frequency MEMS Resonator for Wireless Communication Applications

Ki Bang Lee1 and Steve Ryder
(Professor Liwei Lin --ME)
BSAC

The goal of this project is to develop and characterize a high frequency MEMS resonator for wireless communication applications with CMOS compatibility.

1Postdoctoral Researcher

Send mail to the author : (jhuggins@eecs.berkeley.edu)

Disposal Microbattery for MEMS Devices

Ki Bang1 and Firas Sammoura
(Professor Liwei Lin --ME)
BSAC

The goal of this project is to develop microbatteries that can be integrated with disposable MEMS devices as power sources for BioMEMS and MEMS products, including disposable diagnostic and BioMEMS chips.

1Postdoctoral Researcher

Send mail to the author : (jhuggins@eecs.berkeley.edu)

Integrated Electrochemical Assay for Glucose/Lactate Detection

Kwok-Siong Teh
(Professor Liwei Lin --ME)
BSAC

The goal of this project is to develop both silicon and polymeric chemical sensors to be integrated with micro-osmotic pumps, ultra low leakage micro-valves, micro-accumulators, and dialysis needles, for complete a bioassay system.


Send mail to the author : (jhuggins@eecs.berkeley.edu)

Low Temperature Fabrication of Nickel Composite Film for MEMS Applications

Kwok-Siong Teh
(Professor Liwei Lin --ME)
BSAC

The focus of this project is to develop a nickel-composite film via a low temperature process that has superior mechanical and electrical properties for applications in RF MEMS.


Send mail to the author : (jhuggins@eecs.berkeley.edu)

Micromachined Microbial Fuel Cells

Mu Chiao and Kien B. Lam
(Professor Liwei Lin --ME)
BSAC

This project specifically aims to develop a micromachined microbial fuel cell (mMFC) as a bio-compatible power source for implantable medical devices. In general, however, mMFCs are also being developed as alternatives to other micro power sources like micro batteries and micro engines.


Send mail to the author : (jhuggins@eecs.berkeley.edu)

Integration of NEMS and MEMS by Localized Growth of Nanowires

Ongi Englander
(Professor Liwei Lin --ME)
BSAC

Integrated manufacturing of nano-to-micro systems is critical for the practical applications of nanotechnology. This research project aims (1) to develop an integrated manufacturing process to connect a nano-system to a micro-system and (2) to utilize the integrated structure for practical applications (such as enhanced sensors or heat dissipation).


Send mail to the author : (jhuggins@eecs.berkeley.edu)

Micro Encapsulation Processes for Fluids

Sha Li
(Professor Liwei Lin --ME)
BSAC

The goal of this project is to develop microencapsulation processes for fluids with potential applications to pharmaceutical, chemical, and optical MEMS devices.


Send mail to the author : (jhuggins@eecs.berkeley.edu)

Water-Powered Micropumps for Bioassay and Drug Delivery Systems

Yu-Chuan Su
(Professor Liwei Lin --ME)
BSAC

The main goal of this project is the development of water-powered, osmotic micropumps for bioassay and drug delivery applications. Osmosis is applied to design micropumps fabricated by MEMS-compatible processes for the integration with other microfluidic devices. The innovative osmotic micropumps will be able to serve as clean, compact, and inexpensive power sources for bioassay and drug delivery systems.


Send mail to the author : (jhuggins@eecs.berkeley.edu)