The MEMS rotary engine power system (MEMS REPS) 2.4 mm engine is the power generating source for the MEMS REPS and it will be the first design to be integrated with an electric generator.
The goal of the Mini Rotary Engine Power System (Mini REPS) project is to develop and fabricate a small scale power generation device providing comparably high specific energy density. Power will be generated by a liquid hydrocarbon fueled Wankel rotary engine.
The goal of this project is to design, fabricate, and test multi-pole nano-mechanical resonators (NMRs) with center frequencies in the GHz range for low-power telecommunications applications. We intend to utilize polycrystalline silicon-germanium (poly-SiGe) and poly-Ge as the structural and sacrificial layers that will allow us to fabricate MEMS directly on top of foundry CMOS.
The main goal of this project is the development of water-powered, osmotic micropumps to serve as clean, compact, and inexpensive power sources for bioassay and drug delivery applications. Osmosis is applied to design micropumps fabricated by MEMS-compatible processes for the integration with other microfluidic devices. The innovative osmotic micropumps will be able to serve as clean, compact, and inexpensive power sources for bioassay and drug delivery systems.
The overall group project aims to produce a high-resolution MEMS strain gauge for applications on steel. This particular project will develop a rapid bonding process for installing vacuum sealed MEMS strain sensor modules to steel components. To ensure that the MEMS strain gauge accurately measures the strain within a steel substrate, properties of the bond layer between silicon and steel must be observed and determined. A uniaxial strain rig will be used to measure the Youngs modulus, creep, and hysteresis of silicon-steel bonds within a temperature controlled environment. A mN strain gauge will be used to characterize the shear modulus and strength of microfabricated bonds of various shapes and widths.
The goal of this project is to develop a facile method for the realization of SiC-coated Si and SiC-based components for MEMS-based micropower systems.
I am working in support of a large project to design a MEMS strain sensor for placement on steel. The goal of the design is to measure small strain in the substrate over a wide range of operating temperatures using a small gauge length. The long-range goals for my portion of the project are to thoroughly describe and predict the changes in the natural frequencies of various novel resonator and chip designs for a range of substrate displacements and operating temperatures.
A fuel injection for the MEMS rotary engine power system (REPS) is being designed, fabricated, and characterized with the long-range goal of incorporating this system as the engine’s intake manifold. To attain this goal it is essential to gain an understanding of evaporation, namely the phase eruption phenomena, of liquid hydrocarbon fuels in microchannels.
An integrated, nano mechanically-regulated atomic clock will be designed, fabricated, and evaluated to reduce the size, mass, and power consumption and enable use on portable platforms. This particular project will specifically develop a thin film shield for modulation of a magnetic field.
The goal of this project is to design a dynamic fuel evaporator for a MEMS rotary engine power system (REPS). The instability of microscale flow boiling in microstructures will be identified to synchronize with the engine’s working frequency so as to generate a constant mass-flow rate of vaporized fuel.
The goal of the MEMS rotary engine power system (MEMS REPS) is to develop an autonomous, commercially viable, portable power system based on an integrated power generator and rotary internal combustion engine. This engine will have a continuous power output of ~100 mW, and is designed to leverage the specific energy advantage of liquid hydrocarbon fuels over current portable power sources. The design also allows for rapid field implementation in a variety of applications requiring localized power generation. Applications include interconnected sensor networks or land warrior power supplies.
The objective of this research project is electroplating a soft magnetic material into the silicon rotor for the integrated generator design of the MEMS REPS project. We will use characterization of an advanced electroplating cell to control the deposition rate, composition, and residual stress of nickel-iron (NiFe). We will use fluidic self-assembly to position pre-released rotors over a partially insulated seed layer for selective deposition.
The goal of the MEMS REPS/apex seal design is to model, design, and fabricate an engine sealing system capable of high compression ratios.
The focus of this project is to design and fabricate a mechanical interconnect system for use in MEMS and miniaturized applications, enabling modular construction of complex 3D structures, and generic enough to be compatible with most designs without modifying the original devices.
The goal of this project is to design isolation trenches on a MEMS strain gauge such that the sensors accurately measure the strain field on a steel substrate, and devise methods to protect CMOS from strain experienced by the remainder of the strain gauge package.
For the demonstration unit of the 2.4 mm Wankel rotary engine, the engine will be redesigned as an expander to be run on compressed gases. Once the expander micro-fabrication is complete, an integrated generator will be incorporated to power an electronic device.
The focus of this project is to design a valve suitable for integration into a portable, wearable microfluidic device. Wearable microfluidic devices have a very limited supply of working fluid and the use of this fluid must be very tightly budgeted to increase the life of the system. Microvalves incorporated into this system must have incredibly low leakage rates to reduce wasted fluid by increasing the precision that fluid is distributed to other parts of the system. Additionally, due to the meager amount of energy available from the system battery, the valves must have very low power consumption.
The goal of this project is to complete the fluidic modeling and determine the leakage rates of a micro-wankel engine. We will then aim to verify the modeling through experimental findings.
The focus of this project is to fabricate a strain sensor capable of measuring micro-strain (10-6) with a gauge length no greater than 1 mm. The sensor will be capable of in-situ mounting on pre-existing, minimally treated steel substrates. In addition, the sensor will also have a dynamic range of at least 0-1000 Hz, and maintain sensitivity and linearity over a range of temperatures and environmental conditions.
The development of a portable power system using liquid hydrocarbon as fuel promises significant advantages in energy density over conventional batteries. The goal of MEMS rotary engine power system (REPS) is to fabricate a small scale (1.2 mm3 displacement) rotary (Wankel) engine with an integrated electric generator and all necessary ancillary equipment (thermal management, fuel delivery, thermal packaging, etc.).
In this project, we will fabricate, test, and analyze double-T fluid channels. The results will determine the feasibility of using pressure driven flow through a double-T metering section for discrete volume definition.
This research is based upon the hypothesis that there is a relationship between devitrification temperature and the microstructure of Ni-Ti films that are initially deposited in an amorphous state and then subsequently annealed to induce crystallization. This is a fully testable hypothesis, amenable to parametric control of annealing temperatures, annealing times, dynamic observations, and high spatial resolution characterization of the crystallized product.
The overall group project aims to produce a high-resolution MEMS strain gauge for applications on steel. This project aims to design and fabricate test rigs. The test rig design has three objectives: quantify accuracy and resolution of the MEMS strain gauges attached to steel bodies, provide comparison performance data to conventional foil strain gauges, and verify that these MEMS strain gauges will be able to accurately measure narrow-width strain events. A four-point bend test rig has been produced to satisfy the first two project aims. Further work will consist of testing specimens and integrating temperature control into the test rig.
In this project, nano-scale resonators will be designed and fabricated to mechanically modulate a magnetic field, and incorporated into an integrated nano mechanically-regulated atomic clock in order to reduce size and power consumption. The project responsibility is transitioning from Ms. Robin Liu to Mr. James Porter.