Research Projects - Nathan W. Cheung

Small Projects

• Engineered High Mobility CMOS Substrates
  Haiyan Jin and Nathan W. Cheung
• Zero-Footprint Optical Metrology Wafer
  John Gerling and Nathan W. Cheung

Research Centers

• Feature-Level Compensation and Control (FLCC)
• Integrated Modeling Process and Computation for Technology (IMPACT)
• Microfabrication Lab (Microlab)

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