Research Projects - Micro/Nano Electro Mechanical Systems (MEMS)

Large Projects

• Center for Micro/Nano Scaling Induced Physics (MiNaSIP)
  Clark Nguyen, Liwei Lin and Piazza Gianluca
• CMOS Circuits for MEMS Aluminum Nitride Inertial Sensors (MINT)
  Bernhard Boser, Richard Przybyla and Igor Izyumin
• MEMS Electronic-Photonic Heterogeneous Integration (MEPHI) FMCW LADAR (EPHI)
  Ming C. Wu, Constance Chang-Hasnain, Eli Yablonovitch, Bernhard Boser, James Ferrara, Li Zhu, Yi Rao, Niels Quack, Sangyoon Han, Christopher Lalau Keraly and Simone Gambini
• Micro-Electro-Mechanical Relays for VLSI Applications
  Elad Alon, Tsu-Jae King Liu, Matthew Spencer and Hei Kam
• Micromechanical Power Amplifier (NEMS)
  Clark Nguyen and Elad Alon
• Q-Boosted Optomechanical Resonators (ORCHID)
  Clark Nguyen and Ming C. Wu
• Real-Time Frequency Gating Spectrum Analyzer (CSSA)
  Clark Nguyen, Albert Pisano and Liwei Lin

Small Projects

• A Micromechanical RF Channelizer
  Clark Nguyen
• Light-Actuated Digital Microfluidics (Optoelectrowetting)
  Shao Ning Pei, Justin K Valley and Ming C. Wu
• Maskless Droplet-on-Demand (DoD) Systems
  Jeffrey Bokor and Yiping Zhu

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