2009 Research Summary - Andrew R. Neureuther
Large Projects
- Optical Transformer for Surface-Enhanced Raman Spectroscopy (SERS)
Ming C. Wu, Eli Yablonovitch, Constance Chang-Hasnain, Jeffrey Bokor, Andrew R. Neureuther, Luke Lee, Jim Schuck and Jeff Neaton
Small Projects
- Characterization and Monitoring of Photomask Edge Effects
Marshal Miller and Andrew R. Neureuther - Fast 3D Simulation and Compensation for Buried Defects in Extreme Ultraviolet Masks with Absorber Features
Chris Heinz Clifford and Andrew R. Neureuther - Hyper-Sensitive Parameter-Identifying Ring Oscillators for Lithography Process Monitoring
Andrew R. Neureuther - Modeling Timing Across the Lithographic Process Window
Eric Y Chin and Andrew R. Neureuther - Post-Decomposition Assessment of Double Patterning Layout
Juliet Alison Rubinstein and Andrew R. Neureuther