Capacitive Characterization of Nanotube and Nanowire Devices
Yu-Chih Tseng and Jeffrey Bokor
Microelectronics Advanced Research Corporation
Capacitance-voltage measurement is useful in characterizing semiconductor devices and interfaces. We apply this method in this project to characterize the Schottky contact between carbon nanotube and titanium, as well as silicon nanowire transistors. We have developed an instrument capable of measuring capacitances as small as a few attofarads (1 E-18 F), and at low temperatures. This study should shed light on the electrical properties of the nanoscale semiconductor interfaces.