2008 Research Summary - Andrew R. Neureuther

Small Projects

• Fast 3D Simulation and Compensation for Buried Defects in Extreme Ultraviolet Masks with Absorber Features
  Chris Heinz Clifford and Andrew R. Neureuther
• Modeling Timing Across the Lithographic Process Window
  Eric Y Chin and Andrew R. Neureuther
• Novel EM Effects
  Daniel Peter Ceperley and Andrew R. Neureuther
• Post Decomposition Assessment of Double Patterning Layout
  Juliet Alison Rubinstein and Andrew R. Neureuther