Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences


UC Berkeley


2008 Research Summary

Tribology Test Chip for Contacting NEMS Designs (TTCfCND)

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Donovan Lee, Roya Maboudian and Tsu-Jae King Liu

A tribology test chip has been simulated, designed, and fabricated in-house. The utilization of a nanoscale gap to accurately control contact area has presented a challenge to processing. Experiments are underway to study the dynamics of sacrificial etching in high aspect ratio nanogaps [1]. Physical metrics observed from these experiments will lead the way for future NEMS logic and switching operations [2,3] as well as provide an in-situ method for surface force analysis.

Figure 1
Figure 1: A typical view of an actuator used to study surface phenomenon. Process development was conducted in the UC Berkeley Microfabrication Laboratory

Figure 2
Figure 2: An adhesion force test structure building-up charge due to electron stagnation at the unreleased point of contact caused by the electron microscope

D. Lee, T. Seidel, J. Dalton, and T.-J. King Liu, "ALD Refill of Nanometer-Scale Gaps with High-k Dielectric for Advanced CMOS Technologies," Electrochemical and Solid-State Letters, Vol 10, Issue 9, 2007, pp. H257-H259.
H. Kam, D. Lee, R. T. Howe, and T.-J. King, "A New Nano-Electro-Mechanical Field Effect Transistor (NEMFET) Design for Low-Power Electronics," IEEE International Electron Devices Meeting Technical Digest, 2005, pp. 477-480.
W. Y. Choi, H. Kam, D. Lee, J. Lai, and T.-J. King Liu, "A Novel Nano-Electro-Mechanical Non-Volatile Memory (NEMory) Device for 3D Integration," IEEE International Electron Devices Meeting, 2007.