History of the UC Berkeley Microlab

Katalin Voros

EECS Department
University of California, Berkeley
Technical Report No. UCB/EECS-2013-158
September 11, 2013

http://www.eecs.berkeley.edu/Pubs/TechRpts/2013/EECS-2013-158.pdf

The UC Berkeley Microfabrication Laboratory (Microlab) in Cory Hall had its opening dedication ceremony on 23 March 1983. It was officially closed on 31 December 2010. This report is the documentation, in wide swathes, of 28 years of operation, including management of resources: facilities, staff, finances, and related activities of control, communications and planning.

Although the Microlab in Cory Hall ceased to exist, research operations continue in the new Marvell Nanofabrication Laboratory (NanoLab) in Sutardja Dai Hall, the second reincarnation of the original Integrated Circuits Laboratory of 1962. Thus, the tradition of cutting edge research based on micro/nano-electronic fabrication continues at Berkeley.


BibTeX citation:

@techreport{Voros:EECS-2013-158,
    Author = {Voros, Katalin},
    Title = {History of the UC Berkeley Microlab},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2013},
    Month = {Sep},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2013/EECS-2013-158.html},
    Number = {UCB/EECS-2013-158},
    Abstract = {The UC Berkeley Microfabrication Laboratory (Microlab)  in Cory Hall had its opening dedication ceremony on 23 March 1983. It was officially closed on 31 December 2010. This report is the documentation, in wide swathes, of 28 years of operation, including management of resources:  facilities, staff, finances, and related activities of control, communications and planning.

Although the Microlab in Cory Hall ceased to exist, research operations continue in the new Marvell Nanofabrication Laboratory (NanoLab) in Sutardja Dai Hall, the second reincarnation of the original Integrated Circuits Laboratory of 1962. Thus, the tradition of cutting edge research based on micro/nano-electronic fabrication continues at Berkeley.}
}

EndNote citation:

%0 Report
%A Voros, Katalin
%T History of the UC Berkeley Microlab
%I EECS Department, University of California, Berkeley
%D 2013
%8 September 11
%@ UCB/EECS-2013-158
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2013/EECS-2013-158.html
%F Voros:EECS-2013-158