In-Situ, Portable Monitoring Methods for Photolithography Characterization

Jing Xue

EECS Department
University of California, Berkeley
Technical Report No. UCB/EECS-2009-88
May 29, 2009

http://www.eecs.berkeley.edu/Pubs/TechRpts/2009/EECS-2009-88.pdf

Advisor: Costas J. Spanos

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BibTeX citation:

@phdthesis{Xue:EECS-2009-88,
    Author = {Xue, Jing},
    Title = {In-Situ, Portable Monitoring Methods for Photolithography Characterization},
    School = {EECS Department, University of California, Berkeley},
    Year = {2009},
    Month = {May},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2009/EECS-2009-88.html},
    Number = {UCB/EECS-2009-88}
}

EndNote citation:

%0 Thesis
%A Xue, Jing
%T In-Situ, Portable Monitoring Methods for Photolithography Characterization
%I EECS Department, University of California, Berkeley
%D 2009
%8 May 29
%@ UCB/EECS-2009-88
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2009/EECS-2009-88.html
%F Xue:EECS-2009-88

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