Data Compression for Maskless Lithography Systems: Architecture, Algorithms and Implementation

Vito Dai

EECS Department
University of California, Berkeley
Technical Report No. UCB/EECS-2008-55
May 19, 2008

http://www.eecs.berkeley.edu/Pubs/TechRpts/2008/EECS-2008-55.pdf

Advisor: Avideh Zakhor

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BibTeX citation:

@phdthesis{Dai:EECS-2008-55,
    Author = {Dai, Vito},
    Title = {Data Compression for Maskless Lithography Systems: Architecture, Algorithms and Implementation},
    School = {EECS Department, University of California, Berkeley},
    Year = {2008},
    Month = {May},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2008/EECS-2008-55.html},
    Number = {UCB/EECS-2008-55}
}

EndNote citation:

%0 Thesis
%A Dai, Vito
%T Data Compression for Maskless Lithography Systems: Architecture, Algorithms and Implementation
%I EECS Department, University of California, Berkeley
%D 2008
%8 May 19
%@ UCB/EECS-2008-55
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2008/EECS-2008-55.html
%F Dai:EECS-2008-55

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