Devices, Structures, and Processes for Optical MEMS

Hyuck Choo

EECS Department
University of California, Berkeley
Technical Report No. UCB/EECS-2007-50
May 5, 2007

http://www.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-50.pdf

Advisor: Richard S. Muller


BibTeX citation:

@phdthesis{Choo:EECS-2007-50,
    Author = {Choo, Hyuck},
    Title = {Devices, Structures, and Processes for Optical MEMS},
    School = {EECS Department, University of California, Berkeley},
    Year = {2007},
    Month = {May},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-50.html},
    Number = {UCB/EECS-2007-50}
}

EndNote citation:

%0 Thesis
%A Choo, Hyuck
%T Devices, Structures, and Processes for Optical MEMS
%I EECS Department, University of California, Berkeley
%D 2007
%8 May 5
%@ UCB/EECS-2007-50
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-50.html
%F Choo:EECS-2007-50