Devices, Structures, and Processes for Optical MEMS
Hyuck Choo
EECS Department
University of California, Berkeley
Technical Report No. UCB/EECS-2007-50
May 5, 2007
http://www.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-50.pdf
Advisor: Richard S. Muller
BibTeX citation:
@phdthesis{Choo:EECS-2007-50,
Author = {Choo, Hyuck},
Title = {Devices, Structures, and Processes for Optical MEMS},
School = {EECS Department, University of California, Berkeley},
Year = {2007},
Month = {May},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-50.html},
Number = {UCB/EECS-2007-50}
}
EndNote citation:
%0 Thesis %A Choo, Hyuck %T Devices, Structures, and Processes for Optical MEMS %I EECS Department, University of California, Berkeley %D 2007 %8 May 5 %@ UCB/EECS-2007-50 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-50.html %F Choo:EECS-2007-50