Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Devices, Structures, and Processes for Optical MEMS

Hyuck Choo

EECS Department
University of California, Berkeley
Technical Report No. UCB/EECS-2007-50
May 5, 2007

http://www.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-50.pdf

Advisor: Richard S. Muller


BibTeX citation:

@phdthesis{Choo:EECS-2007-50,
    Author = {Choo, Hyuck},
    Title = {Devices, Structures, and Processes for Optical MEMS},
    School = {EECS Department, University of California, Berkeley},
    Year = {2007},
    Month = {May},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-50.html},
    Number = {UCB/EECS-2007-50}
}

EndNote citation:

%0 Thesis
%A Choo, Hyuck
%T Devices, Structures, and Processes for Optical MEMS
%I EECS Department, University of California, Berkeley
%D 2007
%8 May 5
%@ UCB/EECS-2007-50
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-50.html
%F Choo:EECS-2007-50