Methods and Devices for Optical and Electrical Metrology with Application to Phase-Shifting Interferometers, Torsional Microstructures, and Levitated Accelerometers
David G Garmire
EECS Department
University of California, Berkeley
Technical Report No. UCB/EECS-2007-118
September 20, 2007
http://www.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-118.pdf
Advisor: James Demmel
BibTeX citation:
@phdthesis{Garmire:EECS-2007-118,
Author = {Garmire, David G},
Title = {Methods and Devices for Optical and Electrical Metrology with Application to Phase-Shifting Interferometers, Torsional Microstructures, and Levitated Accelerometers},
School = {EECS Department, University of California, Berkeley},
Year = {2007},
Month = {Sep},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-118.html},
Number = {UCB/EECS-2007-118}
}
EndNote citation:
%0 Thesis %A Garmire, David G %T Methods and Devices for Optical and Electrical Metrology with Application to Phase-Shifting Interferometers, Torsional Microstructures, and Levitated Accelerometers %I EECS Department, University of California, Berkeley %D 2007 %8 September 20 %@ UCB/EECS-2007-118 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-118.html %F Garmire:EECS-2007-118