Applying Drop-On-Demand Inkjet Printing Method to Maskless Lithography
Yan Wang
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M05/17
May 2005
Advisor: Jeffrey Bokor
BibTeX citation:
@phdthesis{Wang:M05/17,
Author = {Wang, Yan},
Title = {Applying Drop-On-Demand Inkjet Printing Method to Maskless Lithography},
School = {EECS Department, University of California, Berkeley},
Year = {2005},
Month = {May},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2005/8333.html},
Number = {UCB/ERL M05/17}
}
EndNote citation:
%0 Thesis %A Wang, Yan %T Applying Drop-On-Demand Inkjet Printing Method to Maskless Lithography %I EECS Department, University of California, Berkeley %D 2005 %@ UCB/ERL M05/17 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2005/8333.html %F Wang:M05/17
