Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Ignition Conditions for Peripheral Plasma in a Grounded Chamber Connected to a Dual Frequency Capactive Discharge

Michael A. Lieberman, Allan J. Lichtenberg, S. Kim and J. T. Gudmunsson

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M05/10
March 2005


BibTeX citation:

@techreport{Lieberman:M05/10,
    Author = {Lieberman, Michael A. and Lichtenberg, Allan J. and Kim, S. and Gudmunsson, J. T.},
    Title = {Ignition Conditions for Peripheral Plasma in a Grounded Chamber Connected to a Dual Frequency Capactive Discharge},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2005},
    Month = {Mar},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2005/4298.html},
    Number = {UCB/ERL M05/10}
}

EndNote citation:

%0 Report
%A Lieberman, Michael A.
%A Lichtenberg, Allan J.
%A Kim, S.
%A Gudmunsson, J. T.
%T Ignition Conditions for Peripheral Plasma in a Grounded Chamber Connected to a Dual Frequency Capactive Discharge
%I EECS Department, University of California, Berkeley
%D 2005
%@ UCB/ERL M05/10
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2005/4298.html
%F Lieberman:M05/10