Ignition Conditions for Peripheral Plasma in a Grounded Chamber Connected to a Dual Frequency Capactive Discharge
Michael A. Lieberman, Allan J. Lichtenberg, S. Kim and J. T. Gudmunsson
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M05/10
March 2005
BibTeX citation:
@techreport{Lieberman:M05/10,
Author = {Lieberman, Michael A. and Lichtenberg, Allan J. and Kim, S. and Gudmunsson, J. T.},
Title = {Ignition Conditions for Peripheral Plasma in a Grounded Chamber Connected to a Dual Frequency Capactive Discharge},
Institution = {EECS Department, University of California, Berkeley},
Year = {2005},
Month = {Mar},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2005/4298.html},
Number = {UCB/ERL M05/10}
}
EndNote citation:
%0 Report %A Lieberman, Michael A. %A Lichtenberg, Allan J. %A Kim, S. %A Gudmunsson, J. T. %T Ignition Conditions for Peripheral Plasma in a Grounded Chamber Connected to a Dual Frequency Capactive Discharge %I EECS Department, University of California, Berkeley %D 2005 %@ UCB/ERL M05/10 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2005/4298.html %F Lieberman:M05/10