Characterization of the Critical Dimension
J. P. Cain
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M04/50
2004
BibTeX citation:
@techreport{Cain:M04/50,
Author = {J. P. Cain},
Title = {Characterization of the Critical Dimension},
Institution = {EECS Department, University of California, Berkeley},
Year = {2004},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2004/4280.html},
Number = {UCB/ERL M04/50}
}
EndNote citation:
%0 Report %A Cain, J. P. %T Characterization of the Critical Dimension %I EECS Department, University of California, Berkeley %D 2004 %@ UCB/ERL M04/50 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2004/4280.html %F Cain:M04/50