Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Characterization of the Critical Dimension

J. P. Cain

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M04/50
2004


BibTeX citation:

@techreport{Cain:M04/50,
    Author = {Cain, J. P.},
    Title = {Characterization of the Critical Dimension},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2004},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2004/4280.html},
    Number = {UCB/ERL M04/50}
}

EndNote citation:

%0 Report
%A Cain, J. P.
%T Characterization of the Critical Dimension
%I EECS Department, University of California, Berkeley
%D 2004
%@ UCB/ERL M04/50
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2004/4280.html
%F Cain:M04/50