Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Extreme Ultraviolet Imaging and Resist Characterization Using Spatial Filtering Techniques

Michael D. Shumway

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M04/49
2004

Advisor: Jeffrey Bokor


BibTeX citation:

@phdthesis{Shumway:M04/49,
    Author = {Shumway, Michael D.},
    Title = {Extreme Ultraviolet Imaging and Resist Characterization Using Spatial Filtering Techniques},
    School = {EECS Department, University of California, Berkeley},
    Year = {2004},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2004/4279.html},
    Number = {UCB/ERL M04/49}
}

EndNote citation:

%0 Thesis
%A Shumway, Michael D.
%T Extreme Ultraviolet Imaging and Resist Characterization Using Spatial Filtering Techniques
%I EECS Department, University of California, Berkeley
%D 2004
%@ UCB/ERL M04/49
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2004/4279.html
%F Shumway:M04/49