Extreme Ultraviolet Imaging and Resist Characterization Using Spatial Filtering Techniques

Michael D. Shumway

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M04/49
2004

Advisor: Jeffrey Bokor


BibTeX citation:

@phdthesis{Shumway:M04/49,
    Author = {Shumway, Michael D.},
    Title = {Extreme Ultraviolet Imaging and Resist Characterization Using Spatial Filtering Techniques},
    School = {EECS Department, University of California, Berkeley},
    Year = {2004},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2004/4279.html},
    Number = {UCB/ERL M04/49}
}

EndNote citation:

%0 Thesis
%A Shumway, Michael D.
%T Extreme Ultraviolet Imaging and Resist Characterization Using Spatial Filtering Techniques
%I EECS Department, University of California, Berkeley
%D 2004
%@ UCB/ERL M04/49
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2004/4279.html
%F Shumway:M04/49