Extreme Ultraviolet Imaging and Resist Characterization Using Spatial Filtering Techniques
Michael D. Shumway
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M04/49
2004
Advisor: Jeffrey Bokor
BibTeX citation:
@phdthesis{Shumway:M04/49,
Author = {Shumway, Michael D.},
Title = {Extreme Ultraviolet Imaging and Resist Characterization Using Spatial Filtering Techniques},
School = {EECS Department, University of California, Berkeley},
Year = {2004},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2004/4279.html},
Number = {UCB/ERL M04/49}
}
EndNote citation:
%0 Thesis %A Shumway, Michael D. %T Extreme Ultraviolet Imaging and Resist Characterization Using Spatial Filtering Techniques %I EECS Department, University of California, Berkeley %D 2004 %@ UCB/ERL M04/49 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/2004/4279.html %F Shumway:M04/49