Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Design, Fabrication, and Optical Analysis of Nanomirrors for Maskless EUV Lithography

Yashesh A. Shroff

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M04/32
2004

Advisor: William G. Oldham


BibTeX citation:

@phdthesis{Shroff:M04/32,
    Author = {Shroff, Yashesh A.},
    Title = {Design, Fabrication, and Optical Analysis of Nanomirrors for Maskless EUV Lithography},
    School = {EECS Department, University of California, Berkeley},
    Year = {2004},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2004/4242.html},
    Number = {UCB/ERL M04/32}
}

EndNote citation:

%0 Thesis
%A Shroff, Yashesh A.
%T Design, Fabrication, and Optical Analysis of Nanomirrors for Maskless EUV Lithography
%I EECS Department, University of California, Berkeley
%D 2004
%@ UCB/ERL M04/32
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2004/4242.html
%F Shroff:M04/32