Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Integrated CMP Metrology and Modeling with Respect to Circuit Performance

Runzi Chang

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M04/11
2004

Advisor: Costas J. Spanos


BibTeX citation:

@phdthesis{Chang:M04/11,
    Author = {Chang, Runzi},
    Title = {Integrated CMP Metrology and Modeling with Respect to Circuit Performance},
    School = {EECS Department, University of California, Berkeley},
    Year = {2004},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/2004/4210.html},
    Number = {UCB/ERL M04/11}
}

EndNote citation:

%0 Thesis
%A Chang, Runzi
%T Integrated CMP Metrology and Modeling with Respect to Circuit Performance
%I EECS Department, University of California, Berkeley
%D 2004
%@ UCB/ERL M04/11
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/2004/4210.html
%F Chang:M04/11